Browsing by Author "Cao, Yi"
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Publication All track directed self-assembly of block copolymers: process flow and origin of defects
Proceedings paper2012, Alternative Lithographic Technologies IV, 12/02/2012, p.83230DPublication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Proceedings paper2014, 30th European Mask and Lithography Conference - EMLC, 24/06/2014, p.92310RPublication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Oral presentation2014, FujiFilm Electronic Materials WrokshopPublication Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Oral presentation2014, Photomask Technology (BACUS 2014)Publication Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Meeting abstract2014, Micro and Nano Engineering Conference - MNE, 22/09/2014Publication Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Journal article2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31204Publication Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.94230MPublication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, Conference on Photopolymer Science and TechnologyPublication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, 38th International Conference on Micro and NanoEngineering - MNEPublication DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
; ; Publication High thermal stability and high VUV absorption polymer for the P4/pore stuffing approach
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015Publication High throughput grating qualification of directed self-assembly patterns using optical metrology
Journal article2014, Microelectronic Engineering, 123, p.175-179Publication High throughput grating qualification of directed self-assembly patterns using optical metrology
Oral presentation2013, 39th International Conference on Micro and Nano Engineering - MNEPublication Impact of annealing temperature on DSA process: toward faster assembly kinetics
Proceedings paper2018, Advances in Patterning Materials and Processes XXXV, 24/02/2018, p.105860TPublication Impact of BCP asymmetry on DSA patterning performance
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.943215Publication Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Oral presentation2012, FujiFilm Litho WorkshopPublication Implementation of surface energy modification in grapho-epitaxy directed self-assembly for hole multiplication
Oral presentation2015, 59th International Conference on Electroni Ion, and Photon Beam Technology and Nanofabrication - EIPBPublication Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Journal article2015, Journal of Vacuum Science and Technology B, (33) 6, p.06F301Publication Implementation of templated DSA for via layer patterning at the 7 nm node
Proceedings paper2015, Alternative Lithographic Technologies VII, 23/02/2015, p.942305