Authors

Vais, Abhitosh; Alian, AliReza; Nyns, Laura; Franco, Jacopo; Sioncke, Sonja; Putcha, Vamsi; Yu, Hao; Mols, Yves; Rooyackers, Rita; Lin, Dennis; Maes, Jan; Xie, Qi; Givens, M.; Tang, F.; Jiang, X.; Mocuta, Anda; Collaert, Nadine; De Meyer, Kristin; Thean, Aaron

Conference

IEEE Symposium on VLSI Technology

Title

Record mobility (μeff ~3100 cm²/V-s) and reliability performance (Vov~0.5V for 10yr operation) of In0.53Ga0.47As MOS devices using improved surface preparation and a novel interfacial layer

Publication type

Proceedings paper

Embargo date

9999-12-31