Browsing by Author "Giangrandi, Simone"
- Results Per Page
- Sort Options
Publication A comparison of spike, flash, SPER and laser annealing for 45nm CMOS
Proceedings paper2003, CMOS Front-End Materials and Process Technology, 21/04/2003, p.261-266Publication A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates
Journal article2005-10, Journal of Applied Physics, (98) 8, p.083515-1-083515-9Publication Analysis of nanoparticles with elastic recoil detection
Proceedings paper2009, 19th Ion Beam Analysis Conference - IBA, 7/09/2009Publication ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis
Oral presentation2004, 8th European Conference on Accelerators in Applied Research and TechnologyPublication Characterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection
Publication Considerations about multiple and plural scattering in heavy-ion low-energy ERDA
Journal article2009, Nuclear Instruments and Methods in Physics Research B, (267) 11, p.1936-1941Publication Depth resolution optimization and role of multiple scattering in low-energy TOF-ERDA
Oral presentation2007, International Workshop on High-Resolution Depth ProfilingPublication Depth resolution optimization for low-energy ERDA
Journal article2007, Nuclear Instruments and Methods in Physics Research B, (261) 1_2, p.512-515Publication Growth and characterization of atomic layer deposited WCxNy
Publication Leakage optimatisation of ultra-shallow junctions formed by solid phase epitaxial regrowth (SPER)
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.65-72Publication Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Journal article2004, Journal of Vacuum Science and Technology B, (22) 1, p.306-311Publication Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films
Journal article2008, Nuclear Instruments and Methods in Physics Research B, (266) 24, p.5144-5150Publication Potentialities and limitations of low-energy TOF-ERDA for high resolution and quantitative profiling of thin films
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS
Meeting abstract2007, International Workshop on High-Resolution Depth Profiling, 17/06/2007Publication The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD
Oral presentation2005, 17th International Conference on Ion Beam AnalysisPublication Time-of-flight telescope for heavy-ion RBS
Journal article2007, Nuclear Instruments and Methods in Physics Research B, (261) 1_2, p.529-533