Browsing by author "Clarysse, Trudo"
Now showing items 41-60 of 213
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CMOS scaling beyond the 90 nm CMOS technology node: shallow junction and integration challenges
Dachs, Charles; Surdeanu, Radu; Pawlak, Bartek; Doornbos, Gerben; Duffy, R.; Heringa, Anco; Ponomarev, Youri; Venezia, Vincent; Van Dal, Mark; Stolk, P.; Lindsay, Richard; Henson, Kirklen; Dieu, B.; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried; Pagès, Xavier (2003) -
Copper grain growth in reduced dimensions
Brongersma, Sywert; Vanstreels, Kris; Wu, W.; Zhang, Wenqi; Ernur, Didem; D'Haen, Jan; Terzieva, Valentina; Van Hove, Marleen; Clarysse, Trudo; Carbonell, Laure; Vandervorst, Wilfried; De Ceuninck, Ward; Maex, Karen (2004-06) -
Cross-sectional nano-spreading resistance profiling
De Wolf, Peter; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L.; Niedermann, P.; Hänni, W. (1998) -
Cross-sectional nano-srp dopant profiling
De Wolf, Peter; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L.; Niedermann, P.; Hanni, W. (1997) -
CVD epitaxial growth of GeSn opens a new route for advanced Sn-based logic and photonics devices
Vincent, Benjamin; Gencarelli, Federica; Kumar, Arul; Vantomme, Andre; Merckling, Clement; Lin, Dennis; Afanasiev, Valeri; Eneman, Geert; Clarysse, Trudo; Firrincieli, Andrea; Vandervorst, Wilfried; Dekoster, Johan; Loo, Roger; Caymax, Matty (2012) -
Defect removal, dopant diffusion and activation issues in ion-implanted shallow junctions fabricated in crystalline germanium substrates
Simoen, Eddy; Satta, Alessandra; Meuris, Marc; Janssens, Tom; Clarysse, Trudo; Benedetti, Alessandro; Demeurisse, Caroline; Brijs, Bert; Hoflijk, Ilse; Vandervorst, Wilfried; Claeys, Cor (2005) -
Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
Duhayon, Natasja; Clarysse, Trudo; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L. (2002) -
Development of a dedicated software for the quantification of two-dimensional high vacuum scanning spreading resistance microscopy measurements
Eyben, Pierre; Clarysse, Trudo; Schulze, Andreas; Nazir, Aftab; Vandervorst, Wilfried (2012) -
Diamond nanoprobes for electrical probing of nanoelectronics device structures
Hantschel, Thomas; Clarysse, Trudo; Nuytten, Thomas; Paredis, Kristof; Eyben, Pierre; Vandervorst, Wilfried (2013) -
Diamond tips for automated electrical probing inside a scanning electron microscopy system
Hantschel, Thomas; Arstila, Kai; Olantera, Lauri; Schulze, Andreas; Werner, Thilo; Eyben, Pierre; Clarysse, Trudo; Vandervorst, Wilfried (2011) -
Diffusion, activation and recrystallization of boron implanted in preamorphized and crystalline germanium
Satta, Alessandra; Simoen, Eddy; Clarysse, Trudo; Janssens, Tom; Benedetti, Alessandro; De Jaeger, Brice; Meuris, Marc; Vandervorst, Wilfried (2005) -
Dopant/carrier profiling for ULSI
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert (1998) -
Dopants for N and P junctions in germanium
Satta, Alessandra; Simoen, Eddy; Meuris, Marc; Janssens, Tom; Clarysse, Trudo; Demeurisse, Caroline; Hoflijk, Ilse; Vandervorst, Wilfried (2005) -
Electrical characterization of InGaAs ultra-shallow junctions
Petersen, Dirch H.; Hansen, Ole; Boggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo (2009) -
Electrical characterization of InGaAs ultra-shallow junctions
Petersen, Dirch H.; Hansen, Ole; Bĝggild, Peter; Lin, Rong; Nielsen, Peter F.; Lin, Dennis; Adelmann, Christoph; Alian, AliReza; Merckling, Clement; Penaud, Julien; Brammertz, Guy; Goossens, Jozefien; Vandervorst, Wilfried; Clarysse, Trudo (2010) -
Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
De Wolf, Peter; Trenkler, Thomas; Clarysse, Trudo; Caymax, Matty; Vandervorst, Wilfried; Snauwaert, J.J.; Hellemans, L. (1996) -
Electrical characterization of ultra shallow dopant profiles
Clarysse, Trudo; Vandervorst, Wilfried; Collart, E. J. H.; Murell, A. J. (1999) -
Electrical characterization of ultrashallow dopant profiles
Clarysse, Trudo; Vandervorst, Wilfried; Collart, E. J. H.; Murrell, A. J. (2000) -
Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Salnik, Alex (2010) -
Epitaxial staircase structure for the calibration of electrical characterisation techniques
Clarysse, Trudo; Caymax, Matty; De Wolf, Peter; Trenkler, Thomas; Vandervorst, Wilfried; McMurray, J. S.; Kim, J.; Williams, C. C.; Clark, J G.; Neubauer, G. (1997)