Browsing by Author "Melkonyan, Davit"
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Publication 3D dopant profiling in silicon nanowires
Oral presentation2016, European Atom Probe Tomography WorkshopPublication 3D imaging of atom probe tip shapes with atomic force microscopy
Meeting abstract2018, Atom Probe Tomography and Microscopy - APT&M, 10/06/2018Publication A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
Proceedings paper2018, Atom Probe Tomography and Microscopy - APT&M, 10/06/2018Publication Accuracy in APT analysis: The case of boron in silicon
Meeting abstract2017, 79th IUVSTA Workshop, 13/05/2017Publication Accurate stoichiometric analysis of Al1 xGaxN/GaN structures using APT and the influence of laser, poles and zone lines
Oral presentation2017, 7th European Atom Probe WorkshopPublication APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2
Oral presentation2016, APT&MPublication Atom probe conditions for stoichiometric quantification of GaN and Al1 xGaxN
Oral presentation2017, 21st International Conference on Secondary Ion Mass spectrometry - SIMSPublication Atom probe of GaN/AlGaN heterostructures: the role of electric field, sample crystallography and laser excitation on quantification
Journal article2019, Ultramicroscopy, 206, p.112813Publication Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
Journal article2017, Ultramicroscopy, 179, p.100-107Publication Atom probe tomography for advanced nanoelectronic devices: current status and perspectives
Journal article2018, Scripta Materialia, 148, p.91-97Publication Atom probe tomography for advanced semiconductor technology research
Meeting abstract2017, E-MRS Spring Meeting Symposium S: Analytical Techniques for Precise Characterization of Nano Materials, 22/05/2017, p.S10 - P.7Publication Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy
Oral presentation2019, European Atom Probe Workshop 2019Publication Atomic scale observation of atom distributions in 3D devices using atom probe tomography
Melkonyan, DavitPHD thesis2019-10Publication Challenges for APT in advanced semiconductor technology research
Meeting abstract2016, Atom Probe Tomography & Microscopy - APT&M, 12/06/2016Publication Challenges on surface conditioning in 3D device architectures: triple-gate FinFETs, gate-all-around lateral and vertical nanowire FETs
Proceedings paper2017, 232nd ECS Fall Meeting - 15th International Symposium on Semiconductor Cleaning Science and Technology - SCST15, 1/10/2017, p.3-20Publication Composition analysis of III-V materials grown in nanostructures: the self-focusing SIMS approach
Journal article2016, Journal of Vacuum Science and Technology B, (34) 3, p.03H127Publication Correcting the boron concentration for the detection losses through multi hit events.
Proceedings paper2018, Atom Probe and Tomography Meeting - APT&M, 10/06/2018Publication Electrical properties of patterned photoactive layers in organic
Journal article2016, Solar Energy Materials and Solar Cells, 144, p.493-499Publication Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
Meeting abstract2016, APT&M, 12/06/2016Publication Experimental determination of the apex temperature of a semiconducting tip during laser-assisted atom probe tomography
Oral presentation2014, Atom Probe Tomography and Microscopy