Browsing by author "Tilmans, Harrie"

0-level packaging for (RF-)MEMS

Tilmans, Harrie (2003)

0-Level packaging techniques for flip-chip mounted MMICs

De Raedt, Walter; Brebels, Steven; Monfraix, P.; Carchon, Geert; Jourdain, Anne; Tilmans, Harrie (2001)

11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

Witvrouw, Ann; Haspeslagh, Luc; Varela Pedreira, Olalla; De Coster, Jeroen; De Wolf, Ingrid; Tilmans, Harrie; Bearda, Twan; Schlatmann, Bart; van Bommel, Mark; de Nooijer, Christine; Magnee, P.H.C.; Lous, E.J.; Hagting, Marco; Lauria, John; Vanneer, Roel; van Drieenhuizen, Bert (2010)

57-64 GHz seven-pole bandpass filter substrate integrated waveguide (SIW) in LTCC

Dancila, Dragos; Rottenberg, Xavier; Tilmans, Harrie; De Raedt, Walter; Huynen, Isabelle (2011)

60GHz Si integrated cavity oscillator

Dancila, Dragos; Rottenberg, Xavier; Tilmans, Harrie; De Raedt, Walter; Huynen, Isabelle (2010)

60GHz tunable cavity resonator based on a perturbation by a volume inside the cavity

Dancila, Dragos; Ekkels, Phillip; Rottenberg, Xavier; Francis, Laurent; Huynen, Isabelle; Carchon, Geert; Tilmans, Harrie; De Raedt, Walter (2008)

A 60GHz silicon micromachined cavity resonator with integrated tuning MEMS array

Dancila, Dragos; Ekkels, Phillip; Simon, Pascal; Jourdain, Anne; Phommahaxay, Alain; Rottenberg, Xavier; Huynen, Isabelle; Ocket, Ilja; Nauwelaers, Bart; Puers, Bob; De Raedt, Walter; Tilmans, Harrie (2009)

A capacitive humidity sensor using a positive photosensitive polymer

Pham, Nga; Cherman, Vladimir; Duval, Fabrice; Sabuncuoglu Tezcan, Deniz; Jansen, Roelof; Tilmans, Harrie (2010)

A CMOS-compatible 20MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperature

Jansen, Roelof; Libois, Michael; Rottenberg, Xavier; Lofrano, Melina; De Coster, Jeroen; Van Hoof, Rita; Severi, Simone; Van der Plas, Geert; De Raedt, Walter; Tilmans, Harrie; Donnay, Stephane; Borremans, Jonathan (2011)

A fully packaged electromagnetic microrelay

Tilmans, Harrie; Fullin, E.; Ziad, Hocine; Van De Peer, Myriam; Kesters, J.; Van Geffen, E.; Bergqvist, J.; Pantus, M.; Beyne, Eric; Baert, Kris; Naso, F. (1999)

A general and simplified method for rapid evolution of electrostatic switches with varying geometries

De Coster, Jeroen; Tilmans, Harrie; van Beek, J.T.M.; Rijks, T.G.S.M.; Steeneken, P.G.; Puers, Bob (2004)

A general multi-mode lumped equivalent circuit model for a circular cMUT cell

Mao, Shengping; Rottenberg, Xavier; Liu, Liwang; Rochus, Veronique; Brondani Torri, Guilherme; Haouari, Rachid; Nauwelaers, Bart; Tilmans, Harrie (2016)

A MEMS 0-level packaging technology based on CuSn/Cu chip capping bonding

Bogaerts, Lieve; Phommahaxay, Alain; Rottenberg, Xavier; Naito, Yasyuki; De Coster, Jeroen; Varela Pedreira, Olalla; Van Hoovels, Nele; Cherman, Vladimir; Helin, Philippe; Onishi, K.; Tilmans, Harrie (2011)

A MEMS autonomous switched oscillator

Brondani Torri, Guilherme; Bienstman, Jan; Rottenberg, Xavier; Tilmans, Harrie; Van Hoof, Chris; Puers, Bob (2014)

A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators

Dancila, Dragos; Ekkels, Phillip; Rottenberg, Xavier; Huynen, Isabelle; De Raedt, Walter; Tilmans, Harrie (2010)

A method to evaluate internal cavity pressure of sealed MEMS devices

De Coster, Jeroen; Jourdain, Anne; Puers, Bob; Tilmans, Harrie (2005)

A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging

Kalicinski, Stanislaw; Tilmans, Harrie; Wevers, Martine; De Wolf, Ingrid (2009)