Browsing by author "Wen, Liang Gong"
Now showing items 1-20 of 20
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Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Dutta, Shibesh; Boemmels, Juergen; Tokei, Zsolt (2015) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Peter, Antony; Siew, Yong Kong; Dutta, Shibesh; Croes, Kristof; Swerts, Johan; Popovici, Mihaela Ioana; Sankaran, Kiroubanand; Pourtois, Geoffrey; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2014-10) -
Alternative metals for advanced interconnects
Adelmann, Christoph; Wen, Liang Gong; Peter, Antony; Siew, Yong Kong; Croes, Kristof; Swerts, Johan; Popovici, Mihaela Ioana; Sankaran, Kiroubanand; Pourtois, Geoffrey; Van Elshocht, Sven; Boemmels, Juergen; Tokei, Zsolt (2014) -
Atomic layer deposition of ruthenium for advanced interconnect applications
Adelmann, Christoph; Popovici, Mihaela Ioana; Groven, Benjamin; Wen, Liang Gong; Dutta, Shibesh; Boemmels, Juergen; Tokei, Zsolt; Van Elshocht, Sven (2016) -
Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper
Wen, Liang Gong; Roussel, Philippe; Varela Pedreira, Olalla; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela Ioana; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph (2016-09) -
Cryogenic etching vs P4 approaches: paths towards ultra-low damage integration of mesoporous oxide dielectric materials
de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Rutigliani, Vito; Decoster, Stefan; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014) -
Direct etched Cu characterization for advanced interconnects
Wen, Liang Gong; Yamashita, Fumiko; Tang, Baojun; Croes, Kristof; Tahara, Shigeru; Shimoda, Keiichi; Maeshiro, Takeru; Nishimura, Eiichi; Lazzarino, Frederic; Ciofi, Ivan; Boemmels, Juergen; Tokei, Zsolt (2015) -
Growth evolution and characterization of ultrathin CoGe2 films synthesized via catalytic solid-vapor reaction technique
Peter, Antony; Opsomer, Karl; Adelmann, Christoph; Van Ammel, Annemie; Meersschaut, Johan; Moussa, Alain; Schaekers, Marc; Wen, Liang Gong; Tokei, Zsolt; Van Elshocht, Sven (2014) -
Integration aspects of post-porosity low-k protection using PMMA sacrificial filler
Zhang, Liping; de Marneffe, Jean-Francois; Wen, Liang Gong; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhaïl (2016) -
Integration of porous low-k dielectrics using post porosity pore protection
Zhang, Liping; de Marneffe, Jean-Francois; Verdonck, Patrick; Heylen, Nancy; Wen, Liang Gong; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhail (2016) -
Low temperature catalytic chemical vapour synthesis of Cu3Ge thin films for interconnect applications
Peter, Antony; Wen, Liang Gong; Carbonell, Laure; Schaekers, Marc; Tokei, Zsolt; Van Elshocht, Sven (2013) -
Low temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applications
Peter, Antony; Carbonell, Laure; Schaekers, Marc; Opsomer, Karl; Adelmann, Christoph; Richard, Olivier; Bender, Hugo; Franquet, Alexis; Meersschaut, Johan; Wen, Liang Gong; Tokei, Zsolt; Van Elshocht, Sven (2014) -
On-chip interconnect trends, challenges and solutions: how to keep RC and reliability under control
Tokei, Zsolt; Ciofi, Ivan; Roussel, Philippe; Debacker, Peter; Raghavan, Praveen; van der Veen, Marleen; Jourdan, Nicolas; Wilson, Chris; Vega Gonzalez, Victor; Adelmann, Christoph; Wen, Liang Gong; Croes, Kristof; Varela Pedreira, Olalla; Moors, Kristof; Krishtab, Mikhail; Armini, Silvia; Boemmels, Juergen (2016) -
Reliability study on cobalt and ruthenium as alternative metals for advance interconnects
Varela Pedreira, Olalla; Croes, Kristof; Lesniewska, Alicja; Wu, Chen; van der Veen, Marleen; De Messemaeker, Joke; Vandersmissen, Kevin; Jourdan, Nicolas; Wen, Liang Gong; Adelmann, Christoph; Briggs, Basoene; Vega Gonzalez, Victor; Boemmels, Juergen; Tokei, Zsolt (2017) -
Ruthenium metallization for advanced interconnects
Wen, Liang Gong; Adelmann, Christoph; Varela Pedreira, Olalla; Dutta, Shibesh; Popovici, Mihaela Ioana; Briggs, Basoene; Heylen, Nancy; Vanstreels, Kris; Wilson, Chris; Van Elshocht, Sven; Croes, Kristof; Bommels, Juergen; Tokei, Zsolt (2016) -
Ruthenium nanowires by selective atomic layer deposition
Swerts, Johan; Wen, Liang Gong; Delabie, Annelies; Phung, Quan; Boemmels, Juergen; Tokei, Zsolt; Van Elshocht, Sven (2013) -
Scaling of Back End of Line Processing : opportunities and challenges
Verdonck, Patrick; Wilson, Chris; Ronse, Kurt; Wen, Liang Gong; Armini, Silvia (2016) -
Self-organized organic/inorganic films functional to next generation metallization schemes
Armini, Silvia; Carnevali, Guido; Sun, Yiting; Zhang, Liping; de Marneffe, Jean-Francois; Zhang, Yu; Baklanov, Mikhaïl; Jourdan, Nicolas; Verdonck, Patrick; Teugels, Lieve; Delande, Tinne; Wen, Liang Gong; Struyf, Herbert; Boemmels, Juergen; Tokei, Zsolt (2014) -
The effects of scaling on back end of line processing
Verdonck, Patrick; Wilson, Chris; Wen, Liang Gong (2014) -
Ultra-low damage integration of k= 2.3 periodic mesoporous oxide dielectric material using cryogenic etching
de Marneffe, Jean-Francois; Zhang, Liping; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Heylen, Nancy; Ciofi, Ivan; Wen, Liang Gong; Wilson, Chris; Savage, Travis; Matsunaga, Koichi; Nafus, Kathleen; Boemmels, Juergen; Tokei, Zsolt; Baklanov, Mikhaïl (2014)