Browsing by author "Onsia, Bart"
Now showing items 21-40 of 45
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High-k materials for advanced gate stack dielectrics: a comparison of ALCVD and MOCVD as deposition technologies
Caymax, Matty; Bender, Hugo; Brijs, Bert; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Onsia, Bart; Ragnarsson, Lars-Ake; Richard, Olivier; Vandervorst, Wilfried; Van Elshocht, Sven; Zhao, Chao; Maes, J.W.; Daté, L.; Pique, D.; Young, E.; Tsai, W.; Shimamoto, Y. (2003) -
Integration of high-k gate dielectrics - wet etch, cleaning and surface conditioning
De Gendt, Stefan; Beckx, Stephan; Caymax, Matty; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Kraus, Harald; Onsia, Bart; Paraschiv, Vasile; Puurunen, Riikka; Röhr, Erika; Snow, Jim; Tsai, Wilman; Van Doorne, Patrick; Van Elshocht, Sven; Vertommen, Johan; Witters, Thomas; Heyns, Marc (2003) -
Integration of high-K gate dielectrics - wet etch, cleaning and surface conditioning
De Gendt, Stefan; Beckx, Stephan; Caymax, Matty; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Hellin, David; Kraus, Harald; Onsia, Bart; Paraschiv, Vasile; Puurunen, Riikka; Rohr, Erika; Snow, Jim; Tsai, Wilman; Van Doorne, Patrick; Van Elshocht, Sven; Vertommen, Johan; Witters, Thomas; Heyns, Marc (2004) -
Introduction of high-k materials into wet processing, analysis and behavior
Onsia, Bart; Hellin, David; Claes, Martine; Maes, A.; De Gendt, Stefan; Heyns, Marc (2003) -
Low Vt Ni-FUSI CMOS technology using a DyO cap layer with either single or dual Ni-phases
Yu, HongYu; Chang, Shou-Zen; Veloso, Anabela; Lauwers, Anne; Adelmann, Christoph; Onsia, Bart; Van Elshocht, Sven; Singanamalla, Raghunath; Demand, Marc; Vos, Rita; Kauerauf, Thomas; Brus, Stephan; Shi, Xiaoping; Kubicek, Stefan; Vrancken, Christa; Mitsuhashi, Riichirou; Lehnen, Peer; Kittl, Jorge; Niwa, M.; Yin, K.M.; Hoffmann, Thomas; De Gendt, Stefan; Jurczak, Gosia; Absil, Philippe; Biesemans, Serge (2007) -
Metal deposition on Ge surfaces
Sioncke, Sonja; Onsia, Bart; Struys, K.; Rip, Jens; Vos, Rita; Meuris, Marc; Mertens, Paul; Theuwis, A. (2005) -
Metal gate technology using a Dy2O3 dielectric cap approach for multiple-VT in NMOS FinFETs
Ferain, Isabelle; Son, Nak Jin; Witters, Liesbeth; Collaert, Nadine; Onsia, Bart; Kaczer, Ben; Kauerauf, Thomas; Adelmann, Christoph; Richard, Olivier; Favia, Paola; Bender, Hugo; Vos, Rita; Van Elshocht, Sven; Lehnen, Peer; San Tamer, Kemal; De Meyer, Kristin; Biesemans, Serge; Jurczak, Gosia (2007) -
On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; De Smedt, Frank; Delabie, Annelies; Gottschalk, C.; Green, M.; Heyns, Marc; Lin, S.; Mertens, Paul; Tsai, Wilman; Vinckier, Chris (2004) -
On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; De Smedt, Frank; Delabie, Annelies; Gottschalk, C.; Green, M.; Heyns, Marc; Lin, S.; Mertens, Paul; Tsai, Wilman; Vinckier, Chris (2005) -
Oppervlaktebehandelingstechnologie, de sleutel tot efficiente zonnecellen
Onsia, Bart; Bruynseraede, Christophe (2010) -
Performance comparison of sub 1nm sputtered TiN/HfO2 nMOS and pMOSFETs
Tsai, Wilman; Ragnarsson, Lars-Ake; Pantisano, Luigi; Chen, P.; Onsia, Bart; Schram, Tom; Cartier, E.; Kerber, Andreas; Young, Edward; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2003-12) -
Physical characterization of HfO2 deposited on Ge substrates by MOCVD
Van Elshocht, Sven; Brijs, Bert; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Kubicek, Stefan; Meuris, Marc; Onsia, Bart; Richard, Olivier; Teerlinck, Ivo; Van Steenbergen, Jan; Zhao, Chao; Heyns, Marc (2003) -
Physical characterization of HfO2 deposited on Ge substrates by MOCVD
Van Elshocht, Sven; Brijs, Bert; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Kubicek, Stefan; Meuris, Marc; Onsia, Bart; Richard, Olivier; Teerlinck, Ivo; Van Steenbergen, Jan; Zhao, Chao; Heyns, Marc (2004) -
Single chemistry cleaning solution for advanced wafer cleaning
Vos, Rita; Doll, O.; Fester, A.; Kolbesen, B. O.; Lux, Marcel; Kenis, Karine; Onsia, Bart; De Gendt, Stefan; Schellkes, E.; Hatcher, Z.; Mertens, Paul; Heyns, Marc (2001) -
State-of-the art cleaning in semiconductor manufacturing
Mertens, Paul; Arnauts, Sophia; Bearda, Twan; Eitoku, Atsuro; Fyen, Wim; Hellin, David; Holsteyns, Frank; Kesters, Els; Kraus, Harald; Lee, Kuntack; Onsia, Bart; Rip, Jens; Schmidt, H.; Snow, Jim; Teerlinck, Ivo; Vereecke, Guy; Vos, Rita; Xu, Kaidong; Heyns, Marc (2003) -
Strain enhanced FUSI/HfSiON technology with optimized CMOS process window
Veloso, Anabela; Verheyen, Peter; Vos, Rita; Brus, Stephan; Ito, Satoru; Mitsuhashi, Riichirou; Paraschiv, Vasile; Shi, Xiaoping; Onsia, Bart; Arnauts, Sophia; Loo, Roger; Lauwers, Anne; Conard, Thierry; de Marneffe, Jean-Francois; Goossens, Danny; Baute, Debbie; Locorotondo, Sabrina; Chiarella, Thomas; Kerner, Christoph; Vrancken, Christa; Mertens, Sofie; O'Sullivan, Barry; Yu, HongYu; Chang, Shou-Zen; Niwa, Masaaki; Kittl, Jorge; Absil, Philippe; Jurczak, Gosia; Hoffmann, Thomas Y.; Biesemans, Serge (2007) -
Study on the metal deposition behavior on Ge surfaces
Sioncke, Sonja; Onsia, Bart; Struys, K.; Meuris, Marc; Mertens, Paul; Theuwis, A. (2005) -
Surface cleaning and preparation related aspects of the germanium surface chemistry
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Mertens, Paul; Meuris, Marc; Sioncke, Sonja; Theuwis, A.; Van Elshocht, Sven; Van Steenbergen, Jan; Vinckier, Chris (2004) -
Surface preparation techniques for high-k deposition on Ge substrates
Van Elshocht, Sven; Delabie, Annelies; Brijs, Bert; Caymax, Matty; Conard, Thierry; Onsia, Bart; Puurunen, Riikka; Richard, Olivier; Van Steenbergen, Jan; Zhao, Chao; Meuris, Marc; Heyns, Marc (2004) -
Surface preparation techniques for high-k deposition on Ge substrates
Van Elshocht, Sven; Delabie, Annelies; Brijs, Bert; Caymax, Matty; Conard, Thierry; Onsia, Bart; Puurunen, Riikka; Richard, Olivier; Van Steenbergen, Jan; Zhao, Chao; Meuris, Marc; Heyns, Marc (2005)