Browsing by author "Rakhimova, Tatyana"
Now showing items 1-12 of 12
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1-D model of RF CCP discharge in Ar/CF4/CF3I gas mixtures
Proshina, Olga; Rakhimova, Tatyana; Baklanov, Mikhaïl (2013) -
Area-selective Ru ALD by amorphous carbon modification using H plasma: from atomistic modeling to full wafer process integration
Zyulkov, Ivan; Voronina, Ekaterina; Krishtab, Mikhail; Voloshin, Dmitry; Chan, BT; Mankelevich, Yuri; Rakhimova, Tatyana; Armini, Silvia; De Gendt, Stefan (2020) -
Comparison between Vacuum Ultra-Violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching
Zotovich, Alexey; El Otell, Ziad; de Marneffe, Jean-Francois; Proshina, Olga; Lopaev, Dimitri; Rakhimova, Tatyana; Baklanov, Mikhaïl (2016) -
Dry cleaning and doping of MX2 for contact engineering
Marinov, Daniil; Ludwig, Jonathan; Chiappe, Daniele; Voronina, Ekaterina; Rakhimova, Tatyana; de Marneffe, Jean-Francois; Asselberghs, Inge; De Gendt, Stefan (2018) -
Dry cleaning of WS2 using reducing downstream plasma
de Marneffe, Jean-Francois; Marinov, Daniil; Zhang, Jianran; With, Patrick; Smets, Quentin; Arutchelvan, Goutham; Voronina, E.; Mankelevitch, Yuri; Rakhimova, Tatyana; Bal, Kristof; Asselberghs, Inge; De Gendt, Stefan (2019) -
Effect of energetic ions on plasma damage of SiCOH low-k material
Kunnen, Eddy; Baklanov, Mikhaïl; Franquet, Alexis; Shamiryan, Denis; Rakhimova, Tatyana; Urbanowicz, Adam; Struyf, Herbert; Boullart, Werner (2010) -
Effect of top power on a low-k film during oxygen strip in a TCP chamber
Kunnen, Eddy; Rakhimova, Tatyana; Shamiryan, Denis; Struyf, Herbert; Boullart, Werner; Baklanov, Mikhaïl (2010) -
Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures
Rakhimova, Tatyana; Braginsky, OLEG; Klopovskiy, Konstantin; Kovalev, Alexander; Lopaev, Dmitry; Proshina, Olga; Rakhimov, Alexander; Shamiryan, Denis; Vasilieva, Anna; Voloshin, Dmitry (2009) -
Mechanisms of hydrogen atom interactions with MoS2 monolayer
Voronina, Ekaterina; Mankelevitch, Yuri; Novikov, Lev; Rakhimova, Tatyana; Marinov, Daniil; de Marneffe, Jean-Francois (2020) -
Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers
Marinov, Daniil; de Marneffe, Jean-Francois; Smets, Quentin; Arutchelvan, Goutham; Bal, Kristof M.; Voronina, Ekaterina; Rakhimova, Tatyana; Mankelevich, Yuri; El Kazzi, Salim; Nalin Mehta, Ankit; Wyndaele, Pieter-Jan; Heyne, Markus Hartmut; Zhang, Jianran; With, Patrick C.; Banerjee, Sreetama; Neyts, Erik C.; Asselberghs, Inge; Lin, Dennis; De Gendt, Stefan (2021) -
Recombination of O and H atoms on the surface of nanoporous dielectrics
Rakhimova, Tatyana; Braginsky, Oleg; Kovalev, Alexander; Lopaev, Dmutry; Mankelevich, Yuri; Malykhin, E; Rakhimov, Alexander; Vasilieva, Anna; Zyryanov, Sergei; Baklanov, Mikhaïl (2009) -
Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes
Zyulkov, Ivan; Voronina, Ekaterina; Chan, BT; Rakhimova, Tatyana; De Gendt, Stefan; Armini, Silvia (2019)