Browsing Presentations by imec author "a6ed59f21c0ebb56603e40ffe655aec8fdc6bf28"
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3D imaging of Si FinFETs by combined HAADF-STEM and EDS tomography
Qiu, Yang; Van Marcke, Patricia; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried (2014) -
Adhesion study between materials for integration of copper and inorganic low-k dielectrics
Lanckmans, Filip; Brongersma, Sywert; Poortmans, Jef; Conard, Thierry; Bender, Hugo; Beyne, Eric; Maex, Karen (2001) -
Alternative gate insulator materials for future generation MOSFETs
Heyns, Marc; Bender, Hugo; Carter, Richard; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; De Witte, Hilde; Groeseneken, Guido; Haukka, S.; Henson, Kirklen; Houssa, Michel; Kubicek, Stefan; Maes, Jos; Naili, Mohamed; Nohira, Hiroshi; Tsai, Wilman; Tuominen, Marko; Vandervorst, R.; Wilhelm, Rudi; Young, Edward; Zhao, Chao (2001) -
Analytical characterization of new high k dielectric stacks
De Witte, Hilde; Conard, Thierry; Bender, Hugo; Vandervorst, Wilfried (2000) -
Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy
Nuytten, Thomas; Jamal, Muhammad Tahir; Hantschel, Thomas; Bogdanowicz, Janusz; Schulze, Andreas; Favia, Paola; Bender, Hugo; De Wolf, Ingrid; Vandervorst, Wilfried (2016) -
Backscattering/channeling study of high dose rare-earth implants in Si
Vantomme, Andre; Wu, Ming Fang; Wahl, U.; Pattyn, Hugo; Bender, Hugo; Langouche, G. (1997) -
Channeled ion beam synthesis: a new technique to form epitaxial rare-earth silicides with high quality
Wu, Ming Fang; Vantomme, Andre; Pattyn, Hugo; Langouche, H.; Bender, Hugo (1996) -
Channeled ion beam synthesis: a new technique to form high-quality rare-earth silicides
Vantomme, Andre; Wu, Ming Fang; Wahl, U.; Pattyn, Hugo; Langouche, H.; Bender, Hugo (1996) -
Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6+N2+H2
Li, H.; Heyvaert, Ilse; Jin, S.; Lanckmans, Filip; Bender, Hugo; Maex, Karen; Froyen, L. (1998) -
Characterization of high-k films grown by atomic layer deposition
Vandervorst, Wilfried; Conard, Thierry; Petry, Jasmine; Brijs, Bert; Bender, Hugo; Richard, Olivier; Caymax, Matty; De Gendt, Stefan; Green, Martin; Cartier, Eduard; Copel, M. (2002) -
Characterization of intragrain defects in polycrystalline silicon layers obtained by aluminum-induced crystallization and epitaxy
Van Gestel, Dries; Gordon, Ivan; Bender, Hugo; Clemente, Francesca; Beaucarne, Guy; Poortmans, Jef (2008) -
Characterization of the post dry etch cleaning of the silicon surface prior to silicon epitaxial growth
Kim, Young-Chang; Caymax, Matty; Bender, Hugo; Vanhaelemeersch, Serge (1998) -
Characterization of ultrathin high-k HfO2 layers grown on silicon: influence of the deposition parameters and interfacial layer
Houssiau, L.; Vitchev, R.G.; Pireaux, J.-J.; Conard, Thierry; Bender, Hugo (2004) -
Chemical analysis on Focused Ion Beam cross-sections by scanning Auger microscopy
Bender, Hugo (2001) -
Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopy
Hens, S.; Van Landuyt, J.; Bender, Hugo; Boullaert, W.; Vanhaelemeersch, Serge (2000) -
Compositional characterization of nickel silicides by HAADF-STEM imaging
Verleysen, Eveline; Bender, Hugo; Richard, Olivier; Schryvers, Dominique; Vandervorst, Wilfried (2010) -
Corrosion of FIBed Cu
Bender, Hugo; Richard, Olivier; Benedetti, Alessandro; Van Marcke, Patricia; Drijbooms, Chris (2005) -
Crystalline silicon thin films with porous Si backside reflector
Bilyalov, Renat; Poortmans, Jef; Richard, Olivier; Bender, Hugo; Kummer, M.; von Konel, H. (2001) -
Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks
Zhao, Chao; Richard, Olivier; Bender, Hugo; Houssa, Michel; Carter, Richard; De Gendt, Stefan; Heyns, Marc; Young, Edward; Tsai, Wilman; Roebben, G.; Van der Biest, O.; Haukka, S. (2001) -
Cu plating of through-Si vias for 3D-stacked integrated circuits
Radisic, Alex; Luhn, Ole; Swinnen, Bart; Bender, Hugo; Drijbooms, Chris; Doumen, Geert; Kellens, Kristof; Ruythooren, Wouter; Vereecken, Philippe (2008)