Browsing by author "Wilson, Chris"
Now showing items 41-60 of 131
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Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
Zhao, Larry; Lofrano, Melina; Croes, Kristof; Van Besien, Els; Tokei, Zsolt; Wilson, Chris; Degraeve, Robin; Kauerauf, Thomas; Beyer, Gerald; Claeys, Cor (2011) -
Extending the Cu metallization and alternatives
van der Veen, Marleen; Jourdan, Nicolas; Vega Gonzalez, Victor; Vandersmissen, Kevin; Wilson, Chris; Varela Pedreira, Olalla; Boemmels, Juergen; Struyf, Herbert; Tokei, Zsolt (2017) -
Fabrication of magnetic tunnel junctions connected through a continuous free layer to enable spin logic devices
Wan, Danny; Manfrini, Mauricio; Vaysset, Adrien; Souriau, Laurent; Wouters, Lennaert; Thiam, Arame; Raymenants, Eline; Sayan, Safak; Jussot, Julien; Swerts, Johan; Couet, Sebastien; Rassoul, Nouredine; Babaei Gavan, Khashayar; Paredis, Kristof; Huyghebaert, Cedric; Ercken, Monique; Wilson, Chris; Mocuta, Dan; Radu, Iuliana (2018) -
Fabrication of test structures to monitor stress in SU-8 films used for MEMS applications
Smith, S.; Brockie, N. L.; Murray, J.; Wilson, Chris; Horsfall, A. B.; Terry, J. G.; Stevenson, J. T. M.; Mount, A.; Walton, A. J. (2010) -
Feasibility study of fully self aligned vias for 5nm node BEOL
Murdoch, Gayle; Boemmels, Juergen; Wilson, Chris; Babaei Gavan, Khashayar; Le, Quoc Toan; Tokei, Zsolt; Clark, William (2017) -
Full reliability study of advanced metallization options for 30 nm ½pitch interconnects
Croes, Kristof; Demuynck, Steven; Siew, Yong Kong; Pantouvaki, Marianna; Wilson, Chris; Heylen, Nancy; Beyer, Gerald; Tokei, Zsolt (2013) -
High-aspect-ratio ruthenium lnes for buried power rail
Gupta, Anshul; Kundu, Shreya; Teugels, Lieve; Boemmels, Juergen; Adelmann, Christoph; Heylen, Nancy; Jamieson, Geraldine; Varela Pedreira, Olalla; Ciofi, Ivan; Chava, Bharani; Wilson, Chris; Tokei, Zsolt (2018) -
High-throughput magnetic metrology for spintronic CMOS integration
Yan, Jingdong; Manfrini, Mauricio; Radisic, Dunja; Ciubotaru, Florin; Wilson, Chris; Radu, Iuliana; Thean, Aaron (2016) -
Highly scaled ruthenium interconnects
Dutta, Shibesh; Kundu, Shreya; Gupta, Anshul; Jamieson, Geraldine; Gomez Granados, Juan Fernando; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Adelmann, Christoph (2017) -
Hybrid Metallization with Cu in sub 30nm Interconnects
van der Veen, Marleen; Soethoudt, Job; Delabie, Annelies; Varela Pedreira, Olalla; Vega Gonzalez, Victor; Lariviere, Stephane; Teugels, Lieve; Jourdan, Nicolas; Decoster, Stefan; Struyf, Herbert; Wilson, Chris; Croes, Kristof; Tokei, Zsolt (2020) -
IGZO integration scheme for enabling IGZO nFETs
Kljucar, Luka; Mitard, Jerome; Rassoul, Nouredine; Dekkers, Harold; Steudel, Soeren; del Agua Borniquel, Jose Ignacio; De Wachter, Bart; Teugels, Lieve; Tsvetanova, Diana; Devriendt, Katia; Grisin, Ilja; Boccardi, Guillaume; Hody, Hubert; Nag, Manoj; Di Piazza, Luca; Wilson, Chris; Kar, Gouri Sankar; Tokei, Zsolt; Ramalingam, J.; Cao, Yong; Diehl, Daniel L. (2019) -
Impact of litho-patterning variations on the electrical performance and variability of advanced interconnects
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Kocaay, Deniz; Contino, Antonino; Croes, Kristof; Saad, Yves; Gao, Weimin; Moroz, Victor; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2018) -
Impact of wire geometry on interconnect RC and circuit delay
Ciofi, Ivan; Contino, Antonino; Roussel, Philippe; Baert, Rogier; Vega Gonzalez, Victor; Croes, Kristof; Badaroglu, Mustafa; Wilson, Chris; Raghavan, Praveen; Mercha, Abdelkarim; Verkest, Diederik; Groeseneken, Guido; Mocuta, Dan; Thean, Aaron (2016) -
Improved methodology for integrated k-value extractions
Ciofi, Ivan; Borrello, Gianpaolo; Madia, Oreste; Wilson, Chris; Vereecke, Bart; Beyer, Gerald (2012) -
In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation
Wilson, Chris; Volders, Henny; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, Alton B.; O'Neill, Anthony G.; Tokei, Zsolt (2010) -
In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects
Wilson, Chris; Volders, Henny; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A.B.; O'Neill, A.G. (2009) -
In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation
Wilson, Chris; Volders, Henny; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, Alton B.; O'Neill, Anthony G. (2009) -
Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
Tokei, Zsolt; Vega Gonzalez, Victor; Murdoch, Gayle; O'Toole, Martin; Croes, Kristof; Baert, Rogier; van der Veen, Marleen; Adelmann, Christoph; Soulie, Jean-Philippe; Boemmels, Juergen; Wilson, Chris; Park, Seongho; Sankaran, Kiroubanand; Pourtois, Geoffrey; Swerts, Johan; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Lazzarino, Frederic; Versluijs, Janko; Blanco, Victor; Ercken, Monique; Kesters, Els; Le, Quoc Toan; Holsteyns, Frank; Heylen, Nancy; Teugels, Lieve; Devriendt, Katia; Struyf, Herbert; Morin, Pierre; Jourdan, Nicolas; Van Elshocht, Sven; Ciofi, Ivan; Gupta, Anshul; Zahedmanesh, Houman; Vanstreels, Kris; Na, Myung Hee (2020) -
Influence of test structure design on stress-induced-voiding using an experimentally validated finite element modeling approach
Lofrano, Melina; Croes, Kristof; De Wolf, Ingrid; Wilson, Chris (2011) -
Initial void characterization in 30nm wide polycrystalline Cu line using a local sense EM test structure
Kirimura, Tomoyuki; Croes, Kristof; Li, Yunlong; Demuynck, Steven; Wilson, Chris; Lofrano, Melina; Tokei, Zsolt (2012-04)