Browsing by author "Zimmerman, Paul"
Now showing items 1-16 of 16
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Atomic layer deposition as an enabling technology for fabrication of germanium MOS transistor
Eneman, Geert; Delabie, Annelies; Van Elshocht, Sven; De Jaeger, Brice; Nicholas, Gareth; Martens, Koen; Brunco, David; Zimmerman, Paul; Houssa, Michel; Pourtois, Geoffrey; Kaczer, Ben; Leys, Frederik; Winderickx, Gillis; Huyghebaert, Cedric; Terzieva, Valentina; Loo, Roger; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007) -
Atomic layer deposition of HfO2 on (100) and (110) oriented silicon surfaces
Nyns, Laura; Ragnarsson, Lars-Ake; Hall, Lindsey; Delabie, Annelies; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; Zimmerman, Paul; De Gendt, Stefan (2007) -
Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference
De Jaeger, Brice; Kaczer, Ben; Zimmerman, Paul; Opsomer, Karl; Winderickx, Gillis; Van Steenbergen, Jan; Van Moorhem, Els; Terzieva, Valentina; Bonzom, Renaud; Leys, Frederik; Arena, Chantal; Bauer, Matthias; Werkhoven, Chris; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007-01) -
Germanium deep-submicron p-FET and n-FET devices, fabricated on germanium-on-insulator substrates
Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Bonzom, Renaud; Caymax, Matty; Houssa, Michel; Kaczer, Ben; Leys, Frederik; Martens, Koen; Opsomer, Karl; Pourghaderi, Mohammad Ali; Satta, Alessandra; Simoen, Eddy; Terzieva, Valentina; Van Moorhem, Els; Winderickx, Gillis; Loo, Roger; Clarysse, Trudo; Conard, Thierry; Delabie, Annelies; Hellin, David; Janssens, Tom; Onsia, Bart; Sioncke, Sonja; Mertens, Paul; Snow, Jim; Van Elshocht, Sven; Vandervorst, Wilfried; Zimmerman, Paul; Brunco, David; Raskin, G.; Letertre, F.; Akatsu, T.; Billon, T.; Heyns, Marc (2007) -
GIDL (gate-induced drain leakage) and parasitic Schottky barrier leakage elimination in aggressively scaled HfO2/TiN FiNFET devices
Hoffmann, Thomas Y.; Doornbos, Gerben; Ferain, Isabelle; Collaert, Nadine; Zimmerman, Paul; Goodwin, Michael; Rooyackers, Rita; Kottantharayil, Anil; Yim, Yong Sik; Dixit, Abhisek; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2005) -
High-k gate stack engineering – towards meeting low standby power and high performance targets
De Gendt, Stefan; Brunco, David; Caymax, Matty; Conard, Thierry; Date, Lucien; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Houssa, Michel; Hyun, Sangjin; Kaushik, Vidya; Kubicek, Stefan; Maes, Jan; Pantisano, Luigi; Ragnarsson, Lars-Ake; Rohr, Erika; Schram, Tom; Shimamoto, Y.; Sleeckx, Erik; Vandervorst, Wilfried; Van Elshocht, Sven; Yamada, Naoki; Witters, Thomas; Zhao, Chao; Zimmerman, Paul; Heyns, Marc (2005) -
High-performance deep submicron Ge pMOSFETs with halo implants
Nicholas, Gareth; De Jaeger, Brice; Brunco, David; Zimmerman, Paul; Eneman, Geert; Martens, Koen; Meuris, Marc; Heyns, Marc (2007) -
Integration challenges for multi-gate devices
Collaert, Nadine; Brus, Stephan; De Keersgieter, An; Dixit, Abhisek; Ferain, Isabelle; Goodwin, Michael; Kottantharayil, Anil; Rooyackers, Rita; Verheyen, Peter; Yim, Yong Sik; Zimmerman, Paul; Beckx, Stephan; Degroote, Bart; Demand, Marc; Kim, Myeong-Cheol; Kunnen, Eddy; Locorotondo, Sabrina; Mannaert, Geert; Neuilly, Francois; Shamiryan, Denis; Baerts, Christina; Ercken, Monique; Laidler, David; Leys, Frederik; Loo, Roger; Lisoni, Judit; Snow, Jim; Vos, Rita; Boullart, Werner; Pollentier, Ivan; De Gendt, Stefan; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2005) -
Low temperature mobility in hafnium-oxide gated germanium p-channel metal-oxide-semiconductor field-effect transistors
Beer, Chris; Whall, Terry; Parker, Evan; Leadley, David; De Jaeger, Brice; Nicholas, Gareth; Zimmerman, Paul; Meuris, Marc; Szostak, Slawomir; Gluszko, Grzegorz; Lukasiak, Lidia (2007) -
Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions
Dixit, Abhisek; Rooyackers, Rita; Leys, Frederik; Kaiser, Monja; Weemaes, R.; Ferain, Isabelle; De Keersgieter, An; Collaert, Nadine; Surdeanu, Radu; Goodwin, Michael; Zimmerman, Paul; Loo, Roger; Caymax, Matty; Jurczak, Gosia; Biesemans, Serge; De Meyer, Kristin (2005) -
Novel, effective and cost-efficient method of introducing fluorine into metal/Hf-based gate stack in MuGFET and planar SOI devices with significant BTI improvement
Shickova, Adelina; Collaert, Nadine; Zimmerman, Paul; Demand, Marc; Simoen, Eddy; Pourtois, Geoffrey; De Keersgieter, An; Trojman, Lionel; Ferain, Isabelle; Leys, Frederik; Boullart, Werner; Franquet, Alexis; Kaczer, Ben; Jurczak, Gosia; Maes, Herman; Groeseneken, Guido (2007) -
Parasitic source/drain resistance reduction in N-channel SOI MuGFETs with 15nm wide fins
Dixit, Abhisek; Ferain, Isabelle; De Meyer, Kristin; Kottantharayil, Anil; Collaert, Nadine; Rooyackers, Rita; Leys, Frederik; De Keersgieter, An; Hoffmann, Thomas; Loo, Roger; Caymax, Matty; Jurczak, Gosia; Biesemans, Serge; Goodwin, Michael; Zimmerman, Paul (2005-10) -
Silicon orientation effects in the atomic layer deposition of hafnium oxide
Nyns, Laura; Ragnarsson, Lars-Ake; Hall, L.; Delabie, Annelies; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; Zimmerman, Paul; De Gendt, Stefan (2008) -
Synthesis of metal-teflon AF nanocomposites by solution-phase methods
Evanoff, D.D.; Zimmerman, Paul; Chumanov, G. (2005) -
Tall triple-gate device with TiN/HfO2 gate stack
Collaert, Nadine; Demand, Marc; Ferain, Isabelle; Lisoni, Judit; Singanamalla, Raghunath; Zimmerman, Paul; Yim, Yong Sik; Schram, Tom; Mannaert, Geert; Goodwin, Michael; Hooker, Jacob; Neuilly, Francois; Kim, Myeong-Cheol; De Meyer, Kristin; De Gendt, Stefan; Boullart, Werner; Jurczak, Gosia; Biesemans, Serge (2005) -
The role of interface states in the low temperature mobility of hafnium-oxide gated Ge-pMOSFETs and the effect of a hydrogen anneal
Beer, C.S.; Whall, T.E.; Parker, E.H.C.; Leadley, D.R.; De Jaeger, Brice; Nicholas, Gareth; Zimmerman, Paul; Meuris, Marc (2008)