Browsing by author "Lin, Guanyang"
Now showing items 1-20 of 23
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Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Pathangi Sriraman, Hari; Gronheid, Roel; Van Den Heuvel, Dieter; Rincon Delgadillo, Paulina; Chan, BT; Van Look, Lieve; Bayana, Hareen; Cao, Yi; Her, YoungJun; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Somervell, Mark; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Nealey, Paul (2014) -
Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, JiHoon; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryota; Chikashi, Ito; Polli, Marco; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015) -
Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Gronheid, Roel; Rincon Delgadillo, Paulina; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Parnell, Doni; Chan, BT; Lee, Yu-tsung; Van Look, Lieve; Cao, Yi; Her, YoungJun; Lin, Guanyang; Harukawa, Ryoto; Nagaswami, Venkat; D'Urzo, Lucia; Somervell, Mark; Nealey, Paul (2014) -
Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher; Wu, Hengpeng; Cao, Yi; Lin, Guanyang; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2012) -
Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Nafus, Kathleen; Somervell, Mark; Cao, Yi; Lin, Guanyang (2012) -
DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
Pathangi Sriraman, Hari; Vaid, Varun; Chan, BT; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Cao, Yi; Durairaj, Baskaran; Lin, Guanyang; Somervell, Mark; Kitano, Takahiro; Harukawa, Ryota; Sah, Kaushik; Cross, Andrew; Bayana, Hareen; D'Urzo, Lucia; Gronheid, Roel (2016) -
High throughput grating qualification of directed self-assembly patterns using optical metrology
Van Look, Lieve; Rincon Delgadillo, Paulina; Lee, Yu-tsung; Pollentier, Ivan; Gronheid, Roel; Cao, Yi; Lin, Guanyang; Nealey, Paul F. (2014) -
High throughput grating qualification of directed self-assembly patterns using optical metrology
Van Look, Lieve; Rincon Delgadillo, Paulina; Lee, Yu-tsung; Pollentier, Ivan; Gronheid, Roel; Cao, Yi; Lin, Guanyang; Nealey, Paul F. (2013) -
Impact of BCP asymmetry on DSA patterning performance
Williamson, Lance; Kim, JiHoon; Cao, Yi; Lin, Guanyang; Gronheid, Roel; Nealey, Paul (2015) -
Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Rincon Delgadillo, Paulina; Nealey, Paul; Gronheid, Roel; Matsunaga, Koichi; Somervell, Mark; Nafus, Kathleen; Cao, Yi; Lin, Guanyang (2012) -
Implementation of DSA for electrical test vehicles at the 7 nm node
Gronheid, Roel; Doise, Jan; Bekaert, Joost; Chan, BT; Rincon Delgadillo, Paulina; Karageorgos, Ioannis; Ryckaert, Julien; Vandenberghe, Geert; Sayan, Safak; Lin, Guanyang (2015) -
Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Doise, Jan; Bekaert, Joost; Chan, BT; Gronheid, Roel; Cao, Yi; Hong, Sung Eun; Lin, Guanyang; Fishman, Daniel; Chakk, Yuli; Marzook, Taisir (2015) -
Influence of film thickness and pattern density in graphoepitaxial DSA
Doise, Jan; Bekaert, Joost; Chan, BT; Lin, Guanyang; Gronheid, Roel (2015) -
Influence of surface energy modification in grapho-epitaxy DSA
Doise, Jan; Mailfert, Julien; Bekaert, Joost; Chan, BT; Lin, Guanyang; Gronheid, Roel (2015) -
Influence of template fill in grapho-epitaxy DSA
Doise, Jan; Bekaert, Joost; Chan, BT; Hong, Sung Eun; Lin, Guanyang; Gronheid, Roel (2016) -
Influence of template fill in graphoepitaxy directed self-assembly
Doise, Jan; Bekaert, Joost; Chan, BT; Hong, Sung Eun; Lin, Guanyang; Gronheid, Roel (2016) -
Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces
Rincon Delgadillo, Paulina; Gronheid, Roel; Lin, Guanyang; Cao, Yi; Romo, Ainhoa; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2014) -
Line Edge Roughness on Directed Self Assembly: Impact of process conditions
MKuppuswamy, Vijaya Kumar; Williamson, Lance; Pathangi Sriraman, Hari; Seidel, Robert; Gronheid, Roel; Nealey, Paul; Lin, Guanyang; Cao, Yi (2015) -
Material influences on process performance in chemo-epitaxy directed self-assembly integration
Gronheid, Roel; Van Look, Lieve; Rincon Delgadillo, Paulina; Pollentier, Ivan; Cao, Yi; Lin, Guanyang; Nealey, Paul (2013) -
Origin of defect in directed self-assembly of block copolymers using feature multiplication
Rincon Delgadillo, Paulina; Harukawa, Ryoto; Parnell, Doni; Lee, Yu-tsung; Chan, BT; Lin, Guanyang; Cao, Yi; Nagaswami, Venkat; Somervell, Mark; Nafus, Kathleen; Gronheid, Roel; Nealey, Paul (2013)