Browsing by Author "Chiodarelli, Nicolo"
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Publication 3D electrical characterization of CNT-based interconnects
Meeting abstract2011, Workshop on Graphene and Carbon Nanotubes, 23/09/2011Publication A CMOS compatible carbon nanotube growth approach
Meeting abstract2010, MRS Fall Meeting Symposium C: Fundamentals of Low-Dimensional Carbon Nanomaterials, 29/11/2010, p.C4.11Publication ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
Proceedings paper2011, Carbon-Based Electronic Devices. Processing, Performance and Reliabilty, 29/11/2010, p.mrsf10-1283-b10Publication Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Proceedings paper2007-11, International Symposium on Dry Process, 13/11/2007, p.37-38Publication Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Journal article2008, Japanese Journal of Applied Physics, (47) 8, p.6870-6874Publication Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
Proceedings paper2011-05, IEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM, 8/05/2011, p.153-155Publication Catalyzed CVD growth of carbon nanotubes
Oral presentation2009, 6th IWT/SBO-METACEL Users MeetingPublication Cleaning of post-etch photoresist layer on patterned surface using organic solvent combined with physical forces
Proceedings paper2007-04, Surface Preparation and Cleaning Conference, 25/04/2007Publication CMP of novel materials
Proceedings paper2009, 14th International Symposium on Chemical-Mechanical Planarization - CMP, 9/08/2009Publication Correlation between number of walls and diameter in multiwall carbon nanotubes grown by chemical vapor deposition
Journal article2012, Carbon, (50) 5, p.1748-1752Publication Electrical characterization of CNT contacts with Cu damascene top contact
Journal article2013, Microelectronic Engineering, 106, p.106-111Publication Electrical resistivity and contact resistance in carbon nanotube vertical interconnects
Meeting abstract2010, MRS Fall meeting Symposium B: Carbon-Based Electronic Devices--Processing, Performance, and Reliability, 29/11/2010, p.B1.10Publication Growth and integration of high-density CNT for advanced interconnects
Meeting abstract2008, 14th International Conference on Solid Films and Surfaces - ICSFS, 29/06/2008, p.182-183Publication Growth and integration of high-density CNT for BEOL interconnects
Proceedings paper2008, Materials and Processes for Advanced Interconnects for Microelectronics, 24/03/2008, p.1079-N06-01Publication Growth mechanism of a hybrid structure consisting of a graphite layer on top of vertical carbon nanotubes
Journal article2012, Journal of Nanomaterials, 2012, p.ID 130725Publication Growth of carbon nanotubes as horizontal interconnects
Journal article2008, physica status solidi B, (245) 10, p.2308-2310Publication Integration and electrical characterization of carbon nanotube bundles for application as interconnects
Meeting abstract2010, Materials for Advanced Metallization - MAM, 8/03/2010Publication Integration and electrical characterization of carbon nanotube via interconnects
Journal article2011, Microelectronic Engineering, (88) 5, p.837-843Publication Integration and electrical characterization of carbon nanotubes bundles for application as vertical interconnects
Meeting abstract2010, Eurocarbon Symposium, 13/07/2010Publication Integration of carbon nanotubes as future interconnections for sub-32nm technologies
Chiodarelli, NicoloPHD thesis2011-05