Browsing by author "Tilmans, Harrie"
Now showing items 21-40 of 251
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A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
Pamidighantam, Sayanu; Laureyn, Wim; Salah, Ahmed; Verbist, Agnes; Tilmans, Harrie (2002) -
A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometer
De Coster, Jeroen; Lofrano, Melina; Jansen, Roelof; Rottenberg, Xavier; Severi, Simone; Borremans, Jonathan; Van der Plas, Geert; Donnay, Stephane; Tilmans, Harrie; De Wolf, Ingrid (2011) -
A reliable and compact polymer-based package for capacitive RF-MEMS switches
Oya, Y.; Okubora, A.; van Spengen, Merlijn; Soussan, Philippe; Stoukatch, Serguei; Rottenberg, Xavier; Ratchev, Petar; Tilmans, Harrie; De Raedt, Walter; Beyne, Eric; De Moor, Piet; De Wolf, Ingrid; Baert, Kris (2004-12) -
A surface micromachined tunable film bulk acoustic resonator
Pan, Wanling; Soussan, Philippe; Nauwelaers, Bart; Tilmans, Harrie (2004) -
A surface micromachined tunable film bulk acoustic resonator
Pan, Wanling; Soussan, Philippe; Nauwelaers, Bart; Tilmans, Harrie (2004) -
A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator
Helin, Philippe; Verbist, Agnes; De Coster, Jeroen; Guo, Bin; Severi, Simone; Witvrouw, Ann; Haspeslagh, Luc; Tilmans, Harrie; Naito, Yasuyuki; Onishi, K. (2011) -
A wet release process for fabricating slender and compliant suspended micro-mechanical structures
Pamidighantam, Sayanu; Laureyn, Wim; Rusu, Cristina; Baert, Kris; Puers, Bob; Tilmans, Harrie (2003) -
Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers
Guo, Bin; Wen, Lianggong; Helin, Philippe; Claes, Gert; Verbist, Agnes; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; De Wolf, Ingrid; Shahar, Abdul Hadi; Li, Yunlong; Cui, Hushan; Lux, Marcel; Vereecke, Guy; Tilmans, Harrie; Haspeslagh, Luc; Decoutere, Stefaan; Osman, Haris; Puers, Bob; Severi, Simone; Witvrouw, Ann (2011) -
Acoustic meta-materials in MEMS bar resonators
Rottenberg, Xavier; Jansen, Roelof; Zhang, Yuchen; Coosemans, Adriaan; Delcour, Gil; Herdewyn, Katrien; Vanpaemel, Johannes; Van Hoof, Chris; Tilmans, Harrie (2010-02) -
Acoustic meta-materials in MEMS BAW resonators
Rottenberg, Xavier; Jansen, Roelof; Van Hoof, Chris; Tilmans, Harrie (2011) -
Air gap-based MEMS switch technology using nickel surface micromachining
Ekkels, Phillip; Rottenberg, Xavier; Czarnecki, Piotr; Philipsen, Harold; Mertens, Robert; Puers, Bob; Tilmans, Harrie (2011) -
An analytic Volterra-series-based model for a MEMS variable capacitor
Innocent, Manuel; Wambacq, Piet; Donnay, Stephane; Tilmans, Harrie; Sansen, Willy; De Man, Hugo (2003) -
An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology
Rottenberg, Xavier; Brebels, Steven; Ekkels, Phillip; Czarnecki, Piotr; Nolmans, Philip; Mertens, Robert; Nauwelaers, Bart; Puers, Bob; De Wolf, Ingrid; De Raedt, Walter; Tilmans, Harrie (2007-07) -
Analysis of the nonlinear behavior of a MEMS variable capacitor
Innocent, Manuel; Wambacq, Piet; Donnay, Stephane; Tilmans, Harrie; Engels, Marc; De Man, Hugo; Sansen, Willy (2002) -
Analytical model of the DC-actuation of electrostatic MEMS devices with distributed dielectric charging and non-planar electrodes
Rottenberg, Xavier; De Wolf, Ingrid; Nauwelaers, Bart; De Raedt, Walter; Tilmans, Harrie (2007) -
B-field characterization and equivalent circuit modeling of a poly-SiGe-MEMS based xylophone bar magnetometer
Farghaly, Mahmoud; Rochus, Veronique; Rottenberg, Xavier; Mohammed, U.S.; Tilmans, Harrie (2014) -
Boosted RF-MEMS capacitive shunt switches
Rottenberg, Xavier; Jansen, Henri; Nauwelaers, Bart; Fiorini, Paolo; De Raedt, Walter; Tilmans, Harrie (2002) -
Built-in self-limitation of masked aluminum anodization using photoresist
Zekry, Joseph; Celis, Jean-Pierre; Sabuncuoglu Tezcan, Deniz; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2011) -
Capacitive micromachined ultrasonic transducers for acoustic manipulation
Mao, Shengping; Zhong, Kuo; Rochus, Veronique; Severi, Simone; Nauwelaers, Bart; Tilmans, Harrie; Rottenberg, Xavier (2015) -
Challenges of monolithic integration for SiGe MEMS Technology
Ray Chaudhuri, Ashesh; Severi, Simone; Helin, Philippe; Francis, Laurent; Tilmans, Harrie (2016)