Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Demonstration of a novel low cost single material temporary bond solution for high topography substrates based on a mechanical wafer debonding and innovative adhesive removal
Publication:
Demonstration of a novel low cost single material temporary bond solution for high topography substrates based on a mechanical wafer debonding and innovative adhesive removal
Copy permalink
Date
2015
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Phommahaxay, Alain
;
Nakamura, Atsushi
;
Jourdain, Anne
;
Verbinnen, Greet
;
Kamochi, Yoshitaka
;
Koyama, Ichiro
;
Iwai, Yu
;
Sawano, Mitsuru
;
Tan, Shiro
;
Miller, Andy
;
Beyer, Gerald
;
Sleeckx, Erik
;
Beyne, Eric
Journal
Abstract
Description
Metrics
Views
1908
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-12
Citations
Metrics
Views
1908
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-12
Citations