Browsing Articles by author "Iacopi, Francesca"
Now showing items 1-20 of 40
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An optimized process for the production of advanced planar wire grid plates as detectors for high energy physics experiments
Iacopi, Francesca; Devroede, Olivier; Pins, Rolande; Van Hoof, Rita; Honoré, Mia; Zhukov, V.; Van Lancker, L.; Van Doninck, W.; Beyne, Eric (2001) -
Barrier studies on porous silk semiconductor dielectric
Tokei, Zsolt; Iacopi, Francesca; Richard, Olivier; Waeterloos, Joost; Rozeveld, S.; Beach, E.; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen (2003) -
Barriers for Cu/low k damascene structures
Maex, Karen; Tokei, Zsolt; Satta, Alessandra; Lanckmans, Filip; Wu, Wen; Iacopi, Francesca (2001) -
Calculation of the Au-Ge phase diagram for nanoparticles
Eichhammer, Yann; Roeck, Joris; Moelans, Nele; Iacopi, Francesca; Blanpain, Bart; Heyns, Marc (2008) -
Challenges for structural stability of ultra-low-k based interconnects
Iacopi, Francesca; Brongersma, Sywert; Vandevelde, Bart; Travaly, Youssef; Maex, Karen (2004) -
Challenges in the implentation of low-k dielectrics in the back-end of line
Hoofman, Romano; Brom - Verheyden, Greja; Michelon, Julien; Iacopi, Francesca; Travaly, Youssef; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald (2005) -
Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109
Das, Arabinda; Kokubo, Terukazu; Furukawa, Yukiko; Struyf, Herbert; Vos, Ingrid; Sijmus, Bram; Iacopi, Francesca; Van Aelst, Joke; Le, Quoc Toan; Carbonell, Laure; Brongersma, Sywert; Maenhoudt, Mireille; Tokei, Zsolt; Vervoort, Iwan; Sleeckx, Erik; Stucchi, Michele; Schaekers, Marc; Boullart, Werner; Rosseel, Erik; Van Hove, Marleen; Vanhaelemeersch, Serge; Shiota, A.; Maex, Karen (2002) -
Characterisation of JSR's spin-on hardmask FF-02
Das, Arabinda; Le, Quoc Toan; Furukawa, Yukiko; Nguyen Hoang, Viet; Terzieva, Valentina; de Theije, Femke; Whelan, Caroline; Maenhoudt, Mireille; Struyf, Herbert; Tokei, Zsolt; Iacopi, Francesca; Stucchi, Michele; Carbonell, Laure; Vos, Ingrid; Bender, Hugo; Patz, M.; Beyer, Gerald; Van Hove, Marleen; Maex, Karen (2003) -
Characterization of molecular sieve coating using ellipsometric porosimetry
Eslava Fernandez, Salvador; Baklanov, Mikhaïl; Kirschhock, Christine E. A.; Iacopi, Francesca; Aldea, Steliana; Maex, Karen; Martens, Johan A. (2008) -
Characterization of porous structure in ultra-low-k dielectrics by depositing thin conductive cap layers
Iacopi, Francesca; Tokei, Zsolt; Stucchi, Michele; Brongersma, Sywert; Vanhaeren, Danielle; Maex, Karen (2003) -
Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions
Eslava Fernandez, Salvador; Kirschhock, Christine E. A.; Aldea, Steliana; Baklanov, Mikhaïl; Iacopi, Francesca; Maex, Karen; Martens, Johan A. (2009) -
Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system
Iacopi, Francesca; Brongersma, Sywert; Maex, Karen (2003) -
Correlation between barrier integrity and TDDB performance of copper porous low-k interconnects
Tokei, Zsolt; Patz, Matthias; Schmidt, Michael; Iacopi, Francesca; Demuynck, Steven; Maex, Karen (2004) -
Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Iacopi, Francesca; Zistl, C.; Jehoul, Christiane; Tokei, Zsolt; Le, Quoc Toan; Das, Arabinda; Sullivan, C.; Prokopowicz, G.; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2002) -
Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines
Iacopi, Francesca; Tokei, Zsolt; Stucchi, Michele; Lanckmans, Filip; Maex, Karen (2003) -
Efficient pore sealing crucial for future interconnects
Van Bavel, Mieke; Beyer, Gerald; Iacopi, Francesca; Abell, Thomas; Shamiryan, Denis; Maex, Karen (2004) -
Evaluation of thin Ta(N) film integrity deposited on porous glasses
Shamiryan, Denis; Baklanov, Mikhaïl; Yanovitskaya, Z.S.; Zverev, A.V.; Tokei, Zsolt; Iacopi, Francesca; Maex, Karen (2003) -
Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
Eslava Fernandez, Salvador; Baklanov, Mikhaïl; Neimark, Alex. V.; Iacopi, Francesca; Kirschhock, Christine E. A.; Maex, Karen; Martens, Johan A. (2008) -
Factors affecting an efficient sealing of porous low-K dielectrics by physical vapor deposition Ta(N) thin films
Iacopi, Francesca; Tokei, Zsolt; Le, Quoc Toan; Shamiryan, Denis; Conard, Thierry; Brijs, Bert; Kreissig, U.; Van Hove, Marleen; Maex, Karen (2002) -
Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance
Iacopi, Francesca; Patz, Michael; Vos, Ingrid; Tokei, Zsolt; Sijmus, Bram; Le, Quoc Toan; Sleeckx, Erik; Eyckens, Brenda; Struyf, Herbert; Das, Arabinda; Maex, Karen (2003)