Browsing Articles by imec author "8c38dd5e192a931bf45f91c2074997a23f8a79b1"
Now showing items 1-16 of 16
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Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling
Wei, Chih-, I; Kang, Seulki; Das, Sayantan; Oya, Masahiro; Okamoto, Yosuke; Maruyama, Kotaro; Fenger, Germain; Latypov, Azat; Kusnadi, Ir; Khaira, Gurdaman; Yamazaki, Yuichiro; Gillijns, Werner; Halder, Sandip; Lorusso, Gian (2023) -
Barium titanate based nano-composite thin films for miniaturized multi-layered ceramic capacitors prepared from nano-particle based novel hybrid solutions
Halder, Sandip; Schneller, Theodor; Waser, Rainer (2011) -
Code Generation Using Machine Learning: A Systematic Review
Dehaerne, Enrique; Dey, Bappaditya; Halder, Sandip; De Gendt, Stefan; Meert, Wannes (2022) -
Compositional substitutions and aliovalent doping of BaTiO3-based thin films on nickel foils prepared by chemical solution deposition
Bretos, Inigo; Schneller, Theodor; Waser, Rainer; Hennings, Detlef; Halder, Sandip; Thomas, Florian (2010) -
Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope
Neumann, Jens Timo; Srikantha, Abhilash; Huethwohl, Philipp; Lee, Keumsil; William, B. James; Korb, Thomas; Foca, Eugen; Garbowski, Tomasz; Boecker, Daniel; Das, Sayantan; Halder, Sandip (2023) -
e-beam metrology of thin resist for high NA EUVL
Lorusso, Gian; De Simone, Danilo; Zidan, Mohamed; Severi, Joren; Moussa, Alain; Dey, Bappaditya; Halder, Sandip; Goldenshtein, Alex; Houchens, Kevin; Santoro, Gaetano; Fischer, Daniel; Muellender, Angelika; Mack, Chris; Kondo, Tsuyoshi; Shohjoh, Tomoyasu; Ikota, Masami; Charley, Anne-Laure; De Gendt, Stefan; Leray, Philippe (2023) -
E-test validation of space error budget and metrology
Schelcher, Guillaume; De Poortere, Etienne P.; Kissoon, Nicola; Paolillo, Sara; e Silva, Marsil A. C.; Zhang, Yichen; Tabery, Cyrus; Mulkens, Jan; McManus, Moyra; Leray, Philippe; Halder, Sandip (2022-06-30) -
Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool
Halder, Sandip; Vos, Rita; Wada, Masayuki; Tsvetanova, Diana; Claes, Martine; Mertens, Paul; Radovanovic, Sanda; Dighe, Prasanna; Amann, Christophe; Simpson, Gavin; Polli, Marco (2010) -
In-line process variance monitoring of advanced 3D TSV production lines
Guittet, Pierre-Yves; Markwort, Lars; Savage, Greg; Jourdain, Anne; Halder, Sandip (2010) -
Investigating metal oxide resists for patterning 28-nm pitch structures using single exposure extreme ultraviolet: defectivity, electrical test, and voltage contrast study
Sarkar, Sujan Kumar; Das, Sayantan; Blanco, Victor; Leray, Philippe; Halder, Sandip (2022) -
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
Ngo, Anh Tuan; Dey, Bappaditya; Halder, Sandip; De Gendt, Stefan; Wang, Changhai (2023) -
Manufacturing challenges of GaN-on-Si HEMTs in a 200 mm CMOS fab
Marcon, Denis; De Jaeger, Brice; Halder, Sandip; Vranckx, Nick; Mannaert, Geert; Van Hove, Marleen; Decoutere, Stefaan (2013) -
Metrology and inspection requirements for successful stacking of integrated circuits
Halder, Sandip; Miller, Andy; Van Puymbroeck, Jan; Nieuborg, Nancy; Beyne, Eric (2014) -
Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solvents
Barbagini, Francesca; Halder, Sandip; Janssens, Tom; Kenis, Karine; Wostyn, Kurt; Bearda, Twan; Le, Quoc Toan; Leunissen, Peter; Mertens, Paul; Kim, Kyung Hyun; Andreas, Michael (2009) -
Screening of 193i and EUV lithography process options for STT-MRAM orthogonal array MTJ pillars
Pak, Murat; Zanders, Wesley; Wong, Patrick; Halder, Sandip (2021) -
Use of surface haze for evaluation of photoresist residue removal efficiency
Halder, Sandip; Vos, Rita; Wada, Masayuki; Kenis, Karine; Bearda, Twan; Radovanovic, Sanda; Dighe, Prasanna; Leunissen, Peter; Mertens, Paul (2009)