Browsing Conference contributions by imec author "a62c69c3a7e310de5b19d9226496e4649a07d978"
Now showing items 41-60 of 176
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CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON
Lauwers, Anne; Veloso, Anabela; Hoffmann, Thomas Y.; Van Dal, Mark; Vrancken, Christa; Brus, Stephan; Locorotondo, Sabrina; de Marneffe, Jean-Francois; Sijmus, Bram; Kubicek, Stefan; Chiarella, Thomas; Kmieciak, Malgorzata; Opsomer, Karl; Niwa, Masaaki; Mitsuhashi, Riichirou; Kottantharayil, Anil; Yu, HongYu; Demeurisse, Caroline; Verbeeck, Rita; de Potter de ten Broeck, Muriel; Absil, Philippe; Maex, Karen; Jurczak, Gosia; Biesemans, Serge; Kittl, Jorge (2005-12) -
CMOS-compatible tungsten heaters for silicon photonic waveguides
Masood, Adil; Pantouvaki, Marianna; Goossens, Danny; Lepage, Guy; Verheyen, Peter; Van Thourhout, Dries; Absil, Philippe; Bogaerts, Wim (2012) -
CMP-less integration of fully Ni-silicided metal gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach
Kottantharayil, Anil; Verheyen, Peter; Collaert, Nadine; Dixit, Abhisek; Kaczer, Ben; Snow, Jim; Vos, Rita; Locorotondo, Sabrina; Degroote, Bart; Shi, Xiaoping; Rooyackers, Rita; Mannaert, Geert; Brus, Stephan; Yim, Yong Sik; Lauwers, Anne; Goodwin, Michael; Kittl, Jorge; Van Dal, Mark; Richard, Olivier; Veloso, Anabela; Kubicek, Stefan; Beckx, Stephan; Boullart, Werner; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation
Collart, E.H.; Felch, S.B.; Graoui, H.; Kirkwood, D.; Pawlak, Bartek; Absil, Philippe; Severi, Simone; Janssens, Tom; Vandervorst, Wilfried (2005) -
Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform
Verheyen, Peter; Lepage, Guy; Van Campenhout, Joris; Pantouvaki, Marianna; Absil, Philippe; De Heyn, Peter; Bogaerts, Wim; Dumon, Pieter; Selvaraja, Shankar (2012) -
Coarse wavelength division multiplexer on silicon-on-insulator for 100 GbE
Dwivedi, Sarvagya Paavan; De Heyn, Peter; Absil, Philippe; Van Campenhout, Joris; Bogaerts, Wim (2015) -
Comparison of heater architecture for thermal control of silicon photonics circuits
Masood, Adil; Pantouvaki, Marianna; Lepage, Guy; Verheyen, Peter; Van Campenhout, Joris; Absil, Philippe; Van Thourhout, Dries; Bogaerts, Wim (2013) -
Degradation mechanisms and lifetime assessment of Ge Vertical PIN photodetectors
Croes, Kristof; Simons, Veerle; Truijen, Brecht; Roussel, Philippe; Van Sever, Koen; Tsiara, Artemisia; Franco, Jacopo; Absil, Philippe (2022) -
Demonstration of Ni fully GermanoSilicide as a pFET gate electrode candidate on HfSiON
Yu, HongYu; Singanamalla, Raghunath; Opsomer, Karl; Augendre, Emmanuel; Simoen, Eddy; Kittl, Jorge; Kubicek, Stefan; Severi, Simone; Shi, Xiaoping; Brus, Stephan; Zhao, Chao; de Marneffe, Jean-Francois; Locorotondo, Sabrina; Shamiryan, Denis; Van Dal, Mark; Veloso, Anabela; Lauwers, Anne; Niwa, Masaaki; Maex, Karen; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
Demonstration of phase-controlled Ni-FUSI CMOSFETs employing SiON dielectrics capped with sub-monolayer ALD HfSiON for low power applications
Yu, HongYu; Chang, Shou-Zen; Veloso, Anabela; Lauwers, Anne; Delabie, Annelies; Everaert, Jean-Luc; Singanamalla, Raghunath; Kerner, Christoph; Vrancken, Christa; Brus, Stephan; Absil, Philippe; Hoffmann, Thomas; Biesemans, Serge (2007-09) -
Demonstration of recessed SiGe S/D and inserted metal gate on HfO2 for high performance pFETs
Verheyen, Peter; Eneman, Geert; Rooyackers, Rita; Loo, Roger; Eeckhout, Lieve; Rondas, Dirk; Leys, Frederik; Snow, Jim; Shamiryan, Denis; Demand, Marc; Hoffmann, Thomas Y.; Goodwin, Michael; Fujimoto, Hiromasa; Ravit, Claire; Lee, Byeong Chan; Caymax, Matty; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005-12) -
Demonstration of scaled 0.099μm² FinFET 6T-SRAM cell using full-field EUV lithography for (Sub-)22nm node single-patterning technology
Veloso, Anabela; Demuynck, Steven; Ercken, Monique; Goethals, Mieke; Locorotondo, Sabrina; Lazzarino, Frederic; Altamirano Sanchez, Efrain; Huffman, Craig; De Keersgieter, An; Brus, Stephan; Demand, Marc; Struyf, Herbert; De Backer, Johan; Hermans, Jan; Delvaux, Christie; Baudemprez, Bart; Vandeweyer, Tom; Van Roey, Frieda; Baerts, Christina; Goossens, Danny; Dekkers, Harold; Ong, Patrick; Heylen, Nancy; Kellens, Kristof; Volders, Henny; Hikavyy, Andriy; Vrancken, Christa; Rakowski, Michal; Verhaegen, Staf; Dusa, Mircea; Romijn, Leon; Pigneret, Charles; van Dijk, Andre; Schreutelkamp, Rob; Cockburn, Andrew; Gravey, Virginie; Meiling, H.; Hultermans, B.; Lok, S.; Shah, K.; Rajagopalan, R.; Gelatos, J.; Richard, Olivier; Bender, Hugo; Vandenberghe, Geert; Beyer, Gerald; Absil, Philippe; Hoffmann, Thomas Y.; Ronse, Kurt; Biesemans, Serge (2009-12) -
Design and optimization of subwavelength silicon photonics edge coupler for cleaved filters
Moura, Uiara; Bustamante, Yesica; Farias, Giovanni; Snyder, Brad; Miller, Andy; Van Campenhout, Joris; Absil, Philippe (2018) -
Design of thin film stacks for non-destructive electro-optical characterizations by spectroscopic ellipsometry
Hsu, Mark; Pantouvaki, Marianna; Merckling, Clement; Marinelli, Antonio; Van Campenhout, Joris; Absil, Philippe; Van Thourhout, Dries (2016) -
Detection or modulation at 35 Gbit/s with a standard CMOS-processed optical waveguide
Korn, D.; Yu, Hui; Hillerkuss, D.; Alloatti, Luca; Mattern, Christophe; Komorowska, Katarzyna; Bogaerts, Wim; Baets, Roel; Van Campenhout, Joris; Verheyen, Peter; Wouters, Johan M. D.; Moelants, Myriam; Absil, Philippe; Koos, Christian; Freude, W.; Leuthold, J. (2012) -
Direct digital control of an efficient silicon+liquid crystal phase shifter
Xing, Yufei; Ako, T.; George, J.P.; Korn, D.; Yu, H.; Verheyen, Peter; Pantouvaki, Marianna; Lepage, Guy; Absil, Philippe; Koos, C; Leuthold, J.; Beeckman, J.; Bogaerts, Wim (2014) -
Doping geometries for 40G carrier-depletion-based silicon optical modulators
Yu, Hui; Bogaerts, Wim; Komorowska, Katarzyna; Baets, Roel; Korn, Dietmar; Alloatti, Luca; Hillerkuss, David; Koos, Christian; Freude, Wolfgang; Leuthold, Juerg; Van Campenhout, Joris; Verheyen, Peter; Wouters, Johan M. D.; Moelants, Myriam; Absil, Philippe (2012) -
Electrical and Optical Reliability Analysis of GeSi Electro-Absorption Modulators
Tsiara, Artemisia; Srinivasan, Ashwyn; Balakrishnan, Sadhishkumar; Pantouvaki, Marianna; Absil, Philippe; Van Campenhout, Joris; Croes, Kristof (2020) -
Fast and accurate modeling of large TSV arrays in 3D-ICs using a 3D circuit model validated against full-wave FEM simulations and RF measurements
Rack, Martin; Raskin, J.P.; Sun, Xiao; Van der Plas, Geert; Absil, Philippe; Beyne, Eric (2016) -
FinFETs junctions optimization by conventional ion implantation for (sub-)22nm technology nodes circuit applications
Veloso, Anabela; De Keersgieter, An; Brus, Stephan; Horiguchi, Naoto; Absil, Philippe; Hoffmann, Thomas Y. (2010-09)