Browsing by Author "Neumann, Jens Timo"
- Results per page
- Sort Options
Publication Actinic characterization and modeling of the EUV mask stack
Proceedings paper2013, 29th European Mask and Lithography Conference, 25/06/2013, p.88860BPublication Alternative EUV mask technology for mask 3D effect compensation
Proceedings paper2014, International Symposium on Extreme Ultraviolet Lithography - EUVL, 27/10/2014Publication Alternative EUV mask technology to compensate for mask 3D effects
Proceedings paper2015, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII, 20/04/2015, p.96580IPublication Characterization and control of dynamic lens heating effects under high-volume manufacturing conditions
Proceedings paper2011, Optical Microlithography XXIV, 27/02/2011, p.79730VPublication Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope
Publication Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM
Publication Experimental validation of novel EUV mask technology to reduce mask 3D effects
Proceedings paper2015, 31st European Mask and Lithography Conference, 22/06/2015, p.966109Publication Experimental validation of novel mask technology to reduce mask 3D effects
Proceedings paper2015, Photomask Technology 2015, 29/09/2015, p.96350ZPublication Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells
Journal article2011-03, Journal of Micro/Nanolithography MEMS and MOEMS, (10) 1, p.13008Publication Impact of mask stack on high NA EUV imaging
Oral presentation2012, International Symposium on Extreme Ultraviolet Lithography - EUVLPublication Mask 3D effect mitigation by source optimization and assist feature placement
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016Publication Scanner matching for standard and freeform illumination shapes using FlexRay
Proceedings paper2011, Optical Microlithography XXIV, 27/02/2011, p.79731I