Browsing Conference contributions by imec author "12f8a0f94b13e71c0109516b30f6e3a597216da0"
Now showing items 1-20 of 59
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0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
Menou, Nicolas; Wang, Xin Peng; Kaczer, Ben; Polspoel, Wouter; Popovici, Mihaela Ioana; Opsomer, Karl; Pawlak, Malgorzata; Knaepen, W.; Detavernier, C.; Blomberg, T.; Pierreux, D.; Swerts, Johan; Maes, Jan; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2008) -
Advanced capacitor dielectrics: towards 2x nm DRAM
Kim, Min-Soo; Popovici, Mihaela Ioana; Swerts, Johan; Pawlak, Malgorzata; Tomida, Kazuyuki; Kaczer, Ben; Opsomer, Karl; Schaekers, Marc; Tielens, Hilde; Vrancken, Christa; Van Elshocht, Sven; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2011-05) -
Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films
Opsomer, Karl; Schaekers, Marc; Rampelberg, G.; Deduytsche, D.; Detavernier, C.; Kittl, Jorge (2009) -
Atomic-layer deposition of lutetium aluminate thin films for non-volatile memory applications
Adelmann, Christoph; Swerts, Johan; Conard, Thierry; Brijs, Bert; Franquet, Alexis; Hardy, An; Tielens, Hilde; Opsomer, Karl; Moussa, Alain; Van Bael, Marlies; Jurczak, Gosia; Kittl, Jorge; Van Elshocht, Sven (2011) -
Atomistic investigation of the electronic structure, thermal properties and conduction defects in Ge-rich GexSe1-x materials for selector applications
Clima, Sergiu; Govoreanu, Bogdan; Opsomer, Karl; Velea, Alin; Avasarala, Naga Sruti; Devulder, Wouter; Shlyakhov, I.; Donadio, Gabriele Luca; Witters, Thomas; Kundu, Shreya; Goux, Ludovic; Afanasiev, Valeri; Kar, Gouri Sankar; Pourtois, Geoffrey (2017) -
CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON
Lauwers, Anne; Veloso, Anabela; Hoffmann, Thomas Y.; Van Dal, Mark; Vrancken, Christa; Brus, Stephan; Locorotondo, Sabrina; de Marneffe, Jean-Francois; Sijmus, Bram; Kubicek, Stefan; Chiarella, Thomas; Kmieciak, Malgorzata; Opsomer, Karl; Niwa, Masaaki; Mitsuhashi, Riichirou; Kottantharayil, Anil; Yu, HongYu; Demeurisse, Caroline; Verbeeck, Rita; de Potter de ten Broeck, Muriel; Absil, Philippe; Maex, Karen; Jurczak, Gosia; Biesemans, Serge; Kittl, Jorge (2005-12) -
Co-germanide Schottky contacts on Ge
Lajaunie, L.; David, M.L.; Opsomer, Karl; Simoen, Eddy; Claeys, Cor; Barbot, J.F. (2008) -
Composition optimization and device understanding of Si-Ge-As-Te ovonic threshold switch selector with excellent endurance
Garbin, Daniele; Devulder, Wouter; Degraeve, Robin; Donadio, Gabriele Luca; Clima, Sergiu; Opsomer, Karl; Fantini, Andrea; Cellier, Daniel; Kim, Wan Gee; Pakala, Mahendra; Cockburn, Andrew; Detavernier, Christophe; Delhougne, Romain; Goux, Ludovic; Kar, Gouri Sankar (2019) -
Compositional study of BaSrTiO thin films for memory application
Tomida, Kazuyuki; Opsomer, Karl; Vrancken, Christa; Matero, Raija; Tois, Eva; Kaczer, Ben; Pawlak, Malgorzata; Popovici, Mihaela Ioana; Swerts, Johan; Van Elshocht, Sven; Detavernier, Christophe; Kim, Min-Soo; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2010) -
Conductive filaments multiplicity as a variability factor in CBRAM
Celano, Umberto; Goux, Ludovic; Belmonte, Attilio; Opsomer, Karl; Detavernier, Christophe; Jurczak, Gosia; Vandervorst, Wilfried (2015) -
Conductive-AFM tomography for 3D filament observation in resistive switching devices
Celano, Umberto; Goux, Ludovic; Belmonte, Attilio; Schulze, Andreas; Opsomer, Karl; Detavernier, Christoph; Richard, Olivier; Bender, Hugo; Jurczak, Gosia; Vandervorst, Wilfried (2013) -
Control of metal/oxide electron barriers in CB-RAM cells by low work-function liners
De Stefano, Francesca; Afanasiev, Valeri; Houssa, Michel; Stesmans, Andre; Opsomer, Karl; Jurczak, Gosia; Goux, Ludovic (2013) -
Cu migration in conducting bridging meories as studied by C-AFM
Celano, Umberto; Conard, Thierry; Opsomer, Karl; Goux, Ludovic; Jurczak, Gosia; Vandervorst, Wilfried (2012) -
Demonstration of Ni fully GermanoSilicide as a pFET gate electrode candidate on HfSiON
Yu, HongYu; Singanamalla, Raghunath; Opsomer, Karl; Augendre, Emmanuel; Simoen, Eddy; Kittl, Jorge; Kubicek, Stefan; Severi, Simone; Shi, Xiaoping; Brus, Stephan; Zhao, Chao; de Marneffe, Jean-Francois; Locorotondo, Sabrina; Shamiryan, Denis; Van Dal, Mark; Veloso, Anabela; Lauwers, Anne; Niwa, Masaaki; Maex, Karen; De Meyer, Kristin; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
Doped GeSe materials for selector applications
Avasarala, Naga Sruti; Govoreanu, Bogdan; Opsomer, Karl; Devulder, Wouter; Clima, Sergiu; Detavernier, Christophe; van der Veen, Marleen; Van Houdt, Jan; Heyns, Marc; Goux, Ludovic; Kar, Gouri Sankar (2017) -
Enabling 3X nm DRAM: Record low leakage 0.4 nm EOT MIM capacitors with novel stack engineering
Pawlak, Malgorzata; Popovici, Mihaela Ioana; Swerts, Johan; Tomida, Kazuyuki; Kim, Min-Soo; Kaczer, Ben; Opsomer, Karl; Schaekers, Marc; Favia, Paola; Bender, Hugo; Vrancken, Christa; Govoreanu, Bogdan; Demeurisse, Caroline; Wang, Wan-Chih; Afanasiev, Valeri; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge (2010) -
Engineering and stack optimization of Cu-based selector devices for low power SCM applications
Barci, Marinela; Fantini, Andrea; Redolfi, Augusto; Kundu, Shreya; Devulder, Wouter; Opsomer, Karl; Delhougne, Romain; Goux, Ludovic; Kar, Gouri Sankar; Witters, Thomas (2018) -
Evaluation of Ta-Co alloys as novel high-k EUV mask absorber
Thakare, Devesh; Wu, Meiyi; Opsomer, Karl; Detavernier, Christophe; Naujok, Philipp; Saadeh, Qais; Soltwisch, Victor; Delabie, Annelies; Philipsen, Vicky (2022) -
Field-driven ultrafast sub-ns programming in W\Al2O3\Ti\CuTe-based 1T1R CBRAM system
Goux, Ludovic; Sankaran, Kiroubanand; Kar, Gouri Sankar; Jossart, Nico; Opsomer, Karl; Degraeve, Robin; Pourtois, Geoffrey; Rignanese, G.-M.; Detavernier, C.; Clima, Sergiu; Chen, Yangyin; Fantini, Andrea; Govoreanu, Bogdan; Wouters, Dirk; Jurczak, Gosia; Altimime, Laith; Kittl, Jorge (2012) -
First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials
Stortelder, Jetske; Ebeling, Robert P.; Rijnsent, Corne; van Putten, Michel; de Rooij-Lohmann, Veronique; Smit, Maximilian; Storm, Arnold J.; Koster, Norbert; Lensen, Henk A.; Philipsen, Vicky; Opsomer, Karl; Thakare, Devesh; Feigl, Torsten; Naujok, Philipp (2021)