Browsing Articles by imec author "a62c69c3a7e310de5b19d9226496e4649a07d978"
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Direct evidence of linewidth effect: Ni31Si12 and Ni3Si formation on 25 nm Ni fully silicided gates
Kittl, Jorge; Lauwers, Anne; Demeurisse, Caroline; Vrancken, Christa; Kubicek, Stefan; Absil, Philippe; Biesemans, Serge (2007) -
Dual work function metal gate CMOS by means of full silicidation (FUSI)
Absil, Philippe; Biesemans, Serge; Kittl, Jorge; Lauwers, Anne (2005-12) -
Effect of mask discretization on performance of silicon arrayed waveguide gratings
Pathak, Shibnath; Vanslembrouck, Michael; Dumon, Pieter; Van Thourhout, Dries; Verheyen, Peter; Lepage, Guy; Absil, Philippe; Bogaerts, Wim (2014-04) -
Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers
Machkaoutsan, Vladimir; Verheyen, Peter; Bauer, M.; Zhang, Y.; Koelling, Sebastian; Franquet, Alexis; Vanormelingen, Koen; Loo, Roger; Kim, C.S.; Lauwers, Anne; Horiguchi, Naoto; Kerner, Christoph; Hoffmann, Thomas; Granneman, E.; Vandervorst, Wilfried; Absil, Philippe; Thomas, S.G. (2010) -
Electrical properties of low-VT metal-gated n-MOSFETs using La2O3/SiOx as interfacial layer between HfLaO high-k dielectrics and Si channel
Chang, Shou-Zen; Yu, Hong-Yu; Adelmann, Christoph; Delabie, Annelies; Wang, Xin Peng; Van Elshocht, Sven; Akheyar, Amal; Nyns, Laura; Swerts, Johan; Aoulaiche, Marc; Kerner, Christoph; Absil, Philippe; Hoffmann, Thomas Y.; Biesemans, Serge (2008-05) -
Electrical properties of n-MOSFETs using the NiSi:Yb FUSI electrode
Yu, HongYu; Lauwers, Anne; Demeurisse, Caroline; Richard, Olivier; Mertens, Sofie; Opsomer, Karl; Singanamalla, Raghunath; Rosseel, Erik; Absil, Philippe; Biesemans, Serge (2007-02) -
Electro-optic organic crystal silicon high-speed modulator
Korn, D.; Jazbinsek, M.; Palmer, R.; Baier, M.; Alloatti, L; Hui, Yu; Bogaerts, Wim; Lepage, Guy; Verheyen, Peter; Absil, Philippe; Guenter, P.; Koos, C.; Freude, W.; Leuthold, J. (2014-04) -
Extraction of carrier lifetime in Ge waveguides using pump probe spectroscopy
Srinivasan, Ashwyn; Pantouvaki, Marianna; Verheyen, Peter; Lepage, Guy; Absil, Philippe; Van Campenhout, Joris; Van Thourhout, Dries (2016) -
Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
Masood, A.; Pantouvaki, Marianna; Goossens, Danny; Lepage, Guy; Verheyen, Peter; Van Campenhout, Joris; Absil, Philippe; Van Thourhout, Dries; Bogaerts, Wim (2014-07) -
Fabrication-tolerant four-channel wavelength-division-multiplexing filter based on collectively tuned Si microrings
De Heyn, Peter; De Coster, Jeroen; Verheyen, Peter; Lepage, Guy; Pantouvaki, Marianna; Absil, Philippe; Bogaerts, Wim; Van Campenhout, Joris; Van Thourhout, Dries (2013) -
High hole mobility in 65 nm strained Ge p-channel field effect transistors with HfO2 gate dielectric
Mitard, Jerome; De Jaeger, Brice; Eneman, Geert; Dobbie, Andrew; Myronov, M.; Kobayashi, Masaharu; Geypen, Jef; Bender, Hugo; Vincent, Benjamin; Krom, Raymond; Franco, Jacopo; Winderickx, Gillis; Vrancken, Evi; Vanherle, Wendy; Wang, Wei-E; Tseng, Joshua; Loo, Roger; De Meyer, Kristin; Caymax, Matty; Pantisano, Luigi; Leadley, D.R; Meuris, Marc; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y. (2011) -
High responsivity low-voltage 28Gb/s Ge p-i-n photodetector with silicon contacts
Chen, Hongtao; Verheyen, Peter; De Heyn, Peter; Lepage, Guy; De Coster, Jeroen; Absil, Philippe; Roelkens, Gunther; Van Campenhout, Joris (2015) -
High sensitivity 10 Gb/s Si photonic receiver based on a low-voltage waveguide-coupled Ge avalanche photodetector
Chen, Hongtao; Verbist, Jochem; Verheyen, Peter; De Heyn, Peter; Lepage, Guy; De Coster, Jeroen; Absil, Philippe; Yin, Xin; Bauwelinck, Johan; Van Campenhout, Joris; Roelkens, Gunther (2015-01) -
High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform
Vermeulen, Diedrik; Selvaraja, Shankar; Verheyen, Peter; Lepage, Guy; Bogaerts, Wim; Absil, Philippe; Van Thourhout, Dries; Roelkens, Gunther (2010) -
High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography
Xie, Weiqiang; Fiers, Martin; Selvaraja, Shankar; Bienstman, Peter; Van Campenhout, Joris; Absil, Philippe; Van Thourhout, Dries (2014) -
Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Machkaoutsan, Vladimir; Mertens, Sofie; Bauer, R.; Lauwers, Anne; Verheyden, Kurt; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Caymax, Matty; Jakschik, Stefan; Theodore, D.; Absil, Philippe; Thomas, S.; Granneman, E.H.A. (2007) -
Kinetics of Ni3Si2 formation in the Ni2Si-NiSi thin film reaction from in situ measurements
Kittl, Jorge; Pawlak, Malgorzata; Torregiani, Cristina; Lauwers, Anne; Demeurisse, Caroline; Vrancken, Christa; Absil, Philippe; Biesemans, Serge; Detavernier, Christophe; Jordan-Sweet, Jean; Lavoie, Christian (2007) -
Modeling copper plastic deformation and liner viscoelastic flow effects on performance and reliability in Through Silicon Via (TSV) fabrication processes
Karmarkar, A.P.; Xu, X.; El Sayed, K.; Guo, Wei; Van der Plas, Geert; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Absil, Philippe; Beyne, Eric (2019) -
Modulation of the effective work function of fully-silicided (FUSI) gate stacks
Kittl, Jorge; Lauwers, Anne; Pawlak, Malgorzata; Veloso, Anabela; Yu, HongYu; Chang, Shou-Zen; Hoffmann, Thomas Y.; Pourtois, Geoffrey; Brus, Stephan; Demeurisse, Caroline; Vrancken, Christa; Absil, Philippe; Biesemans, Serge (2007) -
Multi-gate fin field-effect transistors junctions optimization by conventional ion implantation for (Sub-)22 nm technology nodes circuit applications
Veloso, Anabela; De Keersgieter, An; Brus, Stephan; Horiguchi, Naoto; Absil, Philippe; Hoffmann, Thomas Y. (2011)