Recently added

Development status of EUV resist

Hirayama, Taku; Utsumi, Yoshiyuki; Iwashita, Jun; Kawana, Daisuke; Lorusso, Gian (2013)

Low temperature pre-epi Treatment: critical parameters to control interface contamination

Hikavyy, Andriy; Loo, Roger; Dhayalan, Sathish Kumar; Wostyn, Kurt; Rosseel, Erik; Simoen, Eddy; Machkaoutsan, Vladimir; Profijt, Harald; Tolle, John (2013)

Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors

Hikavyy, Andriy; Kubicek, Stefan; Chew, Soon Aik; Boccardi, Guillaume; Favia, Paola; Eneman, Geert; Loo, Roger (2013)

Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors

Hikavyy, Andriy; Chew, Soon Aik; Boccardi, Guillaume; Favia, Paola; Loo, Roger (2013)

Mitigation of plasma-induced damage of advanced 2.0 porous dielectrics by the pore stuffing approach

Heyne, Markus; Zhang, Liping; de Marneffe, Jean-Francois; Gronheid, Roel; Wilson, Chris; Baklanov, Mikhaïl (2013)

Plasma-damage mitigation of a 2.0 PECVD porous organo silicon glass by pore stuffing

Heyne, Markus; de Marneffe, Jean-Francois; Zhang, Liping; Baklanov, Mikhaïl (2013)

PV-battery sizing for stand-alone lighting application

Herteleer, Bert; Cappelle, Jan; Appels, Reinhart; Lefevre, Buvana; Driesen, Johan; Catthoor, Francky (2013)

Towards manufacturing a 10nm node device with complementary EUV lithography

Hermans, Jan; Dai, Huixiong; Niroomand, Ardavan; Laidler, David; Mao, Ming; Chen, Yongmei; Leray, Philippe; Ngai, Chris; Cheng, Shaunee (2013)

Flexible OLED displays with IGZO backplanes on PEN

Heremans, Paul; Nag, Manoj; van der Steen, Jan-Laurens; Tripathi, Ashutosh; Li, Flora; Maas, Joris; Vicca, Peter; Smout, Steve; Ameys, Marc; Willegems, Myriam; Tempelaars, Karin; van Leuken, Linda; van der Putten, Bas; Myny, Kris; Muller, Robert; Steudel, Soeren; Schols, Sarah; Genoe, Jan; Gelinck, Gerwin (2013)

Oxide and Organic Transistors on plastic foil for application in flexible OLED displays, sensor arrays and circuits

Heremans, Paul; Nag, Manoj; van der Steen, Jan-Laurens; Tripathi, Ashutosh; Li, Flora; Maas, Joris; Smout, Steve; Vicca, Peter; Ameys, Marc; Willegems, Myriam; Tempelaars, Karin; van Leuken, Linda; van der Putten, Bas; Rockele, Maarten; Myny, Kris; Malinowski, Pawel; Kumar, Abhishek; Moet, Date; Steudel, Soeren; Schols, Sarah; Genoe, Jan; Gelinck, Gerwin (2013)

Optical properties of SOI waveguides functionalized with close-packed quantum dot films

Hens, Zeger; Omari, Abdoulghafar; Geiregat, Pieter; Van Thourhout, Dries (2013)

Readiness of EUV lithography for insertion into manufacturing: The IMEC NXE:3100 program

Hendrickx, Eric; Gronheid, Roel; Hermans, Jan; Lorusso, Gian; Foubert, Philippe; Pollentier, Ivan; Goethals, Mieke; Jonckheere, Rik; Vandenberghe, Geert; Ronse, Kurt (2013)

Quasi-3D method: time-efficient TCAD and mixed-mode simulations on finFET technologies

Hellings, Geert; Chen, Shih-Hung; Linten, Dimitri; Scholz, Mirko; Groeseneken, Guido (2013)

Memristor-based data memory architecture in ASIP design

Hartmann, Matthias; Raghavan, Praveen; Van der Perre, Liesbet; Dehaene, Wim; Agrawal, Prashant (2013)

Diamond nanoprobes for electrical probing of nanoelectronics device structures

Hantschel, Thomas; Clarysse, Trudo; Nuytten, Thomas; Paredis, Kristof; Eyben, Pierre; Vandervorst, Wilfried (2013)

Reliability challenges of real-time systems in forthcoming technology nodes

Hamdioui, Said; Gizopoulos, Dimitris; Groeseneken, Guido; Nicolaidis, Michael; Grasset, Arnaud; Bonnot, Philippe (2013)

Metrology and inspection challenges for manufacturing 3D stacked IC's

Halder, Sandip; Stiers, Karen; Miller, Andy; De Wolf, Ingrid; Phommahaxay, Alain; Maenhoudt, Mireille; Beyne, Eric; Guerrieri, Stefano (2013)

GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

Halder, Sandip; Stiers, Karen; Kandaswamy, Prem Kumar; Rosmeulen, Maarten; Carbonell, Laure; Saripalli, Yoga; Osman, Haris; Rosseel, Erik; Mani, Antonio; Hu, Qiona; Vedula, Srinivas; Polli, Marco (2013)

Identification of deep levels associated with extended and point defects in GeSn epitaxial layers using DLTS

Gupta, Somya; Simoen, Eddy; Vrielinck, Henk; Merckling, Clement; Vincent, Benjamin; Gencarelli, Federica; Loo, Roger; Heyns, Marc (2013)

Electrical activity of threading dislocations and defect complexes in GeSn epitaxial layers

Gupta, Somya; Simoen, Eddy; Asano, Takanori; Nakatsuka, Osamu; Gencarelli, Federica; Shimura, Yosuke; Moussa, Alain; Loo, Roger; Zaima, Shigeaki; Nguyen, Ngoc Duy; Heyns, Marc (2013)

Conference contributions: Recent submissions

Development status of EUV resist ﻿

Low temperature pre-epi Treatment: critical parameters to control interface contamination ﻿

Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors ﻿

Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors ﻿

Mitigation of plasma-induced damage of advanced 2.0 porous dielectrics by the pore stuffing approach ﻿

Plasma-damage mitigation of a 2.0 PECVD porous organo silicon glass by pore stuffing ﻿

PV-battery sizing for stand-alone lighting application ﻿

Towards manufacturing a 10nm node device with complementary EUV lithography ﻿

Flexible OLED displays with IGZO backplanes on PEN ﻿

Oxide and Organic Transistors on plastic foil for application in flexible OLED displays, sensor arrays and circuits ﻿

Optical properties of SOI waveguides functionalized with close-packed quantum dot films ﻿

Readiness of EUV lithography for insertion into manufacturing: The IMEC NXE:3100 program ﻿

Quasi-3D method: time-efficient TCAD and mixed-mode simulations on finFET technologies ﻿

Memristor-based data memory architecture in ASIP design ﻿

Diamond nanoprobes for electrical probing of nanoelectronics device structures ﻿

Reliability challenges of real-time systems in forthcoming technology nodes ﻿

Metrology and inspection challenges for manufacturing 3D stacked IC's ﻿

GaN-on-Si process defect detection and analysis for HB-LEDs and power devices ﻿

Identification of deep levels associated with extended and point defects in GeSn epitaxial layers using DLTS ﻿

Electrical activity of threading dislocations and defect complexes in GeSn epitaxial layers ﻿

Development status of EUV resist

Low temperature pre-epi Treatment: critical parameters to control interface contamination

Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors

Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors

Mitigation of plasma-induced damage of advanced 2.0 porous dielectrics by the pore stuffing approach

Plasma-damage mitigation of a 2.0 PECVD porous organo silicon glass by pore stuffing

PV-battery sizing for stand-alone lighting application

Towards manufacturing a 10nm node device with complementary EUV lithography

Flexible OLED displays with IGZO backplanes on PEN

Oxide and Organic Transistors on plastic foil for application in flexible OLED displays, sensor arrays and circuits

Optical properties of SOI waveguides functionalized with close-packed quantum dot films

Readiness of EUV lithography for insertion into manufacturing: The IMEC NXE:3100 program

Quasi-3D method: time-efficient TCAD and mixed-mode simulations on finFET technologies

Memristor-based data memory architecture in ASIP design

Diamond nanoprobes for electrical probing of nanoelectronics device structures

Reliability challenges of real-time systems in forthcoming technology nodes

Metrology and inspection challenges for manufacturing 3D stacked IC's

GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

Identification of deep levels associated with extended and point defects in GeSn epitaxial layers using DLTS

Electrical activity of threading dislocations and defect complexes in GeSn epitaxial layers