Browsing by author "Vanhaelemeersch, Serge"
Now showing items 21-40 of 121
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Chemical and structural analysis of etching residue layers in semiconductor devices with energy filtering transmission electron microscopy
Hens, S.; Van Landuyt, J.; Bender, Hugo; Boullart, Werner; Vanhaelemeersch, Serge (2001) -
Chemical and structural analysis of etching rsidue layers in semiconductor devices with energy filtering transmission electron spectroscopy
Hens, S.; Van Landuyt, J.; Bender, Hugo; Boullaert, W.; Vanhaelemeersch, Serge (2000) -
Comparative study of PECVD SiOCH low-k films obtained at different deposition conditions
Shamiryan, Denis; Weidner, K.; Gray, W.D.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2002) -
Comparative study of SiOCH low-k films with varied porosity interacting with etching and cleaning plasma
Shamiryan, Denis; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2002) -
Composite nanoparticles for defectivity reduction during CMP
Armini, Silvia; Terzieva, Valentina; Vanhaelemeersch, Serge; Maex, Karen (2004) -
Controllable change of porosity of 3-methylsilane low-k dielectric film
Shamiryan, Denis; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2001) -
Controllable change of porosity of SiOCH low-k dielectric film
Shamiryan, Denis; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2001) -
Copper-SiLK* semiconductor dielectric interface: XPS surface analysis and RF plasma treatment of the resin
Lemaire, J. J.; Rajagopal, A.; Gregoire, C.; Pireaux, J. J.; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen; Waeterloos, Joost (1999) -
Critical issues in the integration of Copper and low-k dielectrics
Donaton, R. A.; Coenegrachts, Bart; Maex, Karen; Struyf, Herbert; Vanhaelemeersch, Serge; Beyer, Gerald; Richard, Emmanuel; Vervoort, Iwan; Fyen, Wim; Grillaert, Joost; van der Groen, Sonja; Stucchi, Michele; De Roest, David (1999) -
Cu/LKD-5109 damascene integration demonstration using FF-02 low-k spin-on hard-mask and embedded etch-stop
Kokubo, Terukazu; Das, Arabinda; Furukawa, Yukiko; Vos, Ingrid; Iacopi, Francesca; Struyf, Herbert; Van Aelst, Joke; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Bender, Hugo; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Van Hove, Marleen; Vanhaelemeersch, Serge; Peterson, William; Shiota, A.; Maex, Karen (2002) -
Dry etch and clean aspects for advanced integration of low k dielectrics
Vanhaelemeersch, Serge; Struyf, Herbert; Alaerts, Carine; Baklanov, Mikhaïl; Lepage, Muriel (2000) -
Dry etch processing of Multiple Gate FETs with metal gate electrode
Demand, Marc; Paraschiv, Vasile; Shamiryan, Denis; Beckx, Stephan; Boullart, Werner; Vanhaelemeersch, Serge (2005) -
Dry etching of low-K materials
Vanhaelemeersch, Serge; Alaerts, Carine; Baklanov, Mikhaïl; Struyf, Herbert (1999) -
Dual damascene patterning for full spin-on stack of porous low-K material
Furukawa, Yukiko; Kokubo, Terukazu; Struyf, Herbert; Maenhoudt, Mireille; Vanhaelemeersch, Serge; Gravesteijn, Dirk (2002) -
Effect of HF solution on the porous structure of low-k SICOH film
Shamiryan, Denis; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen (2000) -
Effects of oxygen and fluorine on the dry etch characteristics of organic low-k dielectrics
Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Bender, Hugo; Maex, Karen (1999) -
Efficient cleaning of low-k materials using single-wafer cleaning solution: a compatibility study and electrical characterization
Le, Quoc Toan; Van Olmen, Jan; Vanderheyden, Rudi; Kesters, Els; Kenis, Karine; Conard, Thierry; Boullart, Werner; Baklanov, Mikhaïl; Vanhaelemeersch, Serge (2005) -
EFTEM study of plasma etched low-k Si-O-C dielectrics
Hens, S.; Bender, Hugo; Donaton, R. A.; Maex, Karen; Vanhaelemeersch, Serge; Van Landuyt, J. (2001) -
Electrical assessment of gate oxide punchthrough in advanced polysilicon high density plasma etch.
Van den Bosch, Geert; Beckx, Stephan; Dupas, Luc; Vanhaelemeersch, Serge; Deferm, Ludo (1999) -
Enabling backside processing for perforated microfluidic devices
Visker, Jakob; Han, Yang; Visker, Evert; Dang Thi Thuy, Chi; Gocyla, Mateusz; Humbert, Aurelie; Ackaert, Jan; Peng, Lan; Vanhaelemeersch, Serge (2023)