Browsing by author "Doise, Jan"

A progress report on DSA of high-chi silicon containing block co-polymers

Willson, C. Grant; Janes, Dustin; Ito, Natsuko; Blachut, Gregory; Sirard, Stephen; Someya, Yasunobu; Doise, Jan; Mizuochi, Ryuta; Lane, Austin; Vandenberghe, Geert; Rincon Delgadillo, Paulina; Yang, XiaoMin; Ellison, Christopher (2018)

Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy

Bekaert, Joost; Doise, Jan; MKuppuswamy, Vijaya Kumar; Gronheid, Roel; Chan, BT; Vandenberghe, Geert; Cao, Yi; Her, YoungJun (2014)

Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy

Bekaert, Joost; Doise, Jan; MKuppuswamy, Vijaya Kumar; Chan, BT; Gronheid, Roel; Vandenberghe, Geert; Cao, Yi; Her, YoungJun (2014)

Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy

Bekaert, Joost; Gronheid, Roel; MKuppuswamy, Vijaya Kumar; Doise, Jan; Chan, BT; Vandenberghe, Geert; Sayan, Safak; Cao, Yi; Her, YoungJun (2014)

Controlling placement error and dimensional variability in templated DSA

Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Chan, BT; Gronheid, Roel; De Gendt, Stefan (2016)

Defect mitigation in sub-20 nm patterning with high-chi, silicon containing block copolymers

Doise, Jan; Mannaert, Geert; Suh, Hyo Seon; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Willson, C. Grant; Ellison, Christopher J. (2018)

Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)

Tung, C. Maryann; Doise, Jan; Karageorgos, Ioannis; Ryckaert, Julien; Wong, H.-S. Philip (2016)

Development of high-chi directed self-assembly process based on key learning from PS-b-PMMA system

Suh, Hyo Seon; Mannaert, Geert; Vandenbroeck, Nadia; Doise, Jan (2021)

DSA graphoepitaxy calibrations for contact hole multiplication

Graves, Trey; Vaglio Pret, Alessandro; Robertson, Stuart; Smith, Mark; Doise, Jan; Bekaert, Joost; Gronheid, Roel (2015)

Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

Doise, Jan; Chan, BT; Hori, Masafumi; Gronheid, Roel (2017)

Dual brush process for selective surface modification in graphoepitaxy directed self-assembly

Doise, Jan; Chan, BT; Hori, Masafumi; Gronheid, Roel (2017)

EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes

Gronheid, Roel; Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Karageorgos, Ioannis; Ryckaert, Julien; Chan, BT; Li, Chenxi; Zou, Yi (2016)

Impact of annealing temperature on DSA process: toward faster assembly kinetics

Suh, Hyo Seon; Nair, Vineet Vijayakrishnan; Rincon Delgadillo, Paulina; Doise, Jan; Lorusso, Gian; Nealey, Paul; Monreal, Victor; Baskaran, Durairaj; Cao, Yi; Padmanaban, Munirathna; Li, Jin; Kato, Takeshi; Sutani, Takumichi; Ishimoto, Toru; Ikota, Masami; Koshihara, Shunsuke (2018)