Browsing by author "Van Steenbergen, Jan"
Now showing items 1-20 of 36
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A detailed study of semiconductor wafer drying
Fyen, Wim; Holsteyns, Frank; Bearda, Twan; Arnauts, Sophia; Van Steenbergen, Jan; Doumen, Geert; Kenis, Karine; Mertens, Paul (2004) -
A study of the influence of typical wet chemical treatments on the germanium wafer surface
Onsia, Bart; Conard, Thierry; De Gendt, Stefan; Heyns, Marc; Hoflijk, Ilse; Mertens, Paul; Meuris, Peter; Raskin, G.; Sioncke, Sonja; Teerlinck, I; Theuwis, A.; Van Steenbergen, Jan; Vinckier, Chris (2004) -
A study of the influence of typical wet chemical treatments on the germanium wafer surface
Onsia, Bart; Conard, Thierry; De Gendt, Stefan; Heyns, Marc; Hoflijk, Ilse; Mertens, Paul; Meuris, Peter; Raskin, G.; Sioncke, Sonja; Teerlinck, Ivo; Theuwis, A.; Van Steenbergen, Jan; Vinckier, Chris (2005) -
ALD High-k growth on Ge substrates
Delabie, Annelies; Brijs, Bert; Caymax, Matty; Chiarella, Thomas; Conard, Thierry; Puurunen, Riikka; Richard, Olivier; Van Steenbergen, Jan; Teerlinck, Ivo; Zhao, Chao; Heyns, Marc; Meuris, Marc (2003) -
Characterization of atomic-beam deposited GeO1-xNx/HfO2 stacks on Ge
Houssa, Michel; Conard, Thierry; Van Steenbergen, Jan; Mavrou, G.; Panayiotatos, Y.; dimoulas, A.; Meuris, Marc; Caymax, Matty; Heyns, Marc (2005) -
Deposition of HfO2 on germanium and the impact of surface pretreatments
Van Elshocht, Sven; Brijs, Bert; Caymax, Matty; Conard, Thierry; Chiarella, Thomas; De Gendt, Stefan; De Jaeger, Brice; Kubicek, Stefan; Meuris, Marc; Onsia, Bart; Richard, Olivier; Teerlinck, Ivo; Van Steenbergen, Jan; Zhao, Chao; Heyns, Marc (2004) -
Epitaxy solutions for Ge MOS technology
Leys, Frederik; Bonzom, Renaud; Loo, Roger; Richard, Olivier; De Jaeger, Brice; Van Steenbergen, Jan; Dessein, Kristof; Conard, Thierry; Rip, Jens; Bender, Hugo; Vandervorst, Wilfried; Meuris, Marc; Caymax, Matty (2005) -
Etch rate study of germanium, GaAs, and InGaAs: a challenge in semiconductor processing.
Sioncke, Sonja; Brunco, David; Meuris, Marc; Van Steenbergen, Jan; Vrancken, Evi; Heyns, Marc (2008) -
Etch rates of Ge, GaAs and InGaAs in acids, bases and peroxide based mixtures
Sioncke, Sonja; Brunco, David; Meuris, Marc; Uwamahoro, Olivier; Van Steenbergen, Jan; Vrancken, Evi; Heyns, Marc (2008) -
Etching Ge, GaAs and InGaAs: A challenge in semiconductor processing
Sioncke, Sonja; Brunco, David; Meuris, Marc; Van Steenbergen, Jan; Vrancken, Evi; Heyns, Marc (2008) -
Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference
De Jaeger, Brice; Kaczer, Ben; Zimmerman, Paul; Opsomer, Karl; Winderickx, Gillis; Van Steenbergen, Jan; Van Moorhem, Els; Terzieva, Valentina; Bonzom, Renaud; Leys, Frederik; Arena, Chantal; Bauer, Matthias; Werkhoven, Chris; Caymax, Matty; Meuris, Marc; Heyns, Marc (2007-01) -
Ge deep sub-micron pFETs with etched TaN metal gate on a High-K dielectric, fabricated in a 200mm silicon prototyping line
De Jaeger, Brice; Houssa, Michel; Satta, Alessandra; Kubicek, Stefan; Verheyen, Peter; Van Steenbergen, Jan; Croon, Jeroen; Kaczer, Ben; Van Elshocht, Sven; Delabie, Annelies; Kunnen, Eddy; Sleeckx, Erik; Teerlinck, Ivo; Lindsay, Richard; Schram, Tom; Chiarella, Thomas; Degraeve, Robin; Conard, Thierry; Poortmans, Jef; Winderickx, Gillis; Boullart, Werner; Schaekers, Marc; Mertens, Paul; Caymax, Matty; Vandervorst, Wilfried; Van Moorhem, Els; Biesemans, Serge; De Meyer, Kristin; Ragnarsson, Lars-Ake; Lee, S.; Kota, G.; Raskin, G.; Mijlemans, P.; Autran, J.L.; Afanas'ev, V.; Stesmans, A.; Meuris, Marc; Heyns, Marc (2004) -
Germanium deep-sub micron PMOS transistors with etched TaN metal gate on a high-k dielectric, fabricated in a 200mm prototyping line
Meuris, Marc; De Jaeger, Brice; Kubicek, Stefan; Verheyen, Peter; Van Steenbergen, Jan; Lujan, Guilherme; Kunnen, Eddy; Sleeckx, Erik; Teerlinck, I; Van Elshocht, Sven; Delabie, Annelies; Lindsay, Richard; Satta, Alessandra; Schram, Tom; Chiarella, Thomas; Degraeve, Robin; Richard, Olivier; Conard, Thierry; Poortmans, Jef; Winderickx, Gillis; Houssa, Michel; Boullart, Werner; Schaekers, Marc; Mertens, Paul; Caymax, Matty; De Gendt, Stefan; Vandervorst, Wilfried; Van Moorhem, Els; Biesemans, Serge; De Meyer, Kristin; Ragnarsson, Lars-Ake; Lee, S.; Kota, G.; Raskin, G.; Mijlemans, P.; Afanasiev, Valeri; Stesmans, Andre; Heyns, Marc (2004) -
Germanium deep-submicron p-FET and n-FET devices, fabricated on germanium-on-insulator substrates
Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Bonzom, Renaud; Caymax, Matty; Houssa, Michel; Kaczer, Ben; Leys, Frederik; Martens, Koen; Opsomer, Karl; Pourghaderi, Mohammad Ali; Satta, Alessandra; Simoen, Eddy; Terzieva, Valentina; Van Moorhem, Els; Winderickx, Gillis; Loo, Roger; Clarysse, Trudo; Conard, Thierry; Delabie, Annelies; Hellin, David; Janssens, Tom; Onsia, Bart; Sioncke, Sonja; Mertens, Paul; Snow, Jim; Van Elshocht, Sven; Vandervorst, Wilfried; Zimmerman, Paul; Brunco, David; Raskin, G.; Letertre, F.; Akatsu, T.; Billon, T.; Heyns, Marc (2007) -
Germanium deep-submicron pFET and nFET devices with etched TaN metal gate and high-k dielectric, fabricated on germanium-on-insulator substrates
Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Letertre, Fabrice; Raskin, Geoffroy; Billon, Thierry; Heyns, Marc (2005) -
Germanium FETs and capacitors with rare earth CeO2/HfO2 gates
dimoulas, A.; Panayiotatos, Y.; Sotiropoulos, A.; Tsipas, P.; Brunco, David; Nicholas, Gareth; Van Steenbergen, Jan; Bellenger, Florence; Houssa, Michel; Caymax, Matty; Meuris, Marc (2007) -
Germanium MOSFET devices: advances in materials understanding, process development, and electrical performance
Brunco, David; De Jaeger, Brice; Eneman, Geert; Mitard, Jerome; Hellings, Geert; Satta, Alessandra; Terzieva, Valentina; Souriau, Laurent; Leys, Frederik; Pourtois, Geoffrey; Houssa, Michel; Winderickx, Gillis; Vrancken, Evi; Sioncke, Sonja; Opsomer, Karl; Nicholas, Gareth; Caymax, Matty; Stesmans, Andre; Van Steenbergen, Jan; Mertens, Paul; Meuris, Marc; Heyns, Marc (2008) -
Germanium MOSFETs with CeO2/HfO2/TiN gate stacks
Nicholas, Gareth; Brunco, David; dimoulas, A.; Van Steenbergen, Jan; Bellenger, Florence; Houssa, Michel; Caymax, Matty; Meuris, Marc; Panayiotatos, Y.; Sotiropoulos, A. (2007) -
Growth kinetics and relaxation mechanism of very thin epitaxial Si films on (100) germanium
Bonzom, Renaud; Leys, Frederik; Loo, Roger; Richard, Olivier; Vanhaeren, Danielle; Rip, Jens; Van Steenbergen, Jan; De Jaeger, Brice; Bender, Hugo; Vandervorst, Wilfried; Caymax, Matty; Meuris, Marc (2005) -
Lifetime and leakage current considerations in metal-doped germanium
Simoen, Eddy; Claeys, Cor; Sioncke, Sonja; Van Steenbergen, Jan; Meuris, Marc; Forment, S.; Vanhellemont, Jan; Clauws, P.; Theuwis, A. (2007)