Browsing by author "Cao, Yi"
Now showing items 21-35 of 35
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Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces
Rincon Delgadillo, Paulina; Gronheid, Roel; Lin, Guanyang; Cao, Yi; Romo, Ainhoa; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2014) -
Line Edge Roughness on Directed Self Assembly: Impact of process conditions
MKuppuswamy, Vijaya Kumar; Williamson, Lance; Pathangi Sriraman, Hari; Seidel, Robert; Gronheid, Roel; Nealey, Paul; Lin, Guanyang; Cao, Yi (2015) -
Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow
Singh, Arjun; Nam, Jaewoo; Lee, Jongsu; Chan, BT; Wu, Hengpeng; Yin, Jian; Cao, Yi; Gronheid, Roel (2016) -
Material influences on process performance in chemo-epitaxy directed self-assembly integration
Gronheid, Roel; Van Look, Lieve; Rincon Delgadillo, Paulina; Pollentier, Ivan; Cao, Yi; Lin, Guanyang; Nealey, Paul (2013) -
N7 Logic via patterning using templated DSA - implementation aspects
Bekaert, Joost; Doise, Jan; Chan, BT; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Her, YoungJun; Cao, Yi (2015) -
N7 logic via patterning using templated DSA: implementation aspects
Bekaert, Joost; Doise, Jan; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Fenger, Germain; Her, YoungJun; Cao, Yi (2015) -
Optimized pore stuffing for enhanced compatibility with interconnect integration flow
de Marneffe, Jean-Francois; Zhang, Liping; Rutigliani, Vito; Noya, G.; Cao, Yi; Lesniewska, Alicja; Varela Pedreira, Olalla; Croes, Kristof; Gillot, Christophe; Tokei, Zsolt; Boemmels, Juergen; Baklanov, Mikhaïl (2015) -
Origin of defect in directed self-assembly of block copolymers using feature multiplication
Rincon Delgadillo, Paulina; Harukawa, Ryoto; Parnell, Doni; Lee, Yu-tsung; Chan, BT; Lin, Guanyang; Cao, Yi; Nagaswami, Venkat; Somervell, Mark; Nafus, Kathleen; Gronheid, Roel; Nealey, Paul (2013) -
Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns
Singh, Arjun; Chan, BT; Parnell, Doni; Wu, Hengpeng; Lin, Jian; Cao, Yi; Gronheid, Roel (2015) -
PMMA removal in diblock copolymer P(S-b-MMA) self-assembly process
Loucif Seiad, Mohamed; Gronheid, Roel; Singh, Arjun; MKuppuswamy, Vijaya Kumar; Cao, Yi; Ferhat, Marhoun (2014) -
Process optimization of templated DSA flows
Gronheid, Roel; Bekaert, Joost; MKuppuswamy, Vijaya Kumar; Vandenbroeck, Nadia; Doise, Jan; Cao, Yi; Lin, Guanyang; Sayan, Safak; Parnell, Doni; Somervell, Mark (2014) -
Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration
Rincon Delgadillo, Paulina; Gronheid, Roel; Lin, Guanyan; Cao, Yi; Romo Negreira, Ainhoa; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2013) -
Readying directed self-assembly for patterning in semiconductor manufacturing
Gronheid, Roel; Chan, BT; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; MKuppuswamy, Vijaya Kumar; Doise, Jan; Bekaert, Joost; Rincon Delgadillo, Paulina; Nealey, Paul; Cao, Yi; Her, YoungJun; Sayan, Safak; Parnell, Doni; Romo Negreira, Ainhoa; Somervell, Mark (2014) -
Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
Boeckx, Carolien; Doise, Jan; Fenger, Germain; Cao, Yi; Gronheid, Roel; De Gendt, Stefan (2015) -
Tuning the strength of chemical patterns for directed self-assembly of block copolymers
Williamson, Lance; Lin, Guanyang; Cao, Yi; Gronheid, Roel; Nealey, Paul (2014)