Browsing Presentations by imec author "2e8a8522bb9f831b95ac2dc3cf698c12bc04b1b7"
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Advanced wafer surface cleaning technology
Mertens, Paul; Vos, Rita; Vereecke, Guy; Arnauts, Sophia; Bearda, Twan; De Waele, Rita; Eitoku, Atsuro; Fyen, Wim; Geckiere, J.; Hellin, David; Holsteyns, Frank; Kesters, Els; Claes, Martine; Kenis, Karine; Kraus, Harald; Malhouitre, Stephane; Lee, Kuntack; Kocsis, Michael; Onsia, Bart; Garaud, Sylvain; Rip, Jens; Snow, Jim; Teerlinck, I.; Van Hoeymissen, Jan; Barbagini, Francesca; Xu, Kaidong; Paraschiv, Vasile; De Gendt, Stefan; Mannaert, Geert; Heyns, Marc (2004) -
Effective metal gate work function modification by ion implantation with W-based gate stack
Li, Zilan; Schram, Tom; Kerner, Christoph; Witters, Thomas; Singanamalla, Raghunath; Pourtois, Geoffrey; Paraschiv, Vasile; Hoffmann, Thomas Y.; Rohr, Erika; Absil, Philippe; De Gendt, Stefan; De Meyer, Kristin (2008) -
Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structure
Goux, Ludovic; Russo, G.; Lisoni, Judit; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R. (2005) -
Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Goux, Ludovic; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Zhen, X.; Kaczer, Ben; Haspeslagh, Luc; Wouters, Dirk; Muller, C.; Caputa, C.; Zambrano, R. (2004) -
Growth of copper and copper compound nanowires
Dictus, Dries; Shamiryan, Denis; Paraschiv, Vasile; Boullart, Werner; De Gendt, Stefan; Baklanov, Mikhaïl; Vinckier, Chris; Vanhaelemeersch, Serge (2008) -
HF based solutions for HfO2 removal. Effect of pH and temperature on HfO2:SiO2 etch selectivity
Paraschiv, Vasile; Claes, Martine; Baklanov, Mikhaïl; Boullart, Werner; De Gendt, Stefan; Vanhaelemeersch, Serge (2004) -
Implementation of high-K and metal gate materials for the 45nm node and beyond: gate patterning development
Beckx, Stephan; Demand, Marc; Locorotondo, Sabrina; Henson, K.; Claes, Martine; Paraschiv, Vasile; Shamiryan, Denis; Jaenen, Patrick; Boullart, Werner; De Gendt, Stefan; Biesemans, Serge; Vanhaelemeersch, Serge; Vertommen, Johan; Coenegrachts, Bart (2004) -
Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Goux, Ludovic; Paraschiv, Vasile; Boullart, Werner; Lisoni, Judit; Schwitters, M.; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H. (2004) -
Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors
Goux, Ludovic; Xu, Zhen; Paraschiv, Vasile; Schwitters, M.; Lisoni, Judit; Maes, David; Haspeslagh, Luc; Groeseneken, Guido; Zambrano, R.; Wouters, Dirk (2004) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Johnson, J.; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, C.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit (2003) -
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schuster, Thomas; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Lisoni, Judit; Schwitters, Michael; Maes, David; Wouters, Dirk; Casella, P.; Zambrano, R.; Vecchio, G.; Van Autryve, Luc (2004) -
Optical design of planar microlenses for enhanced pixel performance of CMOS imagers
Rochus, Veronique; Guerrieri, Stefano; Van Olmen, Jan; Paraschiv, Vasile; De Wolf, Ingrid; De Moor, Piet; Rottenberg, Xavier (2016) -
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Zambrano, R.; Casella, Patrizia; Corvasce, C.; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk (2002) -
Photon induced low temperature etching of copper and/or formation of copper nanowires
Dictus, Dries; Shamiryan, Denis; Paraschiv, Vasile; Boullart, Werner; Baklanov, Michail; De Gendt, Stefan; Vinckier, Chris; Vanhaelemeersch, Serge (2008) -
Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Schwitters, M.; Everaert, Jean-Luc; Lisoni, Judit; Paraschiv, Vasile; Goux, Ludovic; Wouters, Dirk; Monchoix, H.; Caputa, Concetta; Zambrano, R. (2004) -
Profile control for low-k patterning using TaN and TiN metallic hardmasks
Struyf, Herbert; Hendrickx, Dirk; Paraschiv, Vasile; Campos Garcia, Diana; Mannaert, Geert; Boullart, Werner; Vanhaelemeersch, Serge (2007) -
Selective wet etching of Hf-based layers
Snow, Jim; Claes, Martine; Paraschiv, Vasile; Kraus, Harald; Eitoku, Atsuro; Vos, Rita; Mertens, Paul; Boullart, Werner; De Gendt, Stefan; Heyns, Marc (2004) -
Selective wet removal of Hf-based layers and post-dry etch residues high-k and metal gate
Claes, Martine; Paraschiv, Vasile; Beckx, Stephan; Demand, Marc; Deweerd, Wim; Garaud, Sylvain; Kraus, Harald; Vos, Rita; Snow, Jim; Boullart, Werner; De Gendt, Stefan (2004) -
SrBi2Ta2O2 Patterning for feram applications: a dry -wet approach
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Wouters, Dirk; Vecchio, Emma; Fragala, Maria-Elena; Van Autryve, Luc; Monchoix, Hervé; Casella, Patrizia; Zambrano, Raffaele (2003)