Browsing by author "Gilbert, Matthieu"

3D site specific sample preparation and analysis of 3D devices (Finfets) by atom probe tomography

Kambham, Ajay Kumar; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography

Vandervorst, Wilfried; Kambham, Ajay Kumar; Kumar, Arul; Gilbert, Matthieu (2013)

3D-Atomprobe : facts, artifacts and applications in semiconductors

Vandervorst, Wilfried; Koelling, Sebastian; Gilbert, Matthieu; Kambham, Ajay Kumar (2010)

3D-doping in Finfets and nanowires : fabrication and metrology challenges and solutions

Vandervorst, Wilfried; Schulze, Andreas; Eyben, Pierre; Zschaetzsch, Gerd; Koelling, Sebastian; Kumar, Arul; Mody, Jay; Gilbert, Matthieu (2011)

Application of atom probe tomography to epitaxial layers

Kumar, Arul; Gilbert, Matthieu; Kambham, Ajay Kumar; Gencarelli, Federica; Loo, Roger; Vandervorst, Wilfried (2013)

Atom probe analysis of a 3D-finfet with high-k metal gate

Gilbert, Matthieu; Vandervorst, Wilfried; Koelling, Sebastian; Kambham, Ajay Kumar (2011)

Atom probe for FinFET dopant characterization

Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Koelling, Sebastian; Vandervorst, Wilfried (2010)

Atom probe tomography for 3D-dopant analysis in FinFET devices

Kambham, Ajay Kumar; Zschaetzsch, Gerd; Sasaki, Yuichiro; Togo, Mitsuhiro; Horiguchi, Naoto; Mody, J.; Florakis, Antonios; Gajula, D.R.; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Atom probe tomography for advanced semiconductor metrology

Gilbert, Matthieu; Kambham, Ajay Kumar; Kumar, Arul; Vandervorst, Wilfried (2012)

Atom-probe for arsenic implant doped FinFET characterization

Kambham, Ajay Kumar; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Atomic insight into relaxation mechanism of Ge(1-x)Sn(x) using atom probe tomography

Kumar, Arul; Kambham, Ajay Kumar; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Atomic insight of Ge(1-x)Sn(x) using atom probe tomography

Kumar, Arul; Gencarelli, Federica; Vincent, Benjamin; Kambham, Ajay Kumar; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Conformal doping for FINFET's: a fabrication and metrology challenge

Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas Y.; Eyben, Pierre; Mody, Jay; Koelling, Sebastian; Gilbert, Matthieu; Pawlak, Bartek; Duffy, R.; Van Dal, Mark (2008)

Conformal doping of FINFET's: a fabrication and metrology challenge

Vandervorst, Wilfried; Everaert, Jean-Luc; Rosseel, Erik; Jurczak, Gosia; Hoffmann, Thomas; Eyben, Pierre; Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; Gilbert, Matthieu; Poon, T.; del Agua Borniquel, Jose Ignacio; Foad, M.; Duffy, Ray; Pawlak, Bartek (2008)

Counting dopants/atoms in 2D/3D nanoscale structures

Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Kambham, Ajay Kumar; Koelling, Sebastian; Gilbert, Matthieu (2010)

Determination par EDS de l'épaisseur et de la composition de films minces multicouches pour applications nanoélectroniques

Franquet, Alexis; Conard, Thierry; Gilbert, Matthieu; Hantschel, Thomas; Vandervorst, Wilfried (2012)

Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon

Koelling, Sebastian; Richard, Olivier; Bender, Hugo; Uematsu, M.; Schulze, Andreas; Zschaetzsch, Gerd; Gilbert, Matthieu; Vandervorst, Wilfried (2013)

Dopant and carrier profiling for 3D-device architectures

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Eyben, Pierre; Gilbert, Matthieu; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2011)

Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Schatzer, Philipp; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Jurczak, Gosia; Horiguchi, Naoto; Gilbert, Matthieu; Eyben, Pierre; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2010)

Dopant/carrier profiling for 3D-structures

Vandervorst, Wilfried; Schulze, Andreas; Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Eyben, Pierre (2014)