EISBN
978-1-5106-5640-6
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
SPIE Photomask Technology + EUV Lithography 2022
Volume
12292
Title
Extraction of Roughness Measurements from Thin Resists with Low Signal-to-Noise-Ratio (SNR) SEM Images by Applying Deep Learning Denoiser
Publication type
Proceedings paper