Recently added

Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology

Guo, Wei; Moroz, Victor; Van der Plas, Geert; Choi, M.; Redolfi, Augusto; Smith, L.; Eneman, Geert; Van Huylenbroeck, Stefaan; Su, P.D.; Ivankovic, Andrej; De Wachter, Bart; Debusschere, Ingrid; Croes, Kris; De Wolf, Ingrid; Mercha, Abdelkarim; Beyer, Gerald; Swinnen, Bart; Beyne, Eric (2013)

Material influences on process performance in chemo-epitaxy directed self-assembly integration

Gronheid, Roel; Van Look, Lieve; Rincon Delgadillo, Paulina; Pollentier, Ivan; Cao, Yi; Lin, Guanyang; Nealey, Paul (2013)

Rectification of EUV-patterned contact holes using directed self-assembly

Gronheid, Roel; Singh, Arjun; Younkin, Todd; Rincon Delgadillo, Paulina; Nealey, Paul; Chan, BT; Nafus, Kathleen; Romo Negreira, Ainhoa; Somervell, Mark (2013)

DSA as a complementary lithography technique for contact hole patterning

Gronheid, Roel; Singh, Arjun; Sayan, Safak; Vandenbroeck, Nadia; Chan, BT; Vandenberghe, Geert (2013)

Manufacturing challenges of directed self-assembly

Gronheid, Roel; Rincon Delgadillo, Paulina; Younkin, Todd; Chan, BT; Van Look, Lieve; Pollentier, Ivan; Nealey, Paul (2013)

Status and challenges of directed self-assembly

Gronheid, Roel; Rincon Delgadillo, Paulina; Singh, Arjun; Nealey, Paul (2013)

Process improvements on UW DSA flow and defect performance

Gronheid, Roel; Rincon Delgadillo, Paulina; Nealey, Paul (2013)

Bias-temperature instability of Si and Si(Ge)-channel sub-1nm EOT p-MOS devices: challenges and solutions

Groeseneken, Guido; Aoulaiche, Marc; Cho, Moon Ju; Franco, Jacopo; Kaczer, Ben; Kauerauf, Thomas; Mitard, Jerome; Ragnarsson, Lars-Ake; Roussel, Philippe; Toledano Luque, Maria (2013)

Mid-infrared silicon photonics

Green, W.M.J.; Kuyken, Bart; Liu, X.; Van Camp, M.A.; Assefa, S.; Gill, D.M.; Barwicz, Tymon; Shank, S.M.; Vlasov, Y.A.; Osgood, R.M.; Baets, Roel; Roelkens, Gunther (2013)

Advanced characterization of oxide traps: the dynamic time-dependent defect spectroscopy

Grasser, Tibor; Rott, K.; Reisinger, H.; Wagner, P.J.; Goes, W; Schanovsky, F.; Waltl, M.; Toledano Luque, Maria; Kaczer, Ben (2013)

Hydrogen-related volatile defects as the possible cause for the recoverable component of NBTI

Grasser, T.; Rott, K.; Reisinger, H.; Waltl, M.; Wagner, P.; Schanovsky, F.; Goes, W.; Pobegen, G.; Kaczer, Ben (2013)

Improved surface cleaning by in situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells

Granata, Stefano; Bearda, Twan; Dross, Frederic; Gordon, Ivan; Poortmans, Jef; Mertens, Paul (2013)

Vacancy-modulated conductive oxide resistive RAM (VMCO-RRAM): an area-scalable switching current, self-compliant, highly nonlinear and wide on/off-window resistive switching cell

Govoreanu, Bogdan; Redolfi, Augusto; Zhang, Leqi; Adelmann, Christoph; Popovici, Mihaela Ioana; Clima, Sergiu; Hody, Hubert; Paraschiv, Vasile; Radu, Iuliana; Franquet, Alexis; Liu, Jen-Chieh; Swerts, Johan; Richard, Olivier; Bender, Hugo; Altimime, Laith; Jurczak, Gosia (2013)

Performance and reliability of ultra-thin HfO2-based RRAM (UTO-RRAM)

Govoreanu, Bogdan; Ajaykumar, Arjun; Lipowicz, Hubert; Chen, Yangyin; Liu, Jen-Chieh; Degraeve, Robin; Zhang, Leqi; Clima, Sergiu; Goux, Ludovic; Radu, Iuliana; Fantini, Andrea; Raghavan, Naga; Kar, Gouri Sankar; Kim, Woosik; Redolfi, Augusto; Wouters, Dirk; Altimime, Laith; Jurczak, Gosia (2013)

Optical-thermal-electrical model for a single cell PV module in non-steady-state and non-uniform conditions build in SPICE

Goverde, Hans; Govaerts, Jonathan; Baert, Kris; Catthoor, Francky; Driesen, Johan; Poortmans, Jef (2013)

I-module technology: evaluation and evolution

Govaerts, Jonathan; Boulord, Caroline; Fisher, Mark; Beaucarne, Guy; Gordon, Ivan; Poortmans, Jef; Baert, Kris (2013)

Optimization of W\Al2O3\Cu(-Te) material stack for high-performance conductive-bridging memory cells

Goux, Ludovic; Kim, Woosik; Opsomer, Karl; Belmonte, Attilio; Kar, Gouri Sankar; De Stefano, Francesca; Afanasiev, Valeri; Celano, Umberto; Houssa, Michel; Devulder, Wouter; Detavernier, Christophe; Muller, Robert; Vandervorst, Wilfried; Jurczak, Gosia (2013)

Optimization of W\Al2O3\Cu(-Te) material stack for high-performance conductive-bridging memory cells

Goux, Ludovic; Kim, Woosik; Opsomer, Karl; Belmonte, Attilio; Kar, Gouri Sankar; De Stefano, Francesca; Afanasiev, Valeri; Celano, Umberto; Houssa, Michel; Devulder, Wouter; Detavernier, C.; Muller, Robert; Vandervorst, Wilfried; Jurczak, Gosia (2013)

Understanding the intrinsic characteristics and memory trade-offs of sub-μA filamentary RRAM operation

Goux, Ludovic; Fantini, Andrea; Degraeve, Robin; Raghavan, Naga; Nigon, Robin; Strangio, Sebastiano; Wouters, Dirk; Govoreanu, Bogdan; Chen, Yangyin; Komura, Masanori; De Stefano, Francesca; Afanasiev, Valeri; Jurczak, Gosia (2013)

Switching mechanisms in NiO- and HfO2-based integrated OxRRAM cells

Goux, Ludovic (2013)

Conference contributions: Recent submissions

Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology ﻿

Material influences on process performance in chemo-epitaxy directed self-assembly integration ﻿

Rectification of EUV-patterned contact holes using directed self-assembly ﻿

DSA as a complementary lithography technique for contact hole patterning ﻿

Manufacturing challenges of directed self-assembly ﻿

Status and challenges of directed self-assembly ﻿

Process improvements on UW DSA flow and defect performance ﻿

Bias-temperature instability of Si and Si(Ge)-channel sub-1nm EOT p-MOS devices: challenges and solutions ﻿

Mid-infrared silicon photonics ﻿

Advanced characterization of oxide traps: the dynamic time-dependent defect spectroscopy ﻿

Hydrogen-related volatile defects as the possible cause for the recoverable component of NBTI ﻿

Improved surface cleaning by in situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells ﻿

Vacancy-modulated conductive oxide resistive RAM (VMCO-RRAM): an area-scalable switching current, self-compliant, highly nonlinear and wide on/off-window resistive switching cell ﻿

Performance and reliability of ultra-thin HfO2-based RRAM (UTO-RRAM) ﻿

Optical-thermal-electrical model for a single cell PV module in non-steady-state and non-uniform conditions build in SPICE ﻿

I-module technology: evaluation and evolution ﻿

Optimization of W\Al2O3\Cu(-Te) material stack for high-performance conductive-bridging memory cells ﻿

Optimization of W\Al2O3\Cu(-Te) material stack for high-performance conductive-bridging memory cells ﻿

Understanding the intrinsic characteristics and memory trade-offs of sub-μA filamentary RRAM operation ﻿

Switching mechanisms in NiO- and HfO2-based integrated OxRRAM cells ﻿

Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology

Material influences on process performance in chemo-epitaxy directed self-assembly integration

Rectification of EUV-patterned contact holes using directed self-assembly

DSA as a complementary lithography technique for contact hole patterning

Manufacturing challenges of directed self-assembly

Status and challenges of directed self-assembly

Process improvements on UW DSA flow and defect performance

Bias-temperature instability of Si and Si(Ge)-channel sub-1nm EOT p-MOS devices: challenges and solutions

Mid-infrared silicon photonics

Advanced characterization of oxide traps: the dynamic time-dependent defect spectroscopy

Hydrogen-related volatile defects as the possible cause for the recoverable component of NBTI

Improved surface cleaning by in situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells

Vacancy-modulated conductive oxide resistive RAM (VMCO-RRAM): an area-scalable switching current, self-compliant, highly nonlinear and wide on/off-window resistive switching cell

Performance and reliability of ultra-thin HfO2-based RRAM (UTO-RRAM)

Optical-thermal-electrical model for a single cell PV module in non-steady-state and non-uniform conditions build in SPICE

I-module technology: evaluation and evolution

Optimization of W\Al2O3\Cu(-Te) material stack for high-performance conductive-bridging memory cells

Optimization of W\Al2O3\Cu(-Te) material stack for high-performance conductive-bridging memory cells

Understanding the intrinsic characteristics and memory trade-offs of sub-μA filamentary RRAM operation

Switching mechanisms in NiO- and HfO2-based integrated OxRRAM cells