Browsing by author "Kenis, Karine"
Now showing items 21-40 of 115
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Correlation between grown-in silicon substrate defects and silicon gate oxide breakdown characteristics
Vanhellemont, Jan; Kissinger, G.; Kenis, Karine; Depas, Michel; Gräf, D.; Lambert, U.; Wagner, P. (1996) -
Correlation between haze of the wafer and particle-count on wafers: a new approach to monitor nano-sized particles
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Lux, Marcel; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Mertens, Paul; Heyns, Marc; Vinckier, Chris (2002) -
Critical processes for ultra-thin gate oxide integrity
Depas, Michel; Heyns, Marc; Nigam, Tanya; Kenis, Karine; Sprey, Hessel; Wilhelm, H.; Wilhelm, Rudi; Crossley, A.; Sofield, C. J.; Gräf, D. (1996) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Vos, Rita; Mertens, Paul (2009) -
Damage cluster analysis of patterned wafers during solvent spray cleaning
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Mertens, Paul; Vos, Rita (2009) -
Damage clustering and damage-size distributions after megasonic cleaning
De Marco, Cinzia; Wostyn, Kurt; Bearda, Twan; Sano, Ken-Ichi; Kenis, Karine; Janssens, Tom; Leunissen, Peter; Eitoku, Atsuro; Mertens, Paul (2007) -
Damage review on gate stack test structures after high-velocity aerosol cleaning
Wostyn, Kurt; Sano, Ken-Ichi; De Marco, Cinzia; Kenis, Karine; Van Den Heuvel, Dieter; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul; Eitoku, Atsuro (2007) -
Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technology
Van Wichelen, Koen; Ong, Patrick; Moussa, Alain; Radisic, Dunja; Devriendt, Katia; Halder, Sandip; Kenis, Karine; Lee, Willie; Vandevelde, Bart; Soonekindt, Christophe; Shahar, Abdul Hadi; Smet, Tom; Van Huylenbroeck, Stefaan; Decoutere, Stefaan; Seacrist, Mike; Ries, Mike; Drobny, Vladimir; Wise, Rick (2009) -
Differential interference contrast microscopy of defects in As-grown and annealed Si wafers
Trauwaert, Marie-Astrid; Vanhellemont, Jan; Lambert, U.; Gräf, D.; Kenis, Karine; Mertens, Paul; Heyns, Marc (1997) -
Distribution of metal contamination in SiO2/Si systems
Mertens, Paul; Jacobs, Leon; Goris, Karen; Kenis, Karine; Loewenstein, Lee; Teerlinck, Ivo; Bearda, Twan; De Gendt, Stefan; Vos, Rita; Heyns, Marc (1999) -
Drying of hydrophobic surfaces - one of the keys for future technologies
Kraus, Harald; Snow, Jim; Mertens, Paul; Holsteyns, Frank; Kenis, Karine; Kovacs, F.; Fichtl, S. (2004) -
Effect of different chlorine sources during gate oxidation
Vermeire, Bert; Mertens, Paul; Mac Geary, M. J.; Kenis, Karine; Heyns, Marc; Schaekers, Marc; Lubbers, A. (1994) -
Effect of Fe contamination on quality of poly silicon gate structures
Mertens, Paul; De Gendt, Stefan; Depas, Michel; Kenis, Karine; Opdebeeck, Ann; Snee, Peter; Gräf, D.; Brown, G.; Heyns, Marc (1996) -
Effect of metal contamination and improved cleaning strategies
Mertens, Paul; Bearda, Twan; Loewenstein, Lee; Martin, Andreas; Hub, Walter; Kolbesen, Bernd; Teerlinck, Ivo; Vos, Rita; Baeyens, Martien; De Gendt, Stefan; Kenis, Karine; Heyns, Marc (1999) -
Effect of metal contamination and improved cleaning strategies
Mertens, Paul; Bearda, Twan; Loewenstein, Lee; Martin, A.R.; Hub, W.; Kolbesen, B. O.; Teerlinck, Ivo; Vos, Rita; Baeyens, Martien; De Gendt, Stefan; Kenis, Karine; Heyns, Marc (1999) -
Efficient cleaning of low-k materials using single-wafer cleaning solution: a compatibility study and electrical characterization
Le, Quoc Toan; Van Olmen, Jan; Vanderheyden, Rudi; Kesters, Els; Kenis, Karine; Conard, Thierry; Boullart, Werner; Baklanov, Mikhaïl; Vanhaelemeersch, Serge (2005) -
Electrical characteristics of P-type bulk Si fin field-effect transistor using solid-source doping with 1-nm phosphosilicate glass
Kikuchi, Yoshiaki; Chiarella, Thomas; De Roest, David; Blanquart, Timothee; De Keersgieter, An; Kenis, Karine; Peter, Antony; Ong, Patrick; Van Besien, Els; Tao, Zheng; Kim, Min-Soo; Kubicek, Stefan; Chew, Soon Aik; Schram, Tom; Demuynck, Steven; Mocuta, Anda; Mocuta, Dan; Horiguchi, Naoto (2016) -
Enhanced light coupling into nanostructured arrays as an enabler for advanced Raman-based metrology
Nuytten, Thomas; Bogdanowicz, Janusz; Gawlik, Andrzej; Oniki, Yusuke; Kenis, Karine; Muraki, Yusuke; Charley, Anne-Laure; Fleischmann, Claudia; De Wolf, Ingrid; van der Heide, Paul (2021) -
Estimation of the adhesion strength of particles/residues and gate structures for calculating the damage threshold of patterned silicon wafers during physical force assisted cleans
Halder, Sandip; Kim, Tae-Gon; Vos, Rita; Kenis, Karine; Claes, Martine; De Gendt, Stefan; Mertens, Paul (2010) -
Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygen
Wostyn, Kurt; Kenis, Karine; Rondas, Dirk; Loo, Roger; Hikavyy, Andriy; Douhard, Bastien; Mertens, Paul; Holsteyns, Frank; De Gendt, Stefan; Simpson, Gavin; Bast, Gerhard; Swaminathan, Karthik (2014)