imec Institutional Repository Browsing {{ collection }} by Author "Reading, M.A."

Publication

A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

Sygellou, L

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Ladas, S

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Reading, M.A.

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van den Berg, J.A.

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Conard, Thierry

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De Gendt, Stefan

Journal article

2010-03, Surface and Interface Analysis, (2010) 42, p.1057-1060

Publication

Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films

Hourdakis, E.

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Theodoropoulou, M.

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Nassiopoulou, A.G.

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Parisini, A.

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Reading, M.A.

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.1995

Publication

Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films

Hourdakis, E.

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Theodoropoulou, M.

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Nassiopoulou, A.G.

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Parisini, A.

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Reading, M.A.

Proceedings paper

2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.363-372

Publication

High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.

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Reading, M.A.

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Parisini, A.

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Kolbe, M.

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Beckhoff, B.

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Ladas, S.

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Petrik, P.

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.1994

Publication

High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films

Van den berg, J.

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Reading, M.A.

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Armour, D.G.

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Bailey, P.

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Noakes, T.

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Conard, Thierry

Meeting abstract

2009, 5th International Workshop on High-Resolution Depth Profiling, 15/11/2009

Publication

High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)

van den Berg, J.A.

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Reading, M.A.

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Armour, D.G>

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Bailey, P.

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Noakes, T.C.Q.

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Conard, Thierry

Proceedings paper

2009, 19th Ion Beam Analysis Conference - IBA, 7/09/2009

Publication

Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation

Kolbe, M.

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Beckhoff, B.

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Krumrey, M.

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Reading, M.A.

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van den Berg, J.A.

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Conard, Thierry

Meeting abstract

2009, 216th ECS Meeting, 4/10/2009, p.1975

Publication

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Barozzi, Mario

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Iacob, E

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van den Berg, J.A.

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Reading, M.A.

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Adelmann, Christoph

Meeting abstract

2011, 18th International Conference on Secondary Ion Mass Spectrometry - SIMS XVIII, 18/09/2011

Browsing by Author "Reading, M.A."