Browsing by author "Zhao, Larry"
Now showing items 1-20 of 51
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A new perspective of barrier material evaluation and process optimization
Zhao, Larry; Tokei, Zsolt; Gianni, Giai Gischia; Volders, Henny; Beyer, Gerald (2009) -
A novel test structure to study intrinsic reliability of barrier/low-k
Zhao, Larry; Tokei, Zsolt; Gianni, Giai Gischia; Pantouvaki, Marianna; Croes, Kristof; Beyer, Gerald (2009) -
Advanced interconnects: materials, processing, and reliability
Baklanov, Mikhaïl; Adelmann, Christoph; Zhao, Larry; De Gendt, Stefan (2015) -
Advanced organic polymers for the aggressive scaling of low-k materials
Pantouvaki, Marianna; Huffman, Craig; Zhao, Larry; Heylen, Nancy; Ono, Y; Nakajima, M; Nakatani, K; Beyer, Gerald; Baklanov, Mikhaïl (2011) -
Advanced organic polymers for the aggressive scaling of low-k materials
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ono, Yukiharu; Nakajima, Michio; Nakatani, Koji; Beyer, Gerald; Baklanov, Mikhaïl (2010) -
Cobalt bottom-up contact and via prefill enabling advanced logic and DRAM technologies
van der Veen, Marleen; Vandersmissen, Kevin; Dictus, Dries; Demuynck, Steven; Liu, Ran; Bin, Xiaomin; Nalla, Praveen; Lesniewska, Alicja; Hall, Laurie; Croes, Kristof; Zhao, Larry; Boemmels, Juergen; Kolics, Artur; Tokei, Zsolt (2015) -
Comparison between intrinsic and integrated reliability properties of low-k materials
Croes, Kristof; Pantouvaki, Marianna; Carbonell, Laure; Zhao, Larry; Beyer, Gerald; Tokei, Zsolt (2011) -
Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm
Volders, Henny; Richard, Olivier; Carbonell, Laure; Palmans, Roger; Verdonck, Patrick; Heylen, Nancy; Kellens, Kristof; Armini, Silvia; Bender, Hugo; Zhao, Larry; Tokei, Zsolt (2008) -
Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm
Volders, Henny; Richard, Olivier; Carbonell, Laure; Palmans, Roger; Verdonck, Patrick; Heylen, Nancy; Kellens, Kristof; Armini, Silvia; Bender, Hugo; Zhao, Larry; Tokei, Zsolt (2009) -
Depth-profiling of the elastic and optical properties of submicrometer thick optically transparent films by picosecond ultrasonics inteferometry
Ruello, P.; Lomonosov, A.; Ayouch, A.; Mechri, C.; Baklanov, Mikhaïl; Verdonck, Patrick; Zhao, Larry; Gusev, V. (2011) -
Development of metamorphic dual-junction solar cells
Mols, Yves; Leys, Maarten; van der Heide, Johan; Posthuma, Niels; Zhao, Larry; Flamand, Giovanni; Poortmans, Jef; Borghs, Gustaaf (2007) -
Direct observation of the 1/E dependence of time dependent
Zhao, Larry; Tokei, Zsolt; Croes, Kristof; Wilson, Chris; Baklanov, Mikhaïl; Beyer, Gerald; Claeys, Cor (2011) -
Effect of porogen residue on electrical characteristics of ultra low-k materials
Baklanov, Mikhaïl; Zhao, Larry; Van Besien, Els; Pantouvaki, Marianna (2011) -
Electromigration and thermal storage study of barrierless Co vias
Varela Pedreira, Olalla; Croes, Kristof; Zahedmanesh, Houman; Vandersmissen, Kevin; van der Veen, Marleen; Vega Gonzalez, Victor; Dictus, Dries; Zhao, Larry; Kolics, Artur; Tokei, Zsolt (2018) -
Evaluation of Mn-based Cu barriers for interconnect applications
Van Besien, Els; Jourdan, Nicolas; Zhao, Larry; Croes, Kristof; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt (2011) -
Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
Zhao, Larry; Lofrano, Melina; Croes, Kristof; Van Besien, Els; Tokei, Zsolt; Wilson, Chris; Degraeve, Robin; Kauerauf, Thomas; Beyer, Gerald; Claeys, Cor (2011) -
High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnects
Maestre Caro, Arantxa; Zhao, Larry; Maes, Guido; Borghs, Gustaaf; Beyer, Gerald; Tokei, Zsolt; Armini, Silvia; Travaly, Youssef (2010) -
Impact of carbon-doping on time dependent dielectric breakdown of SiO2-based films
Zhao, Larry; Barbarin, Yohan; Croes, Kristof; Baklanov, Mikhaïl; Verdonck, Patrick; Tokei, Zsolt; Claeys, Cor (2015) -
Influence of porosity on electrical properties of low-k dielectrics
Van Besien, Els; Pantouvaki, Marianna; Zhao, Larry; De Roest, David; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2010) -
Influence of porosity on electrical properties of low-k dielectrics
Van Besien, Els; Pantouvaki, Marianna; Zhao, Larry; De Roest, David; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2012)