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EUV Single Patterning Exploration for Pitch 28 nm
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Authors
Xu, Dongbo
;
Gillijns, Werner
;
Drissi, Youssef
;
Tan, Ling Ee
;
Oak, Apoorva
;
Kim, Ryan Ryoung han
Editors
Yuan, Chi-Min
;
Kim, Ryan Ryoung
DOI
10.1117/12.2584730
EISBN
978-1-5106-4062-7
ISSN
0277-786X
Conference
Conference on Design-Process-Technology Co-optimization XV
Journal
SPIE paper
Volume
11614
Title
EUV Single Patterning Exploration for Pitch 28 nm
Publication type
Proceedings paper
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Conference contributions
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Date
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3
20.500.12860/37771.3
*
2022-06-24T07:49:57Z
validation by library/open access desk
2
20.500.12860/37771.2
2022-05-05T06:53:31Z
validation by imec author
1
20.500.12860/37771
2021-11-02T15:59:40Z
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