Browsing by author "Brongersma, Sywert"
Now showing items 1-20 of 149
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A grain size limitation inherent to electroplated copper films
Brongersma, Sywert; Richard, Emmanuel; Vervoort, Iwan; Maex, Karen (2000) -
A low-power integrated electronic nose system
Crego Calama, Mercedes; Karabacak, Devrez; Brongersma, Sywert; Van Bavel, Mieke (2012) -
A quantitative adhesion study between contacting materials in Cu damascene structures
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Poortmans, Jef; Bender, Hugo; Conard, Thierry; Maex, Karen (2002) -
A quantitative study of the adhesion between copper, barrier and organic low-k polymers
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Beyne, Eric; Maex, Karen (2000) -
A quantitative study of the adhesion between copper, barrier and organic low-k polymers
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Bender, Hugo; Beyne, Eric; Maex, Karen (2001) -
A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Satta, Alessandra; Schuhmacher, Jörg; Whelan, Caroline; Vandervorst, Wilfried; Brongersma, Sywert; Beyer, Gerald; Brijs, Bert; Conard, Thierry; Maex, Karen; Vantomme, Andre; Viitanen, M.M.; Brongersma, H.H. (2002) -
Active control of the strong coupling regime between Porphyrin excitons and surface plasmon polaritons
Berrier, Audrey; Cools, Ruud; Arnold, Christophe; Offermans, Peter; Crego Calama, Mercedes; Brongersma, Sywert; Gomez-Rivas, Jaime (2011) -
Adhesion measurements using cross-section nanoindentation
Brongersma, Sywert (2004) -
Adhesion study between materials for integration of copper and inorganic low-k dielectrics
Lanckmans, Filip; Brongersma, Sywert; Poortmans, Jef; Conard, Thierry; Bender, Hugo; Beyne, Eric; Maex, Karen (2001) -
Advanced solutions for copper and low k technology
Beyer, Gerald; Baklanov, Mikhaïl; Brongersma, Sywert; De Roest, David; Donaton, R.; Grillaert, Joost; Lanckmans, Filip; Maenhoudt, Mireille; Maex, Karen; Richard, Emmanuel; Struyf, Herbert; Stucchi, Michele; Tokei, Zsolt; Van Hove, Marleen; Vervoort, Iwan (2000) -
Aggressive scaling of Cu lowk: impact on metrology
Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Vanstreels, Kris; Travaly, Youssef; Baklanov, Mikhaïl; D'Haen, Jan; Beyer, Gerald (2005) -
An energy-efficient interface for resonant sensors based on ring-down measurement
Pertijs, Michiel; Zeng, Zeng; Karabacak, Devrez; Crego Calama, Mercedes; Brongersma, Sywert (2012) -
Analysis of the size effect in electroplated fine copper wires and a realistic assessment to model copper resistivity
Zhang, Wenqi; Brongersma, Sywert; Li, Zhen; Li, dagang; Richard, Olivier; Maex, Karen (2007) -
Anodic dissolution for etching large length-to-height ratio microfluidic channels
Gonzalo Ruiz, Javier; Patrascu, Mihai; Goedbloed, Martijn; Brongersma, Sywert; Crego Calama, Mercedes (2010) -
Atomic layer deposition of metal oxide thin films for sensing applications
Blauw, Michiel; Dam, Van Anh; Crego Calama, Mercedes; Brongersma, Sywert (2012) -
Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Iacopi, Francesca; Brongersma, Sywert; Maex, Karen; Abell, Thomas (2002) -
Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Iacopi, Francesca; Brongersma, Sywert; Abell, Thomas; Maex, Karen (2003) -
Challenges for structural stability of ultra-low-k based interconnects
Iacopi, Francesca; Brongersma, Sywert; Vandevelde, Bart; Travaly, Youssef; Maex, Karen (2004) -
Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Das, Arabinda; Kokubo, Terukazu; Furukawa, Yukiko; Struyf, Herbert; Vos, Ingrid; Sijmus, Bram; Iacopi, Francesca; Van Aelst, Joke; Le, Quoc Toan; Carbonell, Laure; Brongersma, Sywert; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Sleeckx, Erik; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Rosseel, Erik; Van Hove, Marleen; Vanhaelemeersch, Serge; Shiota, A.; Maex, Karen (2002) -
Characterization and optimization of Cu-low k for 45nm and beyond
Maex, Karen; Brongersma, Sywert; Iacopi, Francesca; Travaly, Youssef; Tokei, Zsolt; Bruynseraede, Christophe; Beyer, Gerald (2004)