Browsing Articles by imec author "e576afbf43add4095143c6322cedb3ccde8f2762"
Now showing items 1-20 of 274
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A CAD-oriented analytical model for frequency-dependent series resistance and inductance of microstrip on-chip interconnect on silicon substrate
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; Vandenberghe, S.; De Roest, David (2002) -
A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap
Kondoh, Eiichi; Conard, Thierry; Brijs, Bert; Jin, S.; Bender, Hugo; de Potter de ten Broeck, Muriel; Maex, Karen (1999) -
A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
Lanckmans, Filip; Gray, William; Brijs, Bert; Maex, Karen (2001) -
A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gate
Wang, Qingfeng; Lauwers, A.; Deweerdt, Bruno; Verbeeck, Rita; Loosen, Fred; Maex, Karen (1995) -
A new approach for the calculation of line capacitances of two-layer IC interconnects
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David (2000) -
A new method for the lifetime determination of submicron metal interconnects by means of a parallel test structure
Vanstreels, Kris; D'Olieslaeger, Marc; De Ceuninck, Ward; D'Haen, Jan; Maex, Karen (2005) -
A physics-based VLSI interconnect model including substrate and conductor skin effects
Ymeri, H.; Nauwelaers, Bart; Maex, Karen; De Roest, David (2004) -
A quantitative adhesion study between contacting materials in Cu damascene structures
Lanckmans, Filip; Brongersma, Sywert; Varga, Istvan; Poortmans, Jef; Bender, Hugo; Conard, Thierry; Maex, Karen (2002) -
A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopy
De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman (1997) -
A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates
Travaly, Youssef; Schuhmacher, Jorg; Baklanov, Mikhaïl; Giangrandi, Simone; Richard, Olivier; Brijs, Bert; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Somers, K.R.F; Hendrickx, M.F.A; Vanquickenborne, L.G.; Ceulemans, A.; Jonas, A.M (2005-10) -
A thermal stability study of Alkane and aromatic thiolate self-assembled monolayers on copper surfaces
Carbonell, Laure; Whelan, Caroline; Kinsella, Michael; Maex, Karen (2004) -
Accurate analytic expressions for frequency-dependent inductance and resistance of single on-chip interconnects on conductive silicon Substrate
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen; De Roest, David; Vandenberghe, S. (2002) -
Accurate closed-form expression for the frequency- dependent mutual impedance of on-chip interconnects on lossy silicon substrate
Ymeri, Hasan; Nauwelaers, Bart; Maex, Karen (2001) -
Add-on Cu/Silk (Tm) module for high Q inductors
Jenei, Snezana; Decoutere, Stefaan; Maex, Karen; Nauwelaers, Bart (2002) -
Al speed fill
Beyer, Gerald; Maex, Karen; Daniels, Stephen; Lee, S.; Proost, Joris; Bender, Hugo; Judelewicz, Moshe; Maity, Nirmalya (1999) -
Analyses of post metal etch cleaning in downstream H2O-based plasma followed by a wet chemistry
Li, H.; Baklanov, Mikhaïl; Boullart, Werner; Conard, Thierry; Brijs, Bert; Maex, Karen; Froyen, L. (1999) -
Analysis of the size effect in electroplated fine copper wires and a realistic assessment to model copper resistivity
Zhang, Wenqi; Brongersma, Sywert; Li, Zhen; Li, dagang; Richard, Olivier; Maex, Karen (2007) -
Applications of in-line oxygen monitoring to a rapid thermal processing tool: diagnosing gas flow dynamics and silicidation processes
Kondoh, Eiichi; Baklanov, Mikhaïl; Maex, Karen (2000) -
Barrier studies on porous silk semiconductor dielectric
Tokei, Zsolt; Iacopi, Francesca; Richard, Olivier; Waeterloos, Joost; Rozeveld, S.; Beach, E.; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen (2003) -
Barriers for Cu/low k damascene structures
Maex, Karen; Tokei, Zsolt; Satta, Alessandra; Lanckmans, Filip; Wu, Wen; Iacopi, Francesca (2001)