Browsing by author "Geenen, Luc"
Now showing items 1-20 of 35
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A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Lanckmans, Filip; Geenen, Luc; Vandervorst, Wilfried; Maex, Karen (2000) -
A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Lanckmans, Filip; Geenen, Luc; Vandervorst, Wilfried; Maex, Karen (1999) -
Accurate electrical activation characterization of CMOS ultra-shallow profiles
Clarysse, Trudo; Dortu, Fabian; Vanhaeren, Danielle; Hoflijk, Ilse; Geenen, Luc; Janssens, Tom; Loo, Roger; Vandervorst, Wilfried; Pawlak, Bartek; Ouzeaud, V.; Defranoux, C.; Faifer, V.N.; Current, M.I. (2004) -
Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with other established techniques
Loo, Roger; Caymax, Matty; Libezny, Milan; Blavier, G.; Brijs, Bert; Geenen, Luc; Vandervorst, Wilfried (2000) -
Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS
Loo, Roger; Caymax, Matty; Libezny, Milan; Blavier, G.; Brijs, Bert; Geenen, Luc; Vandervorst, Wilfried (1999) -
Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions
Bargallo Gonzalez, Mireia; Thomas, Nicole; Simoen, Eddy; Verheyen, Peter; Hikavyy, Andriy; Leys, Frederik; Okuno, Yasutoshi; Vissouvanadin Soubaretty, Bertrand; Van Daele, Benny; Geenen, Luc; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R. (2007) -
Artifacts in SIMS depth profiling
Vandervorst, Wilfried; De Witte, Hilde; Tian, Chunsheng; Geenen, Luc (1997) -
Atomic layer deposition and remote plasma surface preparation for gate stack applications
Delabie, Annelies; Caymax, Matty; Brijs, Bert; Cartier, E.; Geenen, Luc; Vandervorst, Wilfried; Bajolet, Philippe; Maes, Jan; Tsai, Wilman; De Gendt, Stefan; Heyns, Marc (2003) -
Cesium near-surface concentration in low energy, negative mode dynamic SIMS
Berghmans, Bart; Van Daele, Benny; Geenen, Luc; Conard, Thierry; Franquet, Alexis; Vandervorst, Wilfried (2007-10) -
Cesium near-surface concentration in low energy, negative mode dynamic SIMS
Berghmans, Bart; Van Daele, Benny; Geenen, Luc; Conard, Thierry; Franquet, Alexis; Vandervorst, Wilfried (2008) -
Chemical and electrical dopant profiling for P-type junctions formed by solid phase epitaxial regrowth
Pawlak, Bartek; Lindsay, Richard; Kittl, Jorge; Vandervorst, Wilfried; Clarysse, Trudo; Hoflijk, Ilse; Dieu, B.; Geenen, Luc; Brijs, Bert (2003) -
Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth
Pawlak, Bartek; Lindsay, Richard; Surdeanu, Radu; Dieu, Bjorn; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Duffy, Ray; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried (2004) -
CMOS scaling beyond the 90 nm CMOS technology node: shallow junction and integration challenges
Dachs, Charles; Surdeanu, Radu; Pawlak, Bartek; Doornbos, Gerben; Duffy, R.; Heringa, Anco; Ponomarev, Youri; Venezia, Vincent; Van Dal, Mark; Stolk, P.; Lindsay, Richard; Henson, Kirklen; Dieu, B.; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried; Pagès, Xavier (2003) -
Depth profiling of B through silicide on silicon structures, using secondary ion-mass spectrometry and resonant postionization mass spectrometry
De Bisschop, Peter; Gomez, J.; Geenen, Luc; Vandervorst, Wilfried (1996) -
Depth profiling of B through silicide on silicon structures, using SIMS and resonant post-ionisation SIMS
De Bisschop, Peter; Gomez, G.; Geenen, Luc; Vandervorst, Wilfried (1995) -
Depth resolution and surface transients in crystalline Silicon at ultra low energies
Goossens, Jozefien; Berghmans, Bart; Franquet, Alexis; Nguyen, Duy; Delmotte, Joris; Geenen, Luc; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried (2009-09) -
Dopant profiling in Ge
Vandervorst, Wilfried; Geenen, Luc; Huyghebaert, Cedric; Satta, Alessandra (2003) -
Ge-migration in s-Si-SiGe structures during implantation and annealing
Vandervorst, Wilfried; Janssens, Tom; Geenen, Luc; Loo, Roger; Caymax, Matty; Delhougne, Romain; Pawlak, Bartek; Ravit, Claire (2005) -
In-line and non-destructive analysis of epitaxial Si1-x-yGexCy
Loo, Roger; Delhougne, Romain; Geenen, Luc; Brijs, Bert; Vandervorst, Wilfried; Meunier-Beillard, Philippe; Koumoto, T. (2004) -
In-line and non-destructive analysis of epitaxial Si1-x-yGexCy by spectroscopic ellipsometry and comparison with other established techniques
Loo, Roger; Meunier-Beillard, Philippe; Delhougne, Romain; Koumoto, T.; Geenen, Luc; Brijs, Bert; Vandervorst, Wilfried (2003)