Browsing by Author "Goodyear, Andy"

A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion

Advanced etching for nanodevices and 2D materials

Atomic layer etching of amorphous Si on MoS2 for selectively patterned MX2 heterostructures

Atomic layer etching of amorphous silicon with selectivity towards MoS2

Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts

Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials

Evaluation of Ta-Co alloys as novel high-k extreme ultraviolet mask absorber

Low damage cryogenic etching of low-k materials for advanced interconnects

Low-damage cryogenic etch of porous organosilicate low-k dielectric

Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics

Photoresist treatment using an ICP H2 plasma and low ESC temperature: LWR study

Photoresist treatment using an ICP H2 plasma and low ESC temperature: LWR study

Selective patterning of amorphous silicon on MoS2 for enabling transition-metal dichalcogenide heterostructures

Selective patterning of amorphous silicon on MoS2 to fabricate transition-metal dichalcogenide heterostructures

Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics