Browsing by author "Lambert, U."

Correlation between grown-in silicon substrate defects and silicon gate oxide breakdown characteristics

Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, P. (1996)

Defects in As-grown silicon and their evolution during heat treatments

Vanhellemont, Jan; Dornberger, E.; Esfandyari, J.; Kissinger, G.; Trauwaert, Marie-Astrid; Bender, Hugo; Gräf, D.; Lambert, U.; von Ammon, W. (1997)

Differential interference contrast microscopy of defects in As-grown and annealed Si wafers

Trauwaert, Marie-Astrid; Vanhellemont, Jan; Lambert, U.; Gräf, D.; Kenis, Karine; Mertens, Paul; Heyns, Marc (1997)

Grown-in defect density spectra in czochralski silicon wafers

Kissinger, G.; Gräf, D.; Lambert, U.; Vanhellemont, Jan; Richter, H. (1996)

Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques

Vanhellemont, Jan; Kissinger, G.; Gräf, D.; Kenis, Karine; Depas, Michel; Mertens, Paul; Lambert, U.; Heyns, Marc; Claeys, C.; Richter, H.; Wagner, Patrick (1995)

Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation

Vanhellemont, Jan; Kissinger, G.; Gräf, D.; Kenis, Karine; Depas, Michel; Mertens, Paul; Lambert, U.; Heyns, Marc; Claeys, Cor; Richter, H.; Wagner, P. (1996)