Browsing by author "Sutcliffe, Victor"
Now showing items 1-12 of 12
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Atomic layer deposited barriers for copper interconnects
Schuhmacher, Jorg; Martin Hoyas, Ana; Ernur, Didem; Tokei, Zsolt; Travaly, Youssef; Bruynseraede, Christophe; Satta, Alessandra; Whelan, Caroline; Shamiryan, Denis; Beyer, Gerald; Abell, Thomas; Sutcliffe, Victor; Schaekers, Marc; Maex, Karen (2004) -
Atomic layer deposition of barriers for interconnect
Besling, Wim; Satta, Alessandra; Schuhmacher, Jörg; Abell, Thomas; Sutcliffe, Victor; Martin Hoyas, Ana; Beyer, Gerald; Gravesteijn, Dirk; Maex, Karen (2002) -
Comprehensive electromigration studies of dual-damascene Cu interconnects with ALD WCxNy barriers
Bruynseraede, Christophe; Fisher, A.H.; Ungar, F.; Schuhmacher, Jorg; Sutcliffe, Victor; Michelon, Julien; Maex, Karen (2004) -
Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen (2005) -
Impact of the barrier/dielectric interface quality on reliability of Cu porous-low-k interconnects
Tokei, Zsolt; Sutcliffe, Victor; Demuynck, Steven; Iacopi, Francesca; Roussel, Philippe; Beyer, Gerald; Hoofman, Romano; Maex, Karen (2004) -
Initial growth mechanism of atomic layer deposited TiN
Satta, Alessandra; Vantomme, Andre; Schuhmacher, Jorg; Whelan, Caroline; Sutcliffe, Victor; Maex, Karen (2004) -
Integration of ALD WCN into a dual damascene oxide module
Schuhmacher, Jörg; Beyer, Gerald; Vos, Ingrid; Sutcliffe, Victor; Tokei, Zsolt; Besling, W.; Maex, Karen (2003) -
Interface characterization of nanoscale laminate structures on dense dielectric substrates by x-ray reflectivity
Travaly, Youssef; Schuhmacher, Jorg; Martin Hoyas, Ana; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Sutcliffe, Victor; Jonas, A.M. (2005-04) -
Interface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivity
Travaly, Youssef; Schuhmacher, Jorg; Martin Hoyas, Ana; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Sutcliffe, Victor; Jonas, Alain M. (2005-04) -
Opportunities and challenges for integration of ALD barrier layers in damascene process flows
Sprey, Hessel; Schuhmacher, Jorg; Travaly, Youssef; Sutcliffe, Victor; Abell, Thomas; Bastings, Hans; Stokhof, Maarten; Haukka, Suvi; Li, Wei-Min; Beyer, Gerald; Raaijmakers, Ivo (2004) -
Processing damage and electrical performance of porous dielectrics in narrow spaced interconnects
Iacopi, Francesca; Travaly, Youssef; Stucchi, Michele; Struyf, Herbert; Peeters, Stefan; Jonckheere, Rik; Leunissen, Peter; Tokei, Zsolt; Sutcliffe, Victor; Richard, Olivier; Van Hove, Marleen; Maex, Karen (2004) -
Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects
Iacopi, Francesca; Travaly, Youssef; Stucchi, Michele; Struyf, Herbert; Peeters, Stefan; Jonckheere, Rik; Leunissen, Peter; Tokei, Zsolt; Sutcliffe, Victor; Richard, Olivier; Van Hove, Marleen; Maex, Karen (2004-05)