Browsing by Author "Karageorgos, Ioannis"
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Publication Density-balancing mask sssignment for via patterning with directed self-assembly
Publication Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits
Journal article2016-11, Journal of Micro/Nanolithography MEMS and MOEMS, (15) 4, p.43506Publication Design method for the integration of DSA via patterning in sub-7 nm circuits
Oral presentation2016, International Nanotechnology Conference - INC12Publication Design strategy for integrating DSA via patterning in sub-7 nm interconnects
Proceedings paper2016, Design-Process-Technology Co-optimization for Manufacturability X, 21/02/2016, p.97810NPublication Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
Proceedings paper2016, Electron, Ion, and Photon Beam Technology and Nanofrabrication - EIPBN, 31/05/2016, p.5C4Publication Design strategy for the integration of DSA vias in sub-7nm interconnects
Karageorgos, IoannisOral presentation2016, DSA meeting - Institute of Nanoscience and Nanotechnology - NCSR DemokritosPublication EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97761WPublication Feasibility study of grapho-epitaxy DSA for complementing EUV lithography beyond N10
Publication Impact of DSA process variability on circuit performance
Proceedings paper2016-10, International Symposium on DSA, 11/10/2016Publication Impact of Interconnect Advanced Patterning Options on Circuit Design
Karageorgos, IoannisPHD thesis2017-06Publication Impact of interconnect multiple-patterning variability on SRAMs
Proceedings paper2015, Design, Automation & Test in Europe Conference - DATE, 9/03/2015, p.609-612Publication Implementation of DSA for electrical test vehicles at the 7 nm node
Proceedings paper2015, E-MRS Spring Meeting, 11/05/2015Publication Implementation of templated DSA for via layer patterning at the 7 nm node
Proceedings paper2015, Alternative Lithographic Technologies VII, 23/02/2015, p.942305Publication Integration of Directed Self-Assembly (DSA) via patterning in sub-7nm interconnects - A designer's perspective
Oral presentation2016, KULeuven Seminar on Advanced InterconnectsPublication Opportunities and challenges for DSA in logic and memory
Meeting abstract2016, SPIE Advanced Lithography Conference, 21/02/2016, p.9777-25Publication Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition
Proceedings paper2016-10, International Symposium on DSA, 11/10/2016