EISBN
978-1-5106-4986-6
ISBN
978-1-5106-4985-9
ISSN
0277-786X
Conference
Conference on Advances in Patterning Materials and Processes XXXIX Part of SPIE Advanced Lithography and Patterning Conference
Journal
Proceedings of SPIE
Volume
12055
Title
Resist line edge roughness mitigation for high-NA EUVL
Publication type
Proceedings paper