Browsing by Author "Aabdin, Zainul"
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Publication Controlled and Uniform Wet Etching of Molybdenum Nanowires
;Deng, Kerong ;Erofeev, Ivan ;Ray Chowdhuri, Angshuman ;Saidov, KhakimjonAabdin, ZainulProceedings paper2023-09, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.351-355Publication Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires
Journal article2024, ADVANCED FUNCTIONAL MATERIALS, (34) 12, p.Art. 2310838Publication Controlling the Wet-Etch Directionality in Nanostructured Silicon
Journal article2022, ACS APPLIED ELECTRONIC MATERIALS, (4) 11, p.5191-5198Publication Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors
Journal article2021, ACS APPLIED NANO MATERIALS, (4) 3, p.2664-2672Publication Digital Etching of Molybdenum Interconnects Using Plasma Oxidation
;Erofeev, Ivan ;Hartanto, Antony Winata ;Khan, Muhaimin Mareum ;Deng, KerongKumar, KrishnaJournal article2025, ADVANCED MATERIALS INTERFACES, (12) 1, p.Art. 2400558Publication Dynamics of thin precursor film in wetting of nanopatterned surfaces
Journal article2021, PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, (118) 38, p.e2108074118Publication Nanoscale elastocapillary effect induced by thin-liquid-film instability
Journal article2020, Journal of Physical Chemistry Letters, (11) 7, p.2751-2758Publication Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions
Journal article2024, SMALL, (20) 51, p.Art. 2406713Publication Observation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEM
Proceedings paper2023-08, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 2023-09-12, p.105-110Publication Patterning at the Resolution Limit of Commercial Electron Beam Lithography
Journal article2022, NANO LETTERS, (22) 18, p.7432-7440Publication Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching
Proceedings paper2023-08, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.346-350Publication Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Journal article2024, ADVANCED ELECTRONIC MATERIALS, (10) 9, p.Art. 2400035Publication Study of the anisotropic wet etching of nanoscale structures in alkaline solutions
Proceedings paper2018, Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS, 2/09/2018, p.88-93Publication Transient clustering of reaction intermediates during wet etching of silicon nanostructures
Journal article2017, Nano Letters, (7) 5, p.2953-2958