Browsing by Author "Nealey, Paul"
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Publication Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering
Oral presentation2014, SPIE Advanced Lithography ConferencePublication Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Journal article2016, Journal of Applied Crystallography, 49, p.823-834Publication Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Oral presentation2012, MRS Fall M eeting Symposium S: Directed Self-Assembly for NanopatterningPublication Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Meeting abstract2014, Micro and Nano Engineering Conference - MNE, 22/09/2014Publication Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Journal article2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31204Publication Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.94230MPublication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication Defect source analysis of directed self-assembly process
Journal article2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 3, p.31112Publication Defect source analysis of directed self-assembly process (DSA of DSA)
Proceedings paper2013, Alternative Lithographic Technologies V, 24/02/2013, p.86800LPublication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, Conference on Photopolymer Science and TechnologyPublication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, 38th International Conference on Micro and NanoEngineering - MNEPublication Directed self-assembly of PS-b-PMMA with ionic liquid addition
Proceedings paper2015, 1st International Symposium on DSA, 26/10/2015Publication Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns
Journal article2013, Journal of Vacuum Science and Technology B, (31) 6, p.06F301Publication Directed self-assembly process integration – fin patterning approaches and challenges
Proceedings paper2014, Advances in Resist Materials and Processing Technology XXXI, 23/02/2014, p.90510MPublication Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94241NPublication Impact of annealing temperature on DSA process: toward faster assembly kinetics
Proceedings paper2018, Advances in Patterning Materials and Processes XXXV, 24/02/2018, p.105860TPublication Impact of BCP asymmetry on DSA patterning performance
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.943215Publication Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Oral presentation2012, FujiFilm Litho WorkshopPublication Implementation of self-assembly in a 300mm processing environment
Oral presentation2012, MinacNedPublication Implementation of self-assembly in a 300mm processing environment
Oral presentation2012, SPECTARIS User Forum