Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Aabdin, Zainul"

Filter results by typing the first few letters
Now showing 1 - 14 of 14
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Controlled and Uniform Wet Etching of Molybdenum Nanowires

    Deng, Kerong
    ;
    Erofeev, Ivan
    ;
    Ray Chowdhuri, Angshuman
    ;
    Saidov, Khakimjon
    ;
    Aabdin, Zainul
    Proceedings paper
    2023-09, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.351-355
  • Loading...
    Thumbnail Image
    Publication

    Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires

    Saidov, Khakimjon
    ;
    Erofeev, Ivan
    ;
    Aabdin, Zainul
    ;
    Pacco, Antoine  
    ;
    Philipsen, Harold  
    Journal article
    2024, ADVANCED FUNCTIONAL MATERIALS, (34) 12, p.Art. 2310838
  • Loading...
    Thumbnail Image
    Publication

    Controlling the Wet-Etch Directionality in Nanostructured Silicon

    Aabdin, Zainul
    ;
    Ghosh, Tanmay
    ;
    Pacco, Antoine  
    ;
    Raj, Sanoj
    ;
    Do, Hue Thi Bich
    ;
    Saidov, Khakimjon
    Journal article
    2022, ACS APPLIED ELECTRONIC MATERIALS, (4) 11, p.5191-5198
  • Loading...
    Thumbnail Image
    Publication

    Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors

    Anand, Utkarsh
    ;
    Ghosh, Tanmay
    ;
    Aabdin, Zainul
    ;
    Vrancken, Nandi  
    ;
    Yan, Hongwei
    ;
    Xu, XiuMei  
    Journal article
    2021, ACS APPLIED NANO MATERIALS, (4) 3, p.2664-2672
  • Loading...
    Thumbnail Image
    Publication

    Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

    Erofeev, Ivan
    ;
    Hartanto, Antony Winata
    ;
    Khan, Muhaimin Mareum
    ;
    Deng, Kerong
    ;
    Kumar, Krishna
    Journal article
    2025, ADVANCED MATERIALS INTERFACES, (12) 1, p.Art. 2400558
  • Loading...
    Thumbnail Image
    Publication

    Dynamics of thin precursor film in wetting of nanopatterned surfaces

    Anand, Utkarsh
    ;
    Ghosh, Tanmay
    ;
    Aabdin, Zainul
    ;
    Koneti, Siddardha
    ;
    Xu, XiuMei  
    ;
    Holsteyns, Frank  
    Journal article
    2021, PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, (118) 38, p.e2108074118
  • Loading...
    Thumbnail Image
    Publication

    Nanoscale elastocapillary effect induced by thin-liquid-film instability

    Vrancken, Nandi  
    ;
    Ghosh, Tanmay
    ;
    Anand, Utkarsh
    ;
    Aabdin, Zainul
    ;
    Chee, See Wee
    ;
    Baraissov, Zhaslan
    Journal article
    2020, Journal of Physical Chemistry Letters, (11) 7, p.2751-2758
  • Loading...
    Thumbnail Image
    Publication

    Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

    Deng, Kerong
    ;
    Erofeev, Ivan
    ;
    Chowdhuri, Angshuman Ray
    ;
    Philipsen, Harold  
    ;
    Aabdin, Zainul
    Journal article
    2024, SMALL, (20) 51, p.Art. 2406713
  • Loading...
    Thumbnail Image
    Publication

    Observation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEM

    Aabdin, Zainul
    ;
    Xu, XiuMei  
    ;
    Leong, Fong Yew
    ;
    Holsteyns, Frank  
    ;
    Mirsaidov, Utkur
    Proceedings paper
    2023-08, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 2023-09-12, p.105-110
  • Loading...
    Thumbnail Image
    Publication

    Patterning at the Resolution Limit of Commercial Electron Beam Lithography

    Saifullah, Mohammad S. M.
    ;
    Asbahi, Mohamed  
    ;
    Neo, Darren C. J.
    ;
    Mahfoud, Zackaria
    ;
    Tan, Hui Ru
    Journal article
    2022, NANO LETTERS, (22) 18, p.7432-7440
  • Loading...
    Thumbnail Image
    Publication

    Plasma Oxidation of Patterned Mo Nanowires for Precise and Uniform Dry Etching

    Erofeev, Ivan
    ;
    Mareum Khan, Muhaimin
    ;
    Aabdin, Zainul
    ;
    Ray Chowdhuri, Angshuman
    ;
    Pacco, Antoine  
    Proceedings paper
    2023-08, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.346-350
  • Loading...
    Thumbnail Image
    Publication

    Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits

    Erofeev, Ivan
    ;
    Hartanto, Antony Winata
    ;
    Saidov, Khakimjon
    ;
    Aabdin, Zainul
    ;
    Pacco, Antoine  
    Journal article
    2024, ADVANCED ELECTRONIC MATERIALS, (10) 9, p.Art. 2400035
  • Loading...
    Thumbnail Image
    Publication

    Study of the anisotropic wet etching of nanoscale structures in alkaline solutions

    Pacco, Antoine  
    ;
    Aabdin, Zainul
    ;
    Anand, Utkarsh
    ;
    Rip, Jens  
    ;
    Mirsaidov, Utkur
    ;
    Holsteyns, Frank  
    Proceedings paper
    2018, Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS, 2/09/2018, p.88-93
  • Loading...
    Thumbnail Image
    Publication

    Transient clustering of reaction intermediates during wet etching of silicon nanostructures

    Aabdin, Zainul
    ;
    Xu, XiuMei  
    ;
    Sen, Soumyo
    ;
    Anand, Utkarsh
    ;
    Kral, Petr
    ;
    Holsteyns, Frank  
    Journal article
    2017, Nano Letters, (7) 5, p.2953-2958

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings