Browsing by author "Claes, Gert"
Now showing items 1-14 of 14
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Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers
Guo, Bin; Wen, Lianggong; Helin, Philippe; Claes, Gert; Verbist, Agnes; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; De Wolf, Ingrid; Shahar, Abdul Hadi; Li, Yunlong; Cui, Hushan; Lux, Marcel; Vereecke, Guy; Tilmans, Harrie; Haspeslagh, Luc; Decoutere, Stefaan; Osman, Haris; Puers, Bob; Severi, Simone; Witvrouw, Ann (2011) -
Design and characterization of thin SiGe membranes for MEMS packaging at wafer level
Gonzalez, Pilar; Claes, Gert; De Meyer, Kristin; Witvrouw, Ann (2008) -
Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance
Van Hoof, Rita; Bryce, George; Claes, Gert; Witvrouw, Ann; Severi, Simone (2011) -
Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance
Van Hoof, Rita; Bryce, George; Claes, Gert; Witvrouw, Ann; Severi, Simone (2010) -
Improvement of PECVD silicon–germanium crystallization for CMOS compatible MEMS applications
Guo, Bin; Severi, Simone; Bryce, George; Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Haspeslagh, Luc; Witvrouw, Ann; Decoutere, Stefaan (2010) -
Improvement of the poly-SiGe electrode contact technology for MEMS
Claes, Gert; Severi, Simone; Celis, Jean-Pierre; Witvrouw, Ann (2010) -
Influence of the novel anchor design on the shear strength of poly-SiGe thin film wafer level packages
Claes, Gert; Severi, Simone; Van Hoof, Rita; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann (2010) -
Poly-SiGe-based MEMS thin-film encapsulation
Guo, Bin; Wang, Bo; Wen, Lianggong; Helin, Philippe; Claes, Gert; De Coster, Jeroen; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Vereecke, Guy; Haspeslagh, Luc; Tilmans, Harrie; Decoutere, Stefaan; Osman, Haris; Puers, Bob; De Wolf, Ingrid; Tanaka, Shuji; Severi, Simone; Witvrouw, Ann (2012) -
Polycrystalline silicon-germanium electrode contact technology improvement for MEMS applications
Claes, Gert; Severi, Simone; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann (2010) -
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Van Barel, Greg; Stoffels, Steve; Decoutere, Stefaan; Nguyen, V.; Hentz, S.; Robert, P.; Celis, Jean-Pierre; Witvrouw, Ann (2008) -
Simultaneous optimization of the material properties, uniformity and deposition rate of polycrystalline CVD And PECVD silicon-germanium layers for MEMS applications
Bryce, George; Severi, Simone; Du Bois, Bert; Willegems, Myriam; Claes, Gert; Van Hoof, Rita; Haspeslagh, Luc; Decoutere, Stefaan; Witvrouw, Ann (2008) -
Simultaneous optimization of the material properties, uniformity and deposition rate of polycrystalline CVD And PECVD silicon-germanium layers for MEMS applications
Bryce, George; Severi, Simone; Du Bois, Bert; Willegems, Myriam; Claes, Gert; Van Hoof, Rita; Haspeslagh, Luc; Decoutere, Stefaan; Witvrouw, Ann (2008) -
Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Claes, Gert; Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Gromova, Maria; Verbist, Agnes; Van der Donck, Tom; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann (2008)