Browsing by imec author "8732393f67b07512e725114ed9e129719bc408be"
Now showing items 1-20 of 51
-
193 nm lithography on a full field scanner
Goethals, Mieke; Pollers, Ingrid; Jaenen, Patrick; Van Roey, Frieda; Ronse, Kurt; Heskamp, B.; Davies, G. (1999) -
3D integration challenges for fine pitch back side micro-bumping on ZoneBOND™ wafers
Buisson, Thibault; De Preter, Inge; Suhard, Samuel; Vandersmissen, Kevin; Jaenen, Patrick; Witters, Thomas; Jamieson, Geraldine; Jourdain, Anne; Van Huylenbroeck, Stefaan; La Manna, Antonio; Beyer, Gerald; Beyne, Eric (2012) -
3D wafer-level packaging die stacking using spin-on-dielectric polymer liner through-silicon vias
Civale, Yann; Sabuncuoglu Tezcan, Deniz; Philipsen, Harold; Duval, Fabrice; Jaenen, Patrick; Travaly, Youssef; Soussan, Philippe; Swinnen, Bart; Beyne, Eric (2011) -
A 0.314mm2 6T-SRAM cell built with tall triple-gate devices for 45nm node applications using 0.75NA 193nm lithography
Nackaerts, Axel; Ercken, Monique; Demuynck, Steven; Lauwers, Anne; Baerts, Christina; Bender, Hugo; Boullart, Werner; Collaert, Nadine; Degroote, Bart; Delvaux, Christie; de Marneffe, Jean-Francois; Dixit, Abhisek; De Meyer, Kristin; Hendrickx, Eric; Heylen, Nancy; Jaenen, Patrick; Laidler, David; Locorotondo, Sabrina; Maenhoudt, Mireille; Moelants, Myriam; Pollentier, Ivan; Ronse, Kurt; Rooyackers, Rita; Van Aelst, Joke; Vandenberghe, Geert; Vandervorst, Wilfried; Vandeweyer, Tom; Vanhaelemeersch, Serge; Van Hove, Marleen; Van Olmen, Jan; Verhaegen, Staf; Versluijs, Janko; Vrancken, Christa; Wiaux, Vincent; Jurczak, Gosia; Biesemans, Serge (2004-12) -
A nanophotonic 4x4 wavelength router in silicon-on-insulator
Dumon, Pieter; Bogaerts, Wim; Van Thourhout, Dries; Baets, Roel; Wouters, Johan M. D.; Beckx, Stephan; Jaenen, Patrick (2005) -
Alternative metal recess for fully-self-aligned-vias
Contino, Antonino; Le, Quoc Toan; Sakamoto, Kei; Schleicher, Filip; Paolillo, Sara; Pacco, Antoine; Kesters, Els; Lorant, Christophe; Murdoch, Gayle; Lariviere, Stephane; Vega Gonzalez, Victor; Versluijs, Janko; Jaenen, Patrick; Teugels, Lieve; van der Veen, Marleen; Jourdan, Nicolas; Ciofi, Ivan; Boccardi, Guillaume; Tokei, Zsolt; Wilson, Chris (2020) -
Applying dipole illumination to characterize the imaging performance of 193nm photoresists for the 100nm node
Vleeming, Bert; Heskamp, B.; Finders, Jo; Jaenen, Patrick (2000) -
ArF step-and-scan exposure system for 0.15-μm and 0.13-μm technology nodes
Mulkens, J.; Stoeldraijer, J.; Davies, G.; Dierichs, M.; Heskamp, B.; Moers, M. H.; George, R. A.; Roempp, O.; Glatzel, H.; Wagner, C.; Pollers, Ingrid; Jaenen, Patrick (1999) -
Basic photonic wire components in silicon-on-insulator
Dumon, Pieter; Roelkens, Gunther; Bogaerts, Wim; Van Thourhout, Dries; Wouters, Johan; Beckx, Stephan; Jaenen, Patrick; Baets, Roel (2005) -
Bottom-ARC optimization methodology for 0.25μm lithography and beyond
Op de Beeck, Maaike; Vandenberghe, Geert; Jaenen, Patrick; Feng, Hong Zhang; Delvaux, Christie; Richardson, Paul; Van Puyenbroeck, Ilse; Ronse, Kurt; Lamb, J. E.; van der Hilst, J. B. C.; van Wingerden, Johannes (1998) -
Detection of split design-related weak points in double patterning using PQW and bright-field defect inspection
Van Den Heuvel, Dieter; Cheng, Shaunee; Leray, Philippe; Wiaux, Vincent; Maenhoudt, Mireille; D'have, Koen; Jaenen, Patrick; Marcuccilli, Gino; Malik, Irfan; Klein, Sophie (2008) -
Die stacking using 3D-wafer level packaging copper/polymer through-Si via technology and Cu/Sn interconnect bumping
Civale, Yann; Sabuncuoglu Tezcan, Deniz; Philipsen, Harold; Jaenen, Patrick; Agarwal, Rahul; Duval, Fabrice; Soussan, Philippe; Travaly, Youssef; Beyne, Eric (2009) -
Evaluation of advanced I-line resists for practical 0.5*(l/NA) lithography
Tzviatkov, Plamen; Pforr, Rainer; Jaenen, Patrick; Vertommen, Johan; Van den hove, Luc (1994) -
Evaluation of megasonic cleaning for sub-90-nm technologies
Vereecke, Guy; Holsteyns, Frank; Arnauts, Sophia; Beckx, Stephan; Jaenen, Patrick; Kenis, Karine; Lismont, Mark; Lux, Marcel; Vos, Rita; Snow, Jim; Mertens, Paul (2005) -
Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193nm optical lithography
Selvaraja, Shankar; Jaenen, Patrick; Bogaerts, Wim; Van Thourhout, Dries; Dumon, Pieter; Baets, Roel (2009-01) -
Front-end-of-line process development using 193-nm lithography
Pollentier, Ivan; Ercken, Monique; Eliat, Astrid; Delvaux, Christie; Jaenen, Patrick; Ronse, Kurt (2001) -
High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene
Jenei, Snezana; Decoutere, Stefaan; Winderickx, Gillis; Struyf, Herbert; Tokei, Zsolt; Vervoort, Iwan; Vos, I.; Jaenen, Patrick; Carbonell, Laure; De Jaeger, Brice; Donaton, R. A.; Vanhaelemeersch, Serge; Maex, Karen; Nauwelaers, Bart (2001) -
How to use DUV BARCs on topography
Op de Beeck, Maaike; Vandenberghe, Geert; Jaenen, Patrick; Zhang, Fenghong; Delvaux, Christie; Van Puyenbroeck, Ilse; Ronse, Kurt (1998) -
Impact of thinning and through silicon via proximity on high-k / metal gate first CMOS performance
Mercha, Abdelkarim; Redolfi, Augusto; Stucchi, Michele; Minas, Nikolaos; Van Olmen, Jan; Thangaraju, Sarasvathi; Velenis, Dimitrios; Domae, Shinichi; Yang, Yu; Katti, Guruprasad; Labie, Riet; Okoro, Chukwudi; Zhao, Ming; Asimakopoulos, Panagiotis; De Wolf, Ingrid; Chiarella, Thomas; Schram, Tom; Rohr, Erika; Van Ammel, Annemie; Jourdain, Anne; Ruythooren, Wouter; Armini, Silvia; Radisic, Alex; Philipsen, Harold; Heylen, Nancy; Kostermans, Maarten; Jaenen, Patrick; Sleeckx, Erik; Sabuncuoglu Tezcan, Deniz; Debusschere, Ingrid; Soussan, Philippe; Perry, Dan; Van der Plas, Geert; Cho, Jong Hoon; Marchal, Pol; Travaly, Youssef; Beyne, Eric; Biesemans, Serge; Swinnen, Bart (2010) -
Implementation of an industry compliant, 5×50μm, via-middle TSV technology on 300mm wafers
Redolfi, Augusto; Velenis, Dimitrios; Thangaraju, Sarasvathi; Nolmans, Philip; Jaenen, Patrick; Kostermans, Maarten; Baier, Ulrich; Van Besien, Els; Dekkers, Harold; Witters, Thomas; Jourdan, Nicolas; Van Ammel, Annemie; Vandersmissen, Kevin; Rodet, Simon; Philipsen, Harold; Radisic, Alex; Heylen, Nancy; Travaly, Youssef; Swinnen, Bart; Beyne, Eric (2011-06)