Novel, effective and cost-efficient method of introducing fluorine into metal/Hf-based gate stack in MuGFET and planar SOI devices with significant BTI improvement

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Authors
Shickova, Adelina; Collaert, Nadine; Zimmerman, Paul; Demand, Marc; Simoen, Eddy; Pourtois, Geoffrey; De Keersgieter, An; Trojman, Lionel; Ferain, Isabelle; Leys, Frederik; Boullart, Werner; Franquet, Alexis; Kaczer, Ben; Jurczak, Gosia; Maes, Herman; Groeseneken, Guido
Conference
Symposium on VLSI Technology. Digest of Technical Papers
Title
Novel, effective and cost-efficient method of introducing fluorine into metal/Hf-based gate stack in MuGFET and planar SOI devices with significant BTI improvement
Publication type
Proceedings paper
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