Authors

Mack, Chris A.; Severi, Joren; Zidan, Mohamed; De Simone, Danilo; Lorusso, Gian

DOI

10.1117/12.2614454

EISBN

978-1-5106-4982-8

ISBN

978-1-5106-4981-1

ISSN

0277-786X

Conference

Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference

Journal

Proceedings of SPIE

Volume

12053

Title

Unbiased Roughness Measurements from Low Signal-to-Noise Ratio SEM Images

Publication type

Proceedings paper