Browsing by author "Menou, Nicolas"
Now showing items 1-20 of 28
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0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
Menou, Nicolas; Wang, Xin Peng; Kaczer, Ben; Polspoel, Wouter; Popovici, Mihaela Ioana; Opsomer, Karl; Pawlak, Malgorzata; Knaepen, W.; Detavernier, C.; Blomberg, T.; Pierreux, D.; Swerts, Johan; Maes, Jan; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2008) -
ALD strontium titanates and their characterization
Popovici, Mihaela Ioana; Van Elshocht, Sven; Tomida, Kazuyuki; Menou, Nicolas; Swerts, Johan; Pawlak, Malgorzata; Kaczer, Ben; Kim, Min-Soo; Brijs, Bert; Favia, Paola; Conard, Thierry; Franquet, Alexis; Moussa, Alain; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2010) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; Van Bael, Marlies; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2009) -
Atomic layer deposition of hafnium titanates dielectric layers
Popovici, Mihaela Ioana; Delabie, Annelies; Van Elshocht, Sven; Menou, Nicolas; Wang, Xin Peng; Wouters, Dirk; Kittl, Jorge; Swerts, Johan; Knaepen, W.; Detavernier, Christophe (2008) -
Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4
Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Brijs, Bert; Conard, Thierry; Opsomer, Karl; Maes, Jan; Wouters, Dirk; Kittl, Jorge (2010) -
Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
Menou, Nicolas; Popovici, Mihaela Ioana; Clima, Sergiu; Opsomer, Karl; Polspoel, Wouter; Kaczer, Ben; Rampelberg, Geert; Tomida, Kazuyuki; Pawlak, Malgorzata; Detavernier, Christophe; Pierreux, Dieter; Swerts, Johan; Maes, Jan Willem; Manger, Dirk; Badylevich, M; Afanasiev, Valeri; Conard, Thierry; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Pourtois, Geoffrey; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2009) -
Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers
Manger, Dirk; Kaczer, Ben; Menou, Nicolas; Clima, Sergiu; Wouters, Dirk; Afanasiev, Valeri; Kittl, Jorge (2009) -
Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications
Pawlak, Malgorzata; Menou, Nicolas; Wang, Xin Peng; Dilliway, G.; Pierreux, D.; Fischer, P.; Vos, Rita; Hoyer, R.; Kittl, Jorge; Wouters, Dirk; Biesemans, Serge (2008) -
Effect of deposition and anneal temperature on batch-ALD deposited ZrO2/Al2O3/ZrO2 films for DRAM MIM capacitor applications
Dilliway, G.; Pierreux, D.; Fischer, P.; Menou, Nicolas; Pawlak, Malgorzata; Wang, Xin Peng; Wouters, Dirk (2008) -
Effect of the composition on the bandgap width of high-k MexTiyOz (Me=Hf,Ta, Sr)
Wang, Wan-Chih; Badylevich, V.; Afanas'ev, V.V.; Stesmans, Andre; Popovici, Mihaela Ioana; Tomida, Kazuyuki; Menou, Nicolas; Kittl, Jorge; Lukosius, M.; Baristiran Kaynak, C.; Wenger, Ch. (2011) -
Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4
Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Opsomer, Karl; Brijs, Bert; Faelens, Gerrit; Franquet, Alexis; Conard, Thierry; Maes, Jan Willem; Wouters, Dirk; Kittl, Jorge Adrian (2009) -
Growth and material characterization of hafnium titanates deposited by atomic layer deposition
Popovici, Mihaela Ioana; Delabie, Annelies; Van Elshocht, Sven; Clima, Sergiu; Pourtois, Geoffrey; Swerts, Johan; Nyns, Laura; Tomida, Kazuyuki; Menou, Nicolas; Wouters, Dirk; Opsomer, Karl; Detavernier, Christophe; Kittl, Jorge (2009) -
High-k dielectrics and metal gates for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, W.; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, P.; Maes, Jan; Manger, D.; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009) -
High-k dielectrics and metal gates for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, W.; Clima, Sergiu; Pourtois, Geoffrey; Detavernier, C.; Knaepen, W.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Manger, D.; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009) -
High-k dielectrics for future generation memory devices
Kittl, Jorge; Opsomer, Karl; Popovici, Mihaela Ioana; Menou, Nicolas; Kaczer, Ben; Wang, Xin Peng; Adelmann, Christoph; Pawlak, Malgorzata; Tomida, Kazuyuki; Rothschild, Aude; Govoreanu, Bogdan; Degraeve, Robin; Schaekers, Marc; Zahid, Mohammed; Delabie, Annelies; Meersschaut, Johan; Polspoel, Wouter; Clima, Sergiu; Pourtois, Geoffrey; Knaepen, W.; Detavernier, C.; Afanasiev, Valeri; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Fischer, Pamela; Maes, Jan; Manger, Dirk; Vandervorst, Wilfried; Conard, Thierry; Franquet, Alexis; Favia, Paola; Bender, Hugo; Brijs, Bert; Van Elshocht, Sven; Jurczak, Gosia; Van Houdt, Jan; Wouters, Dirk (2009) -
Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Favia, Paola; Bender, Hugo; Rosseel, Erik; Swerts, Johan; Adelmann, Christoph; Vrancken, Christa; Moussa, Alain; Tielens, Hilde; Tomida, Kazuyuki; Pawlak, Malgorzata; Kaczer, Ben; Schoofs, Geert; Vandervorst, Wilfried; Wouters, Dirk; Kittl, Jorge (2011) -
Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Favia, Paola; Bender, Hugo; Rosseel, Erik; Swerts, Johan; Vrancken, Christa; Moussa, Alain; Tielens, Hilde; Tomida, Kazuyuki; Pawlak, Malgorzata; Kaczer, Ben; Schoofs, Geert; Vandervorst, Wilfried; Wouters, Dirk; Kittl, Jorge (2010) -
Integrated functional oxides in non-volatile memory devices
Muller, Christophe; Courtade, Lorene; Turquat, Ch.; Menou, Nicolas; Lisoni, Judit; Goux, Ludovic; Wouters, Dirk; Lamperti, A.; Spiga, Sabina; Fanciulli, M.; Goguenheim, D. (2008) -
Nano beam diffraction: crystal structure and strain analysis at the nano-scale
Favia, Paola; Popovici, Mihaela Ioana; Eneman, Geert; Wang, Gang; Bargallo Gonzalez, Mireia; Simoen, Eddy; Menou, Nicolas; Bender, Hugo (2010)